Patent US4669061A successfully refreshed from Google Patents.
Patent US4585991A successfully refreshed from Google Patents.
US4585991A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Solid state multiprobe testing apparatus
Assignee: Texas Instruments Inc
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Filing: 1985-03-13
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Granted: 1986-04-29
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Expires: 2005-03-13
Abstract
Abstract A high density multiprobe including a multiprobe on a semiconductor substrate with contact pads selectively positioned in relation to the contacts of a device to be tested. Each of the selectively positioned contacts on the multiprobe semiconductor substrate include an elevated conductive surface that makes physical and electrical contact with the contacts of the device to be tested. In addition, the elevated conductive surfaces on the multiprobe are conductively connected to interface terminals on the semiconductor substrate to allow test signals to be input and output from the multiprobe device during testing. The multiprobe semiconductor substrate is also capable of containing onboard circuitry including buffers and logic circuitry for processing the test signals to be sent to and received from the device under test. A multiprobe testing device is also disclosed that includes the multiprobe semiconductor substrate with elevated contacts to allow for the testing of a semiconductor device.
Inventors
- 👤 Lee R. Reid
- 👤 Tommy D. Cody
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 17:36
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R31/00; G01R31/28; G01R31/2851; G01R31/2886
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
95 words
A testing socket for electrical testing of devices, each having a substantially planar surface with an array of conductive pads disposed thereon comprising: (a) a holder for holding a said device in a fixed position; (b) a probe for contacting said device pads, said probe including a substantially planar semiconductor substrate with electrically conductive semiconductor projections integral with said substrate and disposed in an array corresponding to a mirror image of said array of pads; and (c) circuit means connected to said projections for testing of said device when said probe projections contact said pads.
Claim 2
Dependent Claim
95 words
A testing socket for electrical testing of devices, each having a substantially planar surface with an array of conductive pads disposed thereon comprising: (a) a holder for holding a said device in a fixed position; (b) a probe for contacting said device pads, said probe including a substantially planar semiconductor substrate with electrically conductive semiconductor projections integral with said substrate and disposed in an array corresponding to a mirror image of said array of pads; and (c) circuit means connected to said projections for testing of said device when said probe projections contact said pads.
Claim 3
Dependent Claim
33 words
The testing socket of claim 1, wherein: (a) said substrate is substantially single crystal silicon and said projections are characterized as formed of said crystal at least in part by orientation dependent etching.
Claim 4
Dependent Claim
18 words
The testing socket of claim 1, wherein: (a) said circuit is at least partially formed on said substrate.
Claim 5
Dependent Claim
28 words
The testing socket of claim 1, wherein: (a) at least one of said projections is insulated from the remainder of said substrate except for connection to said circuit.
Claim 6
Dependent Claim
21 words
The testing socket of claim 1, wherein: (a) said projections are formed in said substrate at flexible portions of said substrate.
Claim 7
Dependent Claim
27 words
The testing socket of claim 5, wherein: (a) said flexible portions are characterized by connection to the remainder of said substrate by bridges formed in said substrate.
Claim 8
Dependent Claim
33 words
The testing socket of claim 1, further comprising: (a) a vibrator for said probe, said vibrator characterized by vibration of said probe when in contact with said device pads for improved electrical contact.
Claim 9
Dependent Claim
14 words
The testing socket of claim 1, wherein: (a) said circuit includes test signal evaluators.
Claim 10
Dependent Claim
21 words
The testing socket of claim 8, wherein: (a) said circuit includes a display for the output of said test signal evaluators.
Claim 11
Dependent Claim
15 words
The testing socket of claim 1, wherein: (a) said circuit includes programmable test signal generators.
Claim 12
Dependent Claim
15 words
The testing socket of claim 1, wherein: (a) said projections include a wear-resistant conductive coating.
Claim 13
Dependent Claim
46 words
A probe for electrical contact to an array of pads comprising: (a) a substantially planar semiconductor substrate; and (b) electrically conductive semiconductor projections integral with said substrate and disposed on a surface of said substrate, said projections being arrayed in correspondence with said array of pads.
Claim 14
Dependent Claim
46 words
A probe for electrical contact to an array of pads comprising: (a) a substantially planar semiconductor substrate; and (b) electrically conductive semiconductor projections integral with said substrate and disposed on a surface of said substrate, said projections being arrayed in correspondence with said array of pads.
Claim 15
Dependent Claim
26 words
The probe of claim 12, wherein: (a) said substrate is substantially single crystal silicon and said projections are characterized by orientation dependent etching of said substrate.
Claim 16
Dependent Claim
13 words
The testing socket of claim 1 wherein said projections are of pyramidal shape.
Claim 17
Dependent Claim
13 words
The testing socket of claim 2 wherein said projections are of pyramidal shape.
Claim 18
Dependent Claim
13 words
The testing socket of claim 5 wherein said projections are of pyramidal shape.
Claim 19
Dependent Claim
13 words
The testing socket of claim 6 wherein said projections are of pyramidal shape.
Claim 20
Dependent Claim
13 words
The testing socket of claim 12 wherein said projections are of pyramidal shape.
Claim 21
Dependent Claim
13 words
The testing socket of claim 13 wherein said projections are of pyramidal shape.
Claim 22
Dependent Claim
20 words
The probe of claim 12, wherein: (a) said projections are formed in said substrate at flexible portions of said substrate.
Claim 23
Dependent Claim
26 words
The probe of claim 20, wherein: (a) said flexible portions are characterized by connection to the remainder of said substrate by bridges formed in said substrate.
Claim 24
Dependent Claim
20 words
The probe of claim 18, wherein: (a) said projections are formed in said substrate at flexible portions of said substrate.
Claim 25
Dependent Claim
26 words
The probe of claim 22, wherein: (a) said flexible portions are characterized by connection to the remainder of said substrate by bridges formed in said substrate.
Claim 26
Dependent Claim
20 words
The probe of claim 19, wherein: (a) said projections are formed in said substrate at flexible portions of said substrate.
Claim 27
Dependent Claim
26 words
The probe of claim 24, wherein: (a) said flexible portions are characterized by connection to the remainder of said substrate by bridges formed in said substrate.
Claim 28
Dependent Claim
16 words
The probe of claim 12 further including an electrically conductive wear resistive layer over said projections.
Claim 29
Dependent Claim
16 words
The probe of claim 13 further including an electrically conductive wear resistive layer over said projections.
Claim 30
Dependent Claim
16 words
The probe of claim 20 further including an electrically conductive wear resistive layer over said projections.
Claim 31
Dependent Claim
16 words
The probe of claim 21 further including an electrically conductive wear resistive layer over said projections.
Claim 32
Dependent Claim
16 words
The probe of claim 23 further including an electrically conductive wear resistive layer over said projections.
Claim 33
Dependent Claim
16 words
The probe of claim 15 further including an electrically conductive wear resistive layer over said projections.
Claim 34
Dependent Claim
33 words
The probe of claim 12 further including: (a) a vibrator for said probe, said vibrator characterized by vibration of said probe when in contact with said device pads for improved electrical contact therewith.
Claim 35
Dependent Claim
33 words
The probe of claim 13 further including: (a) a vibrator for said probe, said vibrator characterized by vibration of said probe when in contact with said device pads for improved electrical contact therewith.
Claim 36
Dependent Claim
33 words
The probe of claim 20 further including: (a) a vibrator for said probe, said vibrator characterized by vibration of said probe when in contact with said device pads for improved electrical contact therewith.
Claim 37
Dependent Claim
33 words
The probe of claim 21 further including: (a) a vibrator for said probe, said vibrator characterized by vibration of said probe when in contact with said device pads for improved electrical contact therewith.
Claim 38
Dependent Claim
33 words
The probe of claim 26 further including: (a) a vibrator for said probe, said vibrator characterized by vibration of said probe when in contact with said device pads for improved electrical contact therewith.
Claim 39
Dependent Claim
33 words
The probe of claim 27 further including: (a) a vibrator for said probe, said vibrator characterized by vibration of said probe when in contact with said device pads for improved electrical contact therewith.
Claim 40
Dependent Claim
33 words
The probe of claim 28 further including: (a) a vibrator for said probe, said vibrator characterized by vibration of said probe when in contact with said device pads for improved electrical contact therewith.
Claim 41
Dependent Claim
33 words
The probe of claim 29 further including: (a) a vibrator for said probe, said vibrator characterized by vibration of said probe when in contact with said device pads for improved electrical contact therewith.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-04-28 | 1989-10-28 | 1990-04-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-04-28 | 1993-10-28 | 1994-04-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-04-28 | 1997-10-28 | 1998-04-29 | $7700.00 | Window Closed / Lapsed |