Patent US4585348A successfully refreshed from Google Patents.
US4585348A
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US
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Ultra-fast photometric instrument
Assignee: International Business Machines Corp
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Filing: 1984-01-25
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Granted: 1986-04-29
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Expires: 2004-01-25
Abstract
Abstract This is a static photometric polarimeter for use with a sample S upon which a beam passed through a beam splitter (which reflects the beam to a detector D o ) and which beam is 45° polarized. The reflection of the beam from the surface of sample S is passed to a polarizing beam splitter with one portion of the reflected beam going to a detector D s which measures the perpendicular polarization component of the beam and the other portion of the beam going to the detector D p which measures the parallel polarized portion of the reflected beam.
Inventors
- 👤 Jean-Claude A. Chastang
- 👤 Walter W. Hildenbrand
- 👤 Menachem Levanoni
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 21:49
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/21; G01N21/211
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
161 words
An instrument for the static measurement of reflected intensities whose polarizations lie, parallel and perpendicular to the plane of incidence comprising: (a) a source of a polarized beam, (b) a first beam splitter for splitting said polarized beam towards a detector (D o ) and a sample, (c) means for supporting said sample in the path of the beam, (d) a second polarizing beam splitter for direct reception of the reflection of said beam from the surface of a sample in said sample position, and two detectors to receive only the parallel (D p ) and perpendicular (D s ) polarization components of said reflected split beam for computation of the index of refraction and film thickness of said sample by knowing the light intensities I o , I p and I s associated with the respective detectors and without mechanical motion of the instrument components and without intermediate determination of the ellipsometric angles, ellipse orientation (ψ), elliptical phase difference (Δ).
Claim 2
Dependent Claim
161 words
An instrument for the static measurement of reflected intensities whose polarizations lie, parallel and perpendicular to the plane of incidence comprising: (a) a source of a polarized beam, (b) a first beam splitter for splitting said polarized beam towards a detector (D o ) and a sample, (c) means for supporting said sample in the path of the beam, (d) a second polarizing beam splitter for direct reception of the reflection of said beam from the surface of a sample in said sample position, and two detectors to receive only the parallel (D p ) and perpendicular (D s ) polarization components of said reflected split beam for computation of the index of refraction and film thickness of said sample by knowing the light intensities I o , I p and I s associated with the respective detectors and without mechanical motion of the instrument components and without intermediate determination of the ellipsometric angles, ellipse orientation (ψ), elliptical phase difference (Δ).
Claim 3
Dependent Claim
18 words
An insturment is accordance with claim 1 wherein said source includes means for polarization of said light beam.
Claim 4
Dependent Claim
18 words
An instrument in accordance with claim 2 wherein said means for polarization polarizes said light beam at 45°.
Claim 5
Dependent Claim
19 words
An instrument in accordance with claim 2 wherein said means for polarization provides circular polarization of said light beam.
Claim 6
Dependent Claim
24 words
An instrument in accordance with claim 1 wherein the polarized light beam is directed at the sample at an angle of 5° to 90°.
Claim 7
Dependent Claim
24 words
An instrument in accordance with claim 5 wherein the polarized light beams is directed at the sample at an angle of incidence of 70°.
Claim 8
Dependent Claim
29 words
An instrument in accordance with claim 1 wherein the beam reflected from the surface of the sample is passed through an aperture located in front of the beam splitter.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-04-28 | 1989-10-28 | 1990-04-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-04-28 | 1993-10-28 | 1994-04-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-04-28 | 1997-10-28 | 1998-04-29 | $7700.00 | Window Closed / Lapsed |