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US4583857A Expired / Lapsed US ⏱️ 0.0 years remaining

Apparatus for automatic optical property testing

Assignee: International Business Machines Corp
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Filing: 1983-01-24
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Granted: 1986-04-22
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Expires: 2003-01-24
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Abstract

Abstract For testing substantially two-dimensional relief-structured patterns, in particular circuit boards, an optical scanning head is used which directs a light band according to the light sectioning principle at an angle α to the printed circuit board (10) and in which a linear scanning diode array (17a) is positioned in such a manner that it receives only such light as is reflected by the circuit boards whose surfaces have the nominal height h from the base plate (10). For continuously controlling the operating distance (1) between the linear diode array (17a) and the base plate (10), a pair of linear diode arrays (17b) is arranged parallel to the diode array between which the light reflected at the base plate (10) is incident if the nominal operating distance (1) has been kept and on which this light impinges if deviations of the operating distance have occurred. In each position of the light band, the scanning diode array (17a) is read with respect to the sample and data are fed to an evaluator circuit testing the nominal values of conductor widths and the minimum distances between conductors. Profile test circuits (212) determine whether in the case of deviations from the nominal values there are other permissible geometrical shapes (such as soldering pads).

Inventors

  • 👤 Michael Grammerstorff
  • 👤 Hans Pietruschka

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 20:29
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/308; G01R31/309

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 176 words
Apparatus for the automatic optical property testing of substantially two-dimensional relief-structured patterns, characterized in that an optical scanning head is positioned at a fixed operating distance (1) above a test pattern including a base plate having an object thereon of nominal height (h) above said plate movable relative to said head, said scanning head directing a light band, obliquely incident at an angle α, to said base plate and comprising a first linear photodiode array arranged parallel to said light band and perpendicularly above the intersection of the light band with the plane corresponding to said nominal height (h) in which the light reflected from said object is incident if the nominal height (h) is maintained, and a pair of second diode arrays arranged parallel to said first linear photodiode array, with a mutual spacing (m) in which the light reflected at said base plate is incident if the operating distance (1) has been kept, and that the output signals of said second diode array pair act as control signals for restoring the operating distance (1).
Claim 2
Dependent Claim 176 words
Apparatus for the automatic optical property testing of substantially two-dimensional relief-structured patterns, characterized in that an optical scanning head is positioned at a fixed operating distance (1) above a test pattern including a base plate having an object thereon of nominal height (h) above said plate movable relative to said head, said scanning head directing a light band, obliquely incident at an angle α, to said base plate and comprising a first linear photodiode array arranged parallel to said light band and perpendicularly above the intersection of the light band with the plane corresponding to said nominal height (h) in which the light reflected from said object is incident if the nominal height (h) is maintained, and a pair of second diode arrays arranged parallel to said first linear photodiode array, with a mutual spacing (m) in which the light reflected at said base plate is incident if the operating distance (1) has been kept, and that the output signals of said second diode array pair act as control signals for restoring the operating distance (1).
Claim 3
Dependent Claim 20 words
Apparatus according to claim 1, characterized in that the light band has a width of the order of 10 μm.
Claim 4
Dependent Claim 50 words
Apparatus according to claim 1, characterized in that the output signal of said first linear photodiode array (17a) is fed to an edge detector (207) generating a binary representation of the output signals of said first linear photodiode array (17a) by means of an up-dated black and white threshold value.
Claim 5
Dependent Claim 37 words
Apparatus according to claim 3, characterized in that continuous light and dark areas, respectively, of the binary representation are evaluated by edge-triggered counters (209, 210) and the counts are compared with predetermined nominal values (test circuit 211).
Claim 6
Dependent Claim 33 words
Apparatus according to claim 7, characterized in that test circuits for permissible patterns (profile recognition circuit means 212) are triggered if the nominal values are exceeded during the evaluation of the binary representation.
Claim 7
Dependent Claim 96 words
Apparatus according to claim 1, characterized in that the scanning head (40) comprises a fourth linear diode array (41) which is arranged parallel to said first linear photodiode array (17a), said fourth diode array (41) being positioned perpendicularly above the intersections of the boundary lines of the light band (43) with a further permissible height range, and that the output signals of said fourth linear diode array are fed to a further edge detector (222), whose output signals together with the signals generated by the first edge detector (207) are processed in a reflection detector (223).

References Cited (Backward Citations)

US3187185A Cited
US3612890A Cited
US3976382A Cited
US4105925A Cited
US4188544A Cited
US4472056A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-04-21 1989-10-21 1990-04-22 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-04-21 1993-10-21 1994-04-22 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-04-21 1997-10-21 1998-04-22 $7700.00 Window Closed / Lapsed

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