Patent US4582191A successfully refreshed from Google Patents.
US4582191A
Expired / Lapsed
US
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Article handling apparatus and method
Assignee: WORLDWIDE INNOVATIVE ENGINEERING
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Filing: 1985-02-28
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Granted: 1986-04-15
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Expires: 2005-02-28
Abstract
Abstract Apparatus and method for handling articles, such as semiconductor wafers, wherein an article is movable by the apparatus from one location along a continuous path to any one of a number of other locations in a sequence so that process steps for other functions can be performed at each station. The apparatus is suitable for use with a microscope having a work station at which articles can be inspected one after another. The apparatus includes a pair of concentric rings, the inner ring being rigidly secured to a microscope and surrounding the upright center post of the microscope. The outer ring is rotatable on the inner ring and has a number of circumferentially spaced article pick-up devices which operate to receive articles and carry them one by one to the work station where a vacuum chuck can become coupled to each article and an X-Y positioning unit can be used to shift the article beneath an optical system for viewing the article. Several embodiments of the pick-up devices on the outer ring are disclosed. The pick-up device can be a vacuum operated or mechanical in construction and at least one embodiment of each type of device is disclosed.
Inventors
- 👤 Robert E. Weigand
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 21:13
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/34; H10P72/3411; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137; Y10S414/141
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
164 words
In combination: a microscope having an upright post and a work station; a pair of concentric rings; means mounting one of the rings in a fixed position on said post in surrounding relationship thereto; means mounting the other ring on said one ring for rotation relative thereto with the other ring surrounding said one ring; means coupled with the other ring for rotating the same relative to said one ring; and a number of circumferentially spaced wafer pick-up devices secured to the other ring for movement therewith, each device adapted to receive a semiconductor wafer and to releasably couple the wafer to the other ring whereby, when the other ring moves relative to said one ring, the wafer can be transported from a first location along the outer periphery of the other ring to said work station and released and thereafter the wafer can be picked up from said work station and transported to a second location along said outer periphery and released again.
Claim 2
Dependent Claim
164 words
In combination: a microscope having an upright post and a work station; a pair of concentric rings; means mounting one of the rings in a fixed position on said post in surrounding relationship thereto; means mounting the other ring on said one ring for rotation relative thereto with the other ring surrounding said one ring; means coupled with the other ring for rotating the same relative to said one ring; and a number of circumferentially spaced wafer pick-up devices secured to the other ring for movement therewith, each device adapted to receive a semiconductor wafer and to releasably couple the wafer to the other ring whereby, when the other ring moves relative to said one ring, the wafer can be transported from a first location along the outer periphery of the other ring to said work station and released and thereafter the wafer can be picked up from said work station and transported to a second location along said outer periphery and released again.
Claim 3
Dependent Claim
25 words
Apparatus as set forth in claim 1, wherein is included means coupled with said one ring for mounting the rings in a generally horizontal plane.
Claim 4
Dependent Claim
23 words
Apparatus as set forth in claim 1, wherein said rotating means comprises a motor having means coupling the same to the other ring.
Claim 5
Dependent Claim
44 words
Apparatus as set forth in claim 3, wherein said other ring has a ring gear on its inner periphery, said motor having a drive shaft, said coupling means including a spur gear connecting the drive shaft of the stepper motor with said ring gear.
Claim 6
Dependent Claim
15 words
Apparatus as set forth in claim 1, wherein each of said pick-up devices is vacuum-actuated.
Claim 7
Dependent Claim
30 words
Apparatus as set forth in claim 5, wherein each pick-up device has a flexible suction cup, said rings having means for coupling the suction cup to a source of vacuum.
Claim 8
Dependent Claim
23 words
Apparatus as set forth in claim 6, wherein each pick-up device has a surface surrounding the corresponding suction cup, said surface being beveled.
Claim 9
Dependent Claim
23 words
Apparatus as set forth in claim 7, wherein said surface slopes downwardly and is the inner periphery of the other ring is approached.
Claim 10
Dependent Claim
59 words
Apparatus as set forth in claim 6, wherein said other ring has a fluid passage therein communicating with said suction cup, said one ring having a recess therein adapted to be coupled with the source of vacuum, said fluid passage being moveable into fluid communication with said recess when the corresponding pick-up device is adjacent to said work station.
Claim 11
Dependent Claim
58 words
Apparatus as set forth in claim 9, wherein each pick-up device has a shaft, the corresponding fluid passage of said device being in the shaft, said shaft being mounted for movement relative to said other ring, there being a vent in said other ring, and means for shifting the shaft to align the fluid passage with the vent.
Claim 12
Dependent Claim
37 words
Apparatus as set forth in claim 10, wherein said shifting means comprises a power device moveable into couple relationship with the shaft as the other ring moves a wafer to a location adjacent to said work station.
Claim 13
Dependent Claim
58 words
Apparatus as set forth in claim 1, wherein each device comprises a body pivotally mounted on said other ring and having an upper surface for supporting a semiconductor wafer, means biasing the body into an inclined position, and means coupled with the body for moving the body into generally horizontal position to permit removal of the wafer therefrom.
Claim 14
Dependent Claim
47 words
Apparatus as set forth in claim 12, wherein said body includes a central, rigid segment and a pair of said segments, said segments having flat upper surfaces, said moving means including a power actuated device engageable with the body for forcing the same in the opposite direction.
Claim 15
Dependent Claim
45 words
Apparatus as set forth in claim 1, wherein each device comprises a pair of jaws mounted on said other member and moveable relative to each other to clamp a semiconductor wafer therebetween, and means coupled with jaws for moving the same relative to each other.
Claim 16
Dependent Claim
43 words
Apparatus as set forth in claim 14, wherein each jaw has a rigid member thereon, said members being pivotally mounted on said other ring for rotation relative thereto about perspective, generally parallel axes, said power device being coupled to one of said members.
Claim 17
Dependent Claim
62 words
Apparatus as set forth in claim 15, wherein each of said members has a gear rigidly secured thereto, the gears of the members being in mesh with each other, said other ring having an upright post thereon, the gears being rotatably mounted on said post, whereby when the power device is actuated, the jaws are moveable toward and away from each other.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-04-14 | 1989-10-14 | 1990-04-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-04-14 | 1993-10-14 | 1994-04-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-04-14 | 1997-10-14 | 1998-04-15 | $7700.00 | Window Closed / Lapsed |