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US4581099A
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Method for preparation of a photosensor
Assignee: Canon Inc
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Filing: 1985-01-30
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Granted: 1986-04-08
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Expires: 2005-01-30
Abstract
Abstract A method for preparing a photosensor having electrodes formed on a photoconductive layer through an intermediary ohmic contact layer is provided which comprises forming an ohmic contact layer on a photoconductive layer, forming electrodes with a desired shape on the ohmic contact layer, then removing the ohmic contact layer at the exposed portion for photoelectric transducing by the etching method and thereafter applying heat treatment, thereby forming a photosensor array.
Inventors
- 👤 Masaki Fukaya
- 👤 Teruhiko Furushima
- 👤 Yuichi Masaki
- 👤 Seiji Kakimoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 14:01
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/20; H10F30/00; H10F30/10; H10F30/15; H10F39/00; H10F39/10; H10F39/12; H10F39/191; H10F71/00; H10F71/10; H10F71/103; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
68 words
A method for preparing a photosensor having electrodes formed on a photoconductive layer through an intermediary ohmic contact layer, which comprises forming an ohmic contact layer on a photoconductive layer, forming electrodes with a desired shape on the ohmic contact layer, then removing the ohmic contact layer at the exposed portion for photoelectric transducing by the etching method and thereafter applying heat treatment, thereby forming a photosensor array.
Claim 2
Independent Claim
68 words
A method for preparing a photosensor having electrodes formed on a photoconductive layer through an intermediary ohmic contact layer, which comprises forming an ohmic contact layer on a photoconductive layer, forming electrodes with a desired shape on the ohmic contact layer, then removing the ohmic contact layer at the exposed portion for photoelectric transducing by the etching method and thereafter applying heat treatment, thereby forming a photosensor array.
Claim 3
Dependent Claim
22 words
A method according to claim 1, wherein the photoconductive layer and the ohmic contact layer comprise an amorphous silicon as the matrix.
Claim 4
Dependent Claim
13 words
A method according to claim 1, wherein the etching method is plasma etching.
Claim 5
Dependent Claim
22 words
A method according to claim 3, wherein etching is performed with the use of a gas composed mainly of a carbon halide.
Claim 6
Dependent Claim
20 words
A method according to claim 1, wherein the heat treatment is conducted at a temperature of 350° C. or lower.
Claim 7
Dependent Claim
75 words
A method according to claim 5, wherein the heat treatment is conducted under the conditions selected from the following (A) to (D): (A) 30 minutes or longer in an atmosphere of 150° to 200° C; (B) 20 minutes or longer in an atmosphere of 200° to 250° C.; (C) 10 to 60 minutes in an atmosphere of 250° to 300° C.; and (D) 5 to 30 minutes in an atmosphere of 300° to 350° C.
Claim 8
Dependent Claim
43 words
A method according to claim 4, wherein the gas composed mainly of carbon halide is selected from CHF 3 , CC1 2 F 2 , CF 3 Br, CF 4 +C1 2 , CF 4 +O 2 and CF 4 +H 2 .
Claim 9
Dependent Claim
16 words
A method according to claim 1, wherein the heat treatment is conducted in N 2 atmosphere.
Claim 10
Dependent Claim
16 words
A method according to claim 1, wherein the heat treatment is conducted in H 2 atmosphere.
Claim 11
Dependent Claim
15 words
A method according to claim 1, wherein the heat treatment is conducted in Ar atmosphere.
Claim 12
Dependent Claim
15 words
A method according to claim 1, wherein the heat treatment is conducted in dry air.
Claim 13
Dependent Claim
14 words
A method according to claim 1, wherein the heat treatment is conducted under vacuum.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-04-07 | 1989-10-07 | 1990-04-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-04-07 | 1993-10-07 | 1994-04-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-04-07 | 1997-10-07 | 1998-04-08 | $7700.00 | Window Closed / Lapsed |