Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
174 words
A method of purifying an inert gas stream containing up to about 10 parts per million of an impurity selected from the group of CO, O 2 , H 2 , H 2 O and CO 2 and mixtures thereof, comprising the steps of: passing said inert gas stream through a first bed of a catalytic material at a temperature of up to about 38° C., said catalytic material capable of effecting the reaction of CO and O 2 to form CO 2 and H 2 and O 2 to form H 2 O; passing said inert gas stream from said first bed of catalytic material through a second bed of a getter material at a temperature of up to about 30° C., said getter material capable of reacting with unreacted O 2 and adsorbing CO 2 therein; retaining said H 2 O in said beds of material; and discharging from said second bed of getter material a thus purified inert gas stream containing less than about 1 part per million of said impurity.
Claim 2
Independent Claim
174 words
A method of purifying an inert gas stream containing up to about 10 parts per million of an impurity selected from the group of CO, O 2 , H 2 , H 2 O and CO 2 and mixtures thereof, comprising the steps of: passing said inert gas stream through a first bed of a catalytic material at a temperature of up to about 38° C., said catalytic material capable of effecting the reaction of CO and O 2 to form CO 2 and H 2 and O 2 to form H 2 O; passing said inert gas stream from said first bed of catalytic material through a second bed of a getter material at a temperature of up to about 30° C., said getter material capable of reacting with unreacted O 2 and adsorbing CO 2 therein; retaining said H 2 O in said beds of material; and discharging from said second bed of getter material a thus purified inert gas stream containing less than about 1 part per million of said impurity.
Claim 3
Dependent Claim
79 words
The method defined in claim 1 wherein said first bed of catalytic material and said second bed of getter material are each retained in first and second vessels respectively, each vessel having a gas inlet and outlet and additionally comprising the step of placing the outlet of said first vessel and said inlet of said second vessel in fluid communication with one another such that said thus purified inert gas stream flows sequentially through said first and second vessels.
Claim 4
Dependent Claim
57 words
The method defined in claim 1 additionally comprising the steps of terminating the flow of said inert gas stream to be purified through said beds; heating said beds to a temperature of up to about 200° C.; and passing an inert purge gas flow through said beds to remove impurities adsorbed therein and thereby regenerate said beds.
Claim 5
Dependent Claim
75 words
The method defined in claim 3 wherein the steps of passing an inert purge gas flow comprises passing a first portion of said inert purge gas flow through said first bed in the direction of flow of said inert gas stream to be purified therethrough and a second portion of said inert purge gas flow through said second bed in a direction opposite to the direction of the flow of said inert gas stream therethrough.
Claim 6
Dependent Claim
42 words
The method defined in claim 4 additionally comprising the step of precluding said first portion of said inert purge gas flow from entering said second bed and precluding said second portion of said inert purge gas flow from entering said first bed.
Claim 7
Dependent Claim
66 words
The method defined in claim 5 wherein said first and second beds of material are spaced apart from one another in a single vessel and additionally comprising the steps of discharging said first and second portions of said inert purge gas flows from the first and second beds, respectively, into said space between said beds; and withdrawing said discharged inert purge gas flows from said space.
Claim 8
Dependent Claim
22 words
The method defined in claim 6 additionally comprising the step of venting said withdrawn inert purge gas flow to the ambient atmosphere.
Claim 9
Dependent Claim
33 words
The method defined in claim 4 additionally comprising the step of passing a flow of hydrogen gas to second bed to reduce oxides formed therein upon passage of said inert gas stream therethrough.
Claim 10
Dependent Claim
38 words
The method defined in claim 8 additionally comprising the steps of terminating said hydrogen flow and continuing said flow of inert purge gas through said second bed to remove any H 2 O upon reduction of said oxides.
Claim 11
Dependent Claim
21 words
The method defined in claim 1 wherein the inert gas stream to be purified contains essentially nitrogen as said inert gas.
Claim 12
Dependent Claim
21 words
The method defined in claim 1 wherein the inert gas stream to be purified contains essentially argon as said inert gas.
Claim 13
Dependent Claim
15 words
The method defined in claim 1 wherein said second bed of getter material includes copper.
Claim 14
Dependent Claim
15 words
The method defined in claim 1 wherein said second bed of getter material includes nickel.
Claim 15
Dependent Claim
49 words
The method defined in claim 1 additionally comprising the steps of providing a further pair of first and second beds of material; heating said further pair of beds and supplying an inert purge gas flow therethrough to remove impurities adsorbed therein and thereby regenerate said further pairs of beds.
Claim 16
Dependent Claim
29 words
The method defined in claim 14 wherein the flow rate of said inert purge gas is less than about one-half of the flow rate of said inert gas stream.
Claim 17
Dependent Claim
56 words
The method defined in claim 1 wherein said first bed of catalytic material contains an H 2 O adsorbing substance and additionally comprising the step of adsorbing H 2 O introduced into said first bed of catalytic material with said inert gas stream or formed therein upon said reaction between H 2 and O 2 .
Claim 18
Dependent Claim
15 words
The method defined in claim 16 wherein said H 2 O adsorbing substance is alumina.
Claim 19
Dependent Claim
23 words
The method defined in claim 1 additionally comprising the step of introducing a CO 2 adsorbing material into said first bed of material.
Claim 20
Dependent Claim
23 words
The method defined in claim 1 additionally comprising the step of introducing a CO 2 adsorbing material into said second bed of material.