US4577650A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vessel and system for treating wafers with fluids
Assignee: CFMT Inc
•
Filing: 1984-05-21
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Granted: 1986-03-25
•
Expires: 2004-05-21
Abstract
Abstract Disclosed is apparatus for treating semiconductor wafers with fluids. The device comprises a plurality of vessel segments having lateral walls for enclosing the wafers defining open ends. Sealing structure is provided at the ends so that the segments may be serially nested together and engaged with a fluid inlet and a fluid outlet in a wafer treatment fluid flow line. The vessel segments are constructed of material that is inert to the treatment fluids and designed to minimize creation of eddy currents and fluid traps. Fluid flowing through the vessel uniformly contacts the wafers and results in improved and more reproducible pre-diffusion cleaning, rinsing, etc.
Inventors
- 👤 Christopher F. McConnell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 22:45
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/54; B; B05; B05C; B05C3/00; B05C3/02; B05C3/09; B05C3/109; B08; B08B; B08B7/00; B08B7/0064; B08B7/0092; C30; C30B; C30B33/00; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/30; H10P72/33; H10P72/3311; H10P72/34; H10P72/3411; H10P72/3412; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 48
Claim 1
Independent Claim
96 words
A vessel for treating semiconductor wafers by passing a fluid about said wafers after said vessel has been loaded and incorporated within a fluid flow line, said vessel comprising: lateral walls adapted to enclose therebetween a plurality of wafers and defining open ends; means integral with said walls for supporting the wafers within said walls; first sealing means which, in operation, is integral with one of said open ends for sealingly engaging means communicating with a fluid inlet; and second sealing means about the other open end for sealingly engaging means communicating with a fluid outlet.
Claim 2
Dependent Claim
96 words
A vessel for treating semiconductor wafers by passing a fluid about said wafers after said vessel has been loaded and incorporated within a fluid flow line, said vessel comprising: lateral walls adapted to enclose therebetween a plurality of wafers and defining open ends; means integral with said walls for supporting the wafers within said walls; first sealing means which, in operation, is integral with one of said open ends for sealingly engaging means communicating with a fluid inlet; and second sealing means about the other open end for sealingly engaging means communicating with a fluid outlet.
Claim 3
Dependent Claim
27 words
The vessel of claim 1 wherein said means for supporting comprises a series of grooves adjacent said lateral walls for holding an array of wafers in parallel.
Claim 4
Dependent Claim
20 words
The vessel of claim 2 wherein said means for supporting further comprises a bar traversing one of said open ends.
Claim 5
Dependent Claim
13 words
The vessel of claim 1 wherein said sealing means comprises an elastomeric material.
Claim 6
Dependent Claim
19 words
The vessel of claim 1 wherein said first sealing means comprises a flange for interfitting with a fluid inlet.
Claim 7
Dependent Claim
19 words
The vessel of claim 1 wherein said second sealing means comprises a flange for interfitting with a fluid outlet.
Claim 8
Dependent Claim
27 words
A vessel for treating semiconductor wafers with fluid flow, said vessel comprising: A. a plurality of separable vessel segments in serial, sealing engagement, each of which comprises:
Claim 9
Dependent Claim
27 words
A vessel for treating semiconductor wafers with fluid flow, said vessel comprising: A. a plurality of separable vessel segments in serial, sealing engagement, each of which comprises:
Claim 10
Dependent Claim
97 words
lateral walls disposed about an axis parallel to the direction of fluid flow, adapted to enclose therebetween a plurality of wafers, and defining open ends; and 2. means for supporting wafers within said walls; B. first sealing means about an open end of one of said segments for sealingly engaging a fluid inlet; C. second sealing means about an open end of another of said segments for sealingly engaging a fluid outlet; D. a fluid inlet for sealing engagement with said first sealing means; and E. a fluid outlet for sealing engagement with said second sealing means.
Claim 11
Dependent Claim
97 words
lateral walls disposed about an axis parallel to the direction of fluid flow, adapted to enclose therebetween a plurality of wafers, and defining open ends; and 2. means for supporting wafers within said walls; B. first sealing means about an open end of one of said segments for sealingly engaging a fluid inlet; C. second sealing means about an open end of another of said segments for sealingly engaging a fluid outlet; D. a fluid inlet for sealing engagement with said first sealing means; and E. a fluid outlet for sealing engagement with said second sealing means.
Claim 12
Dependent Claim
27 words
The vessel of claim 7 wherein said fluid inlet comprises a diffuser and said fluid outlet comprises an extractor for minimizing eddy current flow within said vessel.
Claim 13
Dependent Claim
27 words
The vessel of claim 7 wherein said means for supporting comprises a series of grooves adjacent said lateral walls for holding an array of wafers in parallel.
Claim 14
Dependent Claim
19 words
The vessel of claim 7 wherein said means for supporting comprises a bar traversing one of said open ends.
Claim 15
Dependent Claim
16 words
The vessel of claim 7 wherein said first and second sealing means comprise an elastomeric material.
Claim 16
Dependent Claim
18 words
The vessel of claim 11 wherein said elastomeric material comprises a fluorinated polymer substantially inert to said fluid.
Claim 17
Dependent Claim
21 words
The vessel of claim 7 comprising an elastomeric seal between adjacent vessel segments distended inwardly toward said means for supporting wafers.
Claim 18
Dependent Claim
46 words
The vessel of claim 7 wherein each of said segments comprises said first sealing means at one open end and said second sealing means at another open end, and said first and second sealing means are adapted for interfitting, sealing engagement with a mating vessel segment.
Claim 19
Dependent Claim
27 words
The vessel of claim 7 further comprising means for axially compressing said vessel segments, fluid inlet, and fluid outlet to urge said sealing means in fluid-tight engagement.
Claim 20
Dependent Claim
23 words
The vessel of claim 15 wherein said means for compressing includes means for permitting expansion of said vessel as hot fluid passes therethrough.
Claim 21
Dependent Claim
14 words
The vessel of claim 15 wherein said means for compressing comprises a pneumatic press.
Claim 22
Independent Claim
59 words
A system for treating semiconductor wafers with liquid flow, said system comprising: A. a liquid flow line; B. at least one vessel segment comprising: 1. lateral walls disposed about an axis parallel to the direction of liquid flow, adapted to enclose therebetween a plurality of wafers, and defining open ends; 2. means for supporting the wafers within said walls;
Claim 23
Independent Claim
59 words
A system for treating semiconductor wafers with liquid flow, said system comprising: A. a liquid flow line; B. at least one vessel segment comprising: 1. lateral walls disposed about an axis parallel to the direction of liquid flow, adapted to enclose therebetween a plurality of wafers, and defining open ends; 2. means for supporting the wafers within said walls;
Claim 24
Dependent Claim
86 words
first sealing means which, in operation, is integral with one of said opens ends for sealingly engaging means communicating with a portion of said liquid flow line; and 4. a second sealing means about the other open end for sealingly engaging means communicating with another portion of said liquid flow line; C. means for temporarily interrupting the flow of liquid in said line to permit insertion of said vessel segment therewithin; and D. means for feeding serially a plurality of liquids to said liquid flow line.
Claim 25
Dependent Claim
86 words
first sealing means which, in operation, is integral with one of said opens ends for sealingly engaging means communicating with a portion of said liquid flow line; and 4. a second sealing means about the other open end for sealingly engaging means communicating with another portion of said liquid flow line; C. means for temporarily interrupting the flow of liquid in said line to permit insertion of said vessel segment therewithin; and D. means for feeding serially a plurality of liquids to said liquid flow line.
Claim 26
Dependent Claim
17 words
The system of claim 18 comprising a plurality of said vessel segments adapted for serial, sealing engagement.
Claim 27
Dependent Claim
37 words
The system of claim 19 wherein said means communicating with an upstream portion of said liquid flow line comprises a diffuser and said means communicating with a downstream portion of said liquid flow line comprises an extractor.
Claim 28
Dependent Claim
30 words
The system of claim 19 wherein said means communicating with an upstream portion of said liquid flow line comprises a means for interfitting, sealing engagement with said first sealing means.
Claim 29
Dependent Claim
30 words
The system of claim 19 wherein said means communicating with a downstream portion of said liquid flow line comprises a means for interfitting, sealing engagement with said second sealing means.
Claim 30
Dependent Claim
37 words
The system of claim 18 wherein said means communicating with an upstream portion of said liquid flow line comprises a diffuser and said means communicating with a downstream portion of said liquid flow line comprises an extractor.
Claim 31
Dependent Claim
30 words
The system of claim 18 wherein said means communicating with an upstream portion of said liquid flow line comprises a means for interfitting, sealing engagement with said first sealing means.
Claim 32
Dependent Claim
30 words
The system of claim 18 wherein said means communicating with a downstream portion of said liquid flow line comprises a means for interfitting, sealing engagement with said second sealing means.
Claim 33
Dependent Claim
15 words
The system of claim 18 wherein said first and second sealing means comprise elastomeric material.
Claim 34
Dependent Claim
18 words
The system of claim 26 wherein said elastomeric material is distended inwardly toward said means for supporting wafers.
Claim 35
Dependent Claim
18 words
The system of claim 26 wherein said elastomeric material comprises a fluorinated polymer substantially inert to said liquid.
Claim 36
Dependent Claim
20 words
The system of claim 18 further comprising means for reversing the direction of liquid flow in said liquid flow line.
Claim 37
Independent Claim
90 words
A system for treating semiconductor wafers with fluid flow, said system comprising: A. a fluid flow line; B. at least one vessel segment comprising: 1. lateral walls disposed about an axis parallel to the direction of fluid flow, adapted to enclosed therebetween a plurality of wafers, and defining open ends; 2. means for supporting the wafers within said walls; 3. first sealing means about one open end for sealingly engaging means communicating with an upstream portion of said fluid flow line, said communicating means comprising a second said vessel segment;
Claim 38
Independent Claim
90 words
A system for treating semiconductor wafers with fluid flow, said system comprising: A. a fluid flow line; B. at least one vessel segment comprising: 1. lateral walls disposed about an axis parallel to the direction of fluid flow, adapted to enclosed therebetween a plurality of wafers, and defining open ends; 2. means for supporting the wafers within said walls; 3. first sealing means about one open end for sealingly engaging means communicating with an upstream portion of said fluid flow line, said communicating means comprising a second said vessel segment;
Claim 39
Dependent Claim
43 words
second sealing means about the other open end for sealingly engaging means communicating with a downstream portion of said fluid flow line; and C. means for temporarily interrupting the flow of fluid in said line to permit insertion of said vessel segment therewithin.
Claim 40
Dependent Claim
43 words
second sealing means about the other open end for sealingly engaging means communicating with a downstream portion of said fluid flow line; and C. means for temporarily interrupting the flow of fluid in said line to permit insertion of said vessel segment therewithin.
Claim 41
Independent Claim
134 words
A system for treating semiconductor wafers with fluid flow, said system comprising: A. a fluid flow line; B. at least one vessel segment comprising: 1. lateral walls disposed about an axis parallel to the direction of fluid flow, adapted to enclosed therebetween a plurality of wafers, and defining open ends; 2. means for supporting the wafers within said walls; 3. first sealing means about one open end for sealingly engaging means communicating with a downstream portion of said fluid flow line; 4. second sealing means about the other open end for sealingly engaging means communicating with a downstream portion of said fluid flow line, said communicating means comprising a second said vessel segment; and C. means for temporarily interrupting the flow of fluid in said line to permit insertion of said vessel segment therewithin.
Claim 42
Independent Claim
134 words
A system for treating semiconductor wafers with fluid flow, said system comprising: A. a fluid flow line; B. at least one vessel segment comprising: 1. lateral walls disposed about an axis parallel to the direction of fluid flow, adapted to enclosed therebetween a plurality of wafers, and defining open ends; 2. means for supporting the wafers within said walls; 3. first sealing means about one open end for sealingly engaging means communicating with a downstream portion of said fluid flow line; 4. second sealing means about the other open end for sealingly engaging means communicating with a downstream portion of said fluid flow line, said communicating means comprising a second said vessel segment; and C. means for temporarily interrupting the flow of fluid in said line to permit insertion of said vessel segment therewithin.
Claim 43
Independent Claim
24 words
A system for treating semiconductor wafers with fluid flow, said system comprising: A. a fluid flow line; B. at least one vessel segment comprising;
Claim 44
Independent Claim
24 words
A system for treating semiconductor wafers with fluid flow, said system comprising: A. a fluid flow line; B. at least one vessel segment comprising;
Claim 45
Dependent Claim
134 words
lateral walls disposed about an axis parallel to the direction of fluid flow, adapted to enclose therebetween a plurality of wafers, and defining open ends; 2. means for supporting the wafers within said walls; 3. first sealing means about one open end for sealingly engaging means communicating with an upstream portion of said fluid flow line; and 4. second sealing means about the other open end for sealingly engaging means communicating with a downstream portion of said fluid flow line; C. means for temporarily interrupting the flow of fluid in said line to permit insertion of said vessel segment therewithin; and D. means for axially compressing said vessel segment, said means communicating with a downstream portion, and said means communicating with an upstream portion, for sealingly engaging said segment to said fluid flow line.
Claim 46
Dependent Claim
134 words
lateral walls disposed about an axis parallel to the direction of fluid flow, adapted to enclose therebetween a plurality of wafers, and defining open ends; 2. means for supporting the wafers within said walls; 3. first sealing means about one open end for sealingly engaging means communicating with an upstream portion of said fluid flow line; and 4. second sealing means about the other open end for sealingly engaging means communicating with a downstream portion of said fluid flow line; C. means for temporarily interrupting the flow of fluid in said line to permit insertion of said vessel segment therewithin; and D. means for axially compressing said vessel segment, said means communicating with a downstream portion, and said means communicating with an upstream portion, for sealingly engaging said segment to said fluid flow line.
Claim 47
Dependent Claim
23 words
The system of claim 32 wherein said means for compressing includes means for permitting expansion of said vessel as hot liquid passes therethrough.
Claim 48
Dependent Claim
14 words
The system of claim 33 wherein said means for compressing comprises a pneumatic press.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-03-24 | 1989-09-23 | 1990-03-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-03-24 | 1993-09-23 | 1994-03-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-03-24 | 1997-09-23 | 1998-03-25 | $7700.00 | Window Closed / Lapsed |