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Patent US4575631A successfully refreshed from Google Patents.
US4575631A
Expired / Lapsed
US
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Infra-red detector
Assignee: International Standard Electric Corp
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Filing: 1984-08-13
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Granted: 1986-03-11
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Expires: 2004-08-13
Abstract
Abstract An infra-red detector or sensor comprises a wafer (11) of single crystal silicon in one surface of which pyramidal pits (12) forming a two-dimensional array are etched. The pits form horn aerial elements whereby radiant energy is directed to bolometers (14) one disposed at the throat of each horn.
Inventors
- 👤 David W. Satchell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 15:05
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/133382; G01; G01J; G01J5/00; G01J5/10; G01J5/20; G02F1/1313; H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/18; H10F39/184; H10N; H10N15/00; H10N15/10; H10N15/15; H10N19/00
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
49 words
An infra-red sensor comprising a body of single crystal silicon having a plurality of horn aerial elements formed therein, and a plurality of bolometer elements each of said bolometer elements being mounted adjacent to one of said horn aerial elements for detecting radiation received by said horn aerial elements.
Claim 2
Dependent Claim
49 words
An infra-red sensor comprising a body of single crystal silicon having a plurality of horn aerial elements formed therein, and a plurality of bolometer elements each of said bolometer elements being mounted adjacent to one of said horn aerial elements for detecting radiation received by said horn aerial elements.
Claim 3
Dependent Claim
19 words
A sensor as claimed in claim 1, wherein each bolometer element comprises a film of gold, bismuth or nickel.
Claim 4
Dependent Claim
28 words
A sensor as claimed in claim 1, wherein the bolometer elements are disposed on a silicon nitride or silicon oxide or silica layer formed on the silicon body.
Claim 5
Dependent Claim
18 words
A sensor as claimed in claim 1, wherein said horn aerial elements are coated with a conductive material.
Claim 6
Dependent Claim
16 words
A sensor as claimed in claim 1, wherein said horn aerial elements form a two-dimensional array.
Claim 7
Dependent Claim
54 words
A night vision device incorporating an infra-red sensor comprising a body of single crystal silicon having a plurality of horn aerial elements formed therein, and a plurality of bolometer elements each of said bolometer elements being mounted adjacent to one of said horn aerial elements for detecting radiation received by said horn aerial elements
Claim 8
Dependent Claim
54 words
A night vision device incorporating an infra-red sensor comprising a body of single crystal silicon having a plurality of horn aerial elements formed therein, and a plurality of bolometer elements each of said bolometer elements being mounted adjacent to one of said horn aerial elements for detecting radiation received by said horn aerial elements
Claim 9
Independent Claim
95 words
A method of making an infra-red sensor, comprising the steps of masking and selectively etching a surface of a silicon wafer to form a series of pyramidal etch pits, each of said pits providing a horn aerial element having a throat which is disposed at the bottom of the pit, coating the other surface of the wafer with an insulating material layer, mounting a plurality of bolometer elements on said layer, one of said elements adjacent to and in register with the throat of each horn element, and providing electrical contact to the bolometer elements.
Claim 10
Independent Claim
95 words
A method of making an infra-red sensor, comprising the steps of masking and selectively etching a surface of a silicon wafer to form a series of pyramidal etch pits, each of said pits providing a horn aerial element having a throat which is disposed at the bottom of the pit, coating the other surface of the wafer with an insulating material layer, mounting a plurality of bolometer elements on said layer, one of said elements adjacent to and in register with the throat of each horn element, and providing electrical contact to the bolometer elements.
Claim 11
Dependent Claim
25 words
A method as claimed in claim 7, wherein said insulating material is selected from the group consisting of silica and silicon nitride and silicon oxide.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-03-10 | 1989-09-09 | 1990-03-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-03-10 | 1993-09-09 | 1994-03-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-03-10 | 1997-09-09 | 1998-03-11 | $7700.00 | Window Closed / Lapsed |