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Purging: a reliability assurance technique for semiconductor lasers utilizing a purging process

Assignee: Nokia Bell Labs
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Filing: 1984-03-22
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Granted: 1986-03-04
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Expires: 2004-03-22
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Abstract

Abstract Prior to packaging, semiconductor lasers are purged by being subjected first to high temperature and high current simultaneously so as to suppress stimulated emission and stress the shunt paths which allow leakage current to flow around the active region. A prudent, but nonessential, second step is to lower the temperature and/or current so that the lasers emit stimulated emission (preferably strongly, near the peak output power), thereby stressing the active region. Lasers subjected to such a purge exhibit stabilized degradation rates in short times (of the order of a few hours) and provide a robust population which meets the performance criteria of long lifetime systems.

Inventors

  • 👤 Eugene I. Gordon
  • 👤 Robert L. Hartman
  • 👤 Franklin R. Nash

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 21:47
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/20; H01S5/22; H01S5/223; H01S5/0014; H01S5/0021; H01S5/2237; H01S5/227; H01S5/2275; H01S5/24; Y; Y10; Y10S; Y10S148/00; Y10S148/072; Y10S148/095; Y10S148/162

Claims Analysis

Total Claims: 18
Claim 1
Independent Claim 106 words
A method of manufacturing semiconductor lasers, which includes screening lasers relative to predetermined performance criteria, comprising the steps of: (a) subjecting each of said lasers to a first temperature T 1 , (b) applying terminal current I 1 to each of said lasers such that the combination of said current I 1 and temperature T 1 is sufficiently high that said lasers emit virtually no stimulated emission, (c) continuing steps (a) and (b) concurrently for a time period t 1 , (d) measuring an electrical and/or optical characteristic of said lasers so as to separate those which meet predetermined performance criteria from those which do not.
Claim 2
Independent Claim 106 words
A method of manufacturing semiconductor lasers, which includes screening lasers relative to predetermined performance criteria, comprising the steps of: (a) subjecting each of said lasers to a first temperature T 1 , (b) applying terminal current I 1 to each of said lasers such that the combination of said current I 1 and temperature T 1 is sufficiently high that said lasers emit virtually no stimulated emission, (c) continuing steps (a) and (b) concurrently for a time period t 1 , (d) measuring an electrical and/or optical characteristic of said lasers so as to separate those which meet predetermined performance criteria from those which do not.
Claim 3
Dependent Claim 50 words
The method of claim 1 including, after step (c), the additional step (c1) of changing the level of said temperature and/or current such that each of said lasers emits stimulated emission for a time period t 2 at an optical power level near the peak power for said changed temperature.
Claim 4
Dependent Claim 52 words
The method of claim 1 wherein each of said lasers has an elongated, stripe-shaped active region and shunt paths which allow leakage current to flow around said active region, and steps (a), (b) and (c) are effective to cause said terminal current to flow primarily in said shunt paths of each laser.
Claim 5
Dependent Claim 71 words
The method of claim 2 wherein each of said lasers has an elongated, stripe-shaped active region and shunt paths which allow leakage current to flow around said active region, steps (a), (b) and (c) are effective to cause said terminal current to flow primarily in said shunt paths of each laser, and step (c1) is effective to cause said terminal current to flow primarily through said active region of each laser.
Claim 6
Independent Claim 51 words
The method of claims 3 or 4 wherein step (a) subjects each of said lasers to a temperature T 1 ≧100° C., step (b) applies current I 1 ≧250 mA dc, and step (c) applies said current and temperature for a relatively short time duration on the order of 10 h.
Claim 7
Dependent Claim 32 words
The method of claim 4 wherein step (c1) lowers said temperature to less than 100° C. for said time peiod t 2 which is longer than said time period t 1 .
Claim 8
Dependent Claim 14 words
The method of claim 6 wherein step (c1) lowers said current to ≦250 mA.
Claim 9
Dependent Claim 49 words
The method of claim 7 wherein step (a) subjects each of said lasers to a temperature T 1 ≧100° C., step (b) applies current I 1 ≧250 mA dc, and step (c) applies said current and temperature for a relatively short time duration on the order of 10 h.
Claim 10
Dependent Claim 49 words
The method of claim 1 wherein, between steps (c) and (d), said lasers are subjected to a verification test comprising: step (c2)-heating said lasers to a temperature less than 100° C. while maintaining the output power of said lasers constant, and step (c3)-measuring the degradation rates of said lasers.
Claim 11
Dependent Claim 31 words
The method of claim 9 including, after step (c3), the additional step (c4) of repeating steps (a), (b) and (c) for those lasers whose degradation rates do not satisfy performance criteria.
Claim 12
Independent Claim 27 words
The method of claims 2, 9 or 10 further including, after steps (c), (c1), (c2), (c3) or (c4), the additional step (c5)-hermetically packaging each of said lasers.
Claim 13
Dependent Claim 95 words
The method of claim 11 further including, after packaging step (c5), step (c6)-accelerated aging said lasers at an elevated temperature less than about 100° C., but above the intended operating temperature, and at a constant optical power for a time period of the order of 1000 h, and step (c7)-operating said lasers at or near said operating temperature at a constant optical power for a time period of the order of a few thousand hours, and, after each of steps (c6) and (c7), separating those lasers which meet performance criteria from those which do not.
Claim 14
Dependent Claim 96 words
The method of claim 11 wherein, after packaging step (c5), said lasers are subjected to one or more of the following steps: (c8) thermally cycling said lasers between a relatively low temperature and a relatively high temperature, (c9) mechanical shocking said lasers, (c10) subjecting said lasers to an environment having an elevated temperature and a high relative humidity, and (c11) measuring the current-voltage and light-current characteristics, and derivatives thereof, of said lasers at a plurality of temperatures less than about 100° C. to determine whether the electrical and optical properties of said lasers meet performance criteria.
Claim 15
Dependent Claim 26 words
The method of claim 13 wherein during step (c8) said lasers are thermally cycled between the operating temperature and approximately 60° C. a plurality of times.
Claim 16
Dependent Claim 29 words
The method of claim 13 wherein during step (c10) said lasers are subjected to an environment heated to about 65° C. and having a relative humidity of about 85%.
Claim 17
Dependent Claim 23 words
The method of claim 13 wherein during step (c11) said characteristics and said derivatives are measured at temperatures less than about 60° C.
Claim 18
Dependent Claim 67 words
The method of claim 1 wherein, before step (a), said lasers are subjected to one or more of the following steps: (a1) measuring the current-voltage and light-current characteristics, and derivatives thereof, of said lasers at a plurality of elevated temperatures less than about 100° C. to determine whether the electrical and optical properties of said lasers satisfy performance criteria, and (a2) visually inspecting said lasers for defects.

References Cited (Backward Citations)

US4287473A Cited
US4507606A Cited
US4442402A Cited
US4489477A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-03-03 1989-09-02 1990-03-04 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-03-03 1993-09-02 1994-03-04 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-03-03 1997-09-02 1998-03-04 $7700.00 Window Closed / Lapsed

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