US4568409A
Expired / Lapsed
US
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Precision marking of layers
Assignee: Chronar Corp
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Filing: 1983-11-17
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Granted: 1986-02-04
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Expires: 2003-11-17
Abstract
Abstract Selective incision of metallic layers overlying semiconductors by laser ablation (evaporation) of selected regions of a dye sensitized coating on each such metallic layer, followed by etching of the metallic layer to avoid objectionable alloying by laser scribing of the metallic layer to provide the desired incisions.
Inventors
- 👤 Sandor Caplan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 19:36
CPC Classifications
H; H10; H10P; H10P34/00; H10P34/40; H10P34/42; C; C23; C23F; C23F1/00; C23F1/02; G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; H10F; H10F19/00; H10F19/30; H10F19/31; H10F19/33; H10F71/00; H10F71/10; H10F71/103; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02P; Y02P70/00; Y02P70/50; Y10; Y10S; Y10S438/00; Y10S438/94
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
89 words
The method of precision separation of layers which comprises the steps of (a) coating the layer to be separated with a functional material that is absorptive at a selected spectral frequency and resistant to a chosen etch method, said layer being supported on a substrate with one or more layers of silicon interposed between said substrate and said layer; (b) applying spectral energy to the coated layer to selectively remove only the material; and (c) separating the underlying layer in the regions thereof where said coating material is removed.
Claim 2
Independent Claim
89 words
The method of precision separation of layers which comprises the steps of (a) coating the layer to be separated with a functional material that is absorptive at a selected spectral frequency and resistant to a chosen etch method, said layer being supported on a substrate with one or more layers of silicon interposed between said substrate and said layer; (b) applying spectral energy to the coated layer to selectively remove only the material; and (c) separating the underlying layer in the regions thereof where said coating material is removed.
Claim 3
Dependent Claim
10 words
The method of claim 1 wherein said silicon is amorphous.
Claim 4
Independent Claim
85 words
The method of precision separation of layers which comprises the steps of (a) coating the layer to be separated with a functional material that is absorptive at a selected spectral frequency and resistant to a chosen etch method, said layer being supported on a substrate, (b) applying spectral energy to the coated layer to selectively remove only the material, said spectral energy being applied to said material through said substrate; and (c) separating the underlying layer in the regions thereof where said coating is removed.
Claim 5
Independent Claim
85 words
The method of precision separation of layers which comprises the steps of (a) coating the layer to be separated with a functional material that is absorptive at a selected spectral frequency and resistant to a chosen etch method, said layer being supported on a substrate, (b) applying spectral energy to the coated layer to selectively remove only the material, said spectral energy being applied to said material through said substrate; and (c) separating the underlying layer in the regions thereof where said coating is removed.
Claim 6
Dependent Claim
12 words
The method of claim 3 wherein said spectral energy is laser applied.
Claim 7
Dependent Claim
13 words
The method of claim 3 wherein the underlying layer is separated by etching.
Claim 8
Independent Claim
76 words
The method of precision separation of layers which comprises the steps of (a) coating the layer to be separated with a polymer containing a functional material that is absorptive to a selected spectral frequency and resistant to a chosen etch method; (b) applying spectral energy to the coated layer to selectively remove only the material which absorbs said spectral energy; and (c) separating the underlying layer in the regions thereof where said coating material is removed.
Claim 9
Independent Claim
76 words
The method of precision separation of layers which comprises the steps of (a) coating the layer to be separated with a polymer containing a functional material that is absorptive to a selected spectral frequency and resistant to a chosen etch method; (b) applying spectral energy to the coated layer to selectively remove only the material which absorbs said spectral energy; and (c) separating the underlying layer in the regions thereof where said coating material is removed.
Claim 10
Dependent Claim
11 words
The method of claim 6 wherein the polymer is etch resistant.
Claim 11
Dependent Claim
12 words
The method of claim 6 wherein the absorptive material is a dye.
Claim 12
Dependent Claim
19 words
The method of claim 8 wherein said dye is absorptive of a laser generated frequency or a harmonic thereof.
Claim 13
Dependent Claim
16 words
The method of claim 9 wherein the laser absorptive frequency is beyond the visible spectral range.
Claim 14
Dependent Claim
12 words
The method of claim 10 wherein the absorption is at 1.06 microns.
Claim 15
Dependent Claim
10 words
The method of claim 8 wherein the dye is nigrosene.
Claim 16
Dependent Claim
15 words
The method of claim 12 wherein the nigrosene is dissolved in a metal staining polymer.
Claim 17
Dependent Claim
11 words
The method of claim 13 wherein the polymer is water soluble.
Claim 18
Dependent Claim
12 words
The method of claim 6 wherein the first mentioned layer is metallic.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1989-02-03 | 1989-08-05 | 1990-02-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-02-03 | 1993-08-05 | 1994-02-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-02-03 | 1997-08-05 | 1998-02-04 | $7700.00 | Window Closed / Lapsed |