Patent US4568152A successfully refreshed from Google Patents.
US4568152A
Expired / Lapsed
US
⏱️ 0.0 years remaining
System for reflecting an image into a microscope
Assignee: C Reichert Optische Werke AG
•
Filing: 1983-06-17
•
Granted: 1986-02-04
•
Expires: 2003-06-17
Abstract
Abstract A marking image control system for a microscope arrangement in which the image of a marking on a mask is reflected into the optical path and combined with an object image of the microscope, the system forming an intermediate image of the marking in order to facilitate shifting of the image of the marking in a film plane or a viewing plane of the microscope.
Inventors
- 👤 Kurt Merstallinger
- 👤 Klaus Schindl
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 09:04
CPC Classifications
G; G02; G02B; G02B21/00; G02B21/36; G02B21/361; G02B21/18
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
120 words
A reticle projection system suitable for use in projecting a reticle image to a selected location in a microscope image plane, which comprises an optical axis, a light source at one end of said optical axis, a collector lens system, a reticle fixed relative to said optical axis and an entrance pupil positioned in sequence on said optical axis, said collector lens system being adapted to substantially fill said entrance pupil with an image of said light source, means to move the reticle image to a selected location in the microscope image plane, said means comprising a lens orthogonally displaced in a plane perpendicular to said optical axis, said lens being positioned on said optical axis after said entrance pupil.
Claim 2
Dependent Claim
120 words
A reticle projection system suitable for use in projecting a reticle image to a selected location in a microscope image plane, which comprises an optical axis, a light source at one end of said optical axis, a collector lens system, a reticle fixed relative to said optical axis and an entrance pupil positioned in sequence on said optical axis, said collector lens system being adapted to substantially fill said entrance pupil with an image of said light source, means to move the reticle image to a selected location in the microscope image plane, said means comprising a lens orthogonally displaced in a plane perpendicular to said optical axis, said lens being positioned on said optical axis after said entrance pupil.
Claim 3
Dependent Claim
18 words
The reticle projection system of claim 1 wherein said means to project the reticle image includes said lens.
Claim 4
Dependent Claim
19 words
The reticle projection system of claim 1 further including zoom means to vary the size of the reticle image.
Claim 5
Dependent Claim
129 words
A reticle projection system suitable for use in projecting a reticle image to a selected location in a microscope image plane, which comprises an optical axis, a light source at one end of said optical axis, a collector lens system, a reticle fixed relative to said optical axis and an entrance pupil positioned in sequence on said optical axis, said collector lens system being adapted to substantially fill said entrance pupil with an image of said light source, means to move the reticle image to a selected location in the microscope image plane; a portion of the optical axis extending from said light source to said entrance pupil, including said collector lens system and said reticle, being pivotably movable about a center of rotation located in the entrance pupil.
Claim 6
Dependent Claim
129 words
A reticle projection system suitable for use in projecting a reticle image to a selected location in a microscope image plane, which comprises an optical axis, a light source at one end of said optical axis, a collector lens system, a reticle fixed relative to said optical axis and an entrance pupil positioned in sequence on said optical axis, said collector lens system being adapted to substantially fill said entrance pupil with an image of said light source, means to move the reticle image to a selected location in the microscope image plane; a portion of the optical axis extending from said light source to said entrance pupil, including said collector lens system and said reticle, being pivotably movable about a center of rotation located in the entrance pupil.
Claim 7
Dependent Claim
45 words
The reticle projection system of claim 4 wherein said light source, collector lens system and reticle are assembled as a unit, said unit being adapted for movement about a spherical surface and said spherical surface having a center of curvature located in said entrance pupil.
Claim 8
Dependent Claim
19 words
The reticle projection system of claim 5 further including zoom means to vary the size of the reticle image.
Claim 9
Dependent Claim
19 words
The reticle projection system of claim 4 further including zoom means to vary the size of the reticle image.
Claim 10
Dependent Claim
106 words
A reticle projection system suitable for use in projecting a reticle image to a selected location in a microscope image plane, which comprises an optical axis, a light source at one end of said optical axis, a collector lens system, a reticle fixed relative to said optical axis and an entrance pupil positioned in sequence on said optical axis, said collector lens system being adapted to substantially fill said entrance pupil with an image of said light source, means to move the reticle image to a selected location in the microscope image plane; and a zoom means to vary the the size of the reticle image.
Claim 11
Dependent Claim
106 words
A reticle projection system suitable for use in projecting a reticle image to a selected location in a microscope image plane, which comprises an optical axis, a light source at one end of said optical axis, a collector lens system, a reticle fixed relative to said optical axis and an entrance pupil positioned in sequence on said optical axis, said collector lens system being adapted to substantially fill said entrance pupil with an image of said light source, means to move the reticle image to a selected location in the microscope image plane; and a zoom means to vary the the size of the reticle image.
References Cited (Backward Citations)
US4057318A
Cited
DE2933627A1
Cited
US4473293A
Cited
US4281923A
Cited
US4302087A
Cited
US4303340A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-02-03 | 1989-08-05 | 1990-02-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-02-03 | 1993-08-05 | 1994-02-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-02-03 | 1997-08-05 | 1998-02-04 | $7700.00 | Window Closed / Lapsed |