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Semiconductor device for automation of integrated photoarray characterization

Assignee: Dresser LLC
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Filing: 1985-02-26
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Granted: 1986-01-28
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Expires: 2005-02-26
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Abstract

Abstract A semiconductor device structure is used to determine minority carrier lifetime and photosensitivity for production-processed integrated circuits and devices. The device structure family described herein permits determination of the minority carrier lifetime and photosensitivity at high throughput rates using automated test equipment in a normal test facility environment.

Inventors

  • 👤 William N. Carr

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 07:22
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/282; G01R31/2831

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 112 words
A method of determining the output current of a photodiode array fabricated on a semiconductor wafer comprising the steps of: forming on the semiconductor wafer a field effect transistor having source, gate, and drain electrodes; forming an opaque shield over the field effect transistor to prevent ambient light from affecting the drain current of the field effect transistor; injecting a source current at the source electrode of the field effect transistor and measuring a drain current at the drain electrode of the field effect transistor; and determining a nominal output current for the photodiode array by correlating the measured drain current of the field effect transistor with the nominal photodiode output current.
Claim 2
Independent Claim 112 words
A method of determining the output current of a photodiode array fabricated on a semiconductor wafer comprising the steps of: forming on the semiconductor wafer a field effect transistor having source, gate, and drain electrodes; forming an opaque shield over the field effect transistor to prevent ambient light from affecting the drain current of the field effect transistor; injecting a source current at the source electrode of the field effect transistor and measuring a drain current at the drain electrode of the field effect transistor; and determining a nominal output current for the photodiode array by correlating the measured drain current of the field effect transistor with the nominal photodiode output current.
Claim 3
Dependent Claim 24 words
The method of claim 1 wherein the field effect transistor gate electrode reduces lateral electric fields between the source electrode and the drain electrode.
Claim 4
Dependent Claim 22 words
The method of claim 2 wherein the gate electrode forms the opaque shield to shield the field effect transistor from ambient light.

References Cited (Backward Citations)

US3518494A Cited
US3750018A Cited
US3845295A Cited
US4194213A Cited
DE2624265A1 Cited
US4241262A Cited
US4200892A Cited
JPS54159879A Cited
GB2090057A Cited
JPS57173278A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-01-27 1989-07-29 1990-01-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-01-27 1993-07-29 1994-01-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-01-27 1997-07-29 1998-01-28 $7700.00 Window Closed / Lapsed

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