Abstract A flashlight-radiant apparatus is constructed of a housing defining an object-handling space and an irradiation space located adjacent to the object-handling space, a plurality of flash discharge lamps provided side by side in an upper part of the irradiation space, a gas-discharging member provided in the upper part of the irradiation space for controlling the atmosphere of the housing, and an object-supporting table movable reciprocally between the object-handling space and the irradiation space in the housing and equipped with built-in subsidiary heating. An object, for example, a silicon wafer is preheated on the object-supporting table while the object-supporting table is located in the object-handling space. The flashlight-radiant apparatus has a simple structure, enjoys a high level of handling safety, assures long service life for its flash discharge lamps, and is suitable particularly for annealing semiconductor wafers.
A flashlight-radiant apparatus comprising: a housing defining within an object-handling space and an irradiation space located adjacent to the object-handling space; a plurality of flash discharge lamps provided side by side in an upper part of the irradiation space; a gas-discharging member provided in the upper part of the irradiation space for controlling the atmosphere in the housing; and an object-supporting table movable reciprocatingly between the object-handling space and the irradiation space in the housing and equipped with built-in subsidiary heating means, whereby an object supported on the object-supporting table can be preheated while the object-supporting table is located in the object-handling space.
Claim 2
Dependent Claim
103 words
A flashlight-radiant apparatus comprising: a housing defining within an object-handling space and an irradiation space located adjacent to the object-handling space; a plurality of flash discharge lamps provided side by side in an upper part of the irradiation space; a gas-discharging member provided in the upper part of the irradiation space for controlling the atmosphere in the housing; and an object-supporting table movable reciprocatingly between the object-handling space and the irradiation space in the housing and equipped with built-in subsidiary heating means, whereby an object supported on the object-supporting table can be preheated while the object-supporting table is located in the object-handling space.
Claim 3
Dependent Claim
32 words
A flashlight-radiant apparatus as claimed in claim 1, wherein a gas which has been discharged into the irradiation space from the gas-discharging member is then allowed to flow into the object-handling space.
Claim 4
Dependent Claim
26 words
A flashlight-radiant apparatus as claimed in claim 1, wherein an atmosphere-controlling gas is discharged from the gas-discharging member toward the flash discharge lamps for cooling same.
Claim 5
Dependent Claim
21 words
A flashlight-radiant apparatus as claimed in claim 1, wherein a substantially planar light source is constructed by the flash discharge lamps.
Claim 6
Dependent Claim
19 words
A flashlight-radiant apparatus as claimed in claim 1, wherein an upwardly-convex reflector is arranged over the flash discharge lamps.