US4566192A — Critical dimension measurement structure

Claim 1

Independent Claim 95 words

An apparatus for indicating dimensions of projected figures, comprising pattern means, disposed on a mask means for producing projected figures, for scaling dimensional variation of said projected figures from the dimensions of figures on said mask means, said pattern means including a plurality of spaced scaling figures disposed within said pattern means such that alignment of opposing edges of at least two of said scaling figures after projection from said mask means represents a measure of said dimensional variation, said aligning opposing edges scaling figures being offset from each other along the axis of alignment.

Claim 2

Independent Claim 95 words

An apparatus for indicating dimensions of projected figures, comprising pattern means, disposed on a mask means for producing projected figures, for scaling dimensional variation of said projected figures from the dimensions of figures on said mask means, said pattern means including a plurality of spaced scaling figures disposed within said pattern means such that alignment of opposing edges of at least two of said scaling figures after projection from said mask means represents a measure of said dimensional variation, said aligning opposing edges scaling figures being offset from each other along the axis of alignment.

Claim 3

Dependent Claim 64 words

An apparatus according to claim 1 wherein said pattern means includes a plurality of sets of aligning scaling figures and wherein said scaling figures are arranged into at least two columns transverse to said alignment axis such that each scaling figure of each of said sets of aligning scaling figures is disposed in a separate column from the other scaling figures of that set.

Claim 4

Dependent Claim 70 words

The apparatus according to claim 2 wherein said scaling figures are arranged into three adjacent columns, wherein each of said sets of aligning scaling figures includes three scaling figures, and wherein the corresponding scaling figures in the outside columns both may be aligned with the same opposing edge to the corresponding scaling figure in the central column of each of said sets to represent a measure of said dimensional variation.

Claim 5

Dependent Claim 63 words

The apparatus according to claim 1 wherein said mask means is the critical dimension affecting level in the projection of figures onto a printed medium, and wherein said pattern means further includes indicia associated with each set of said aligning scaling figures which indicates an absolute dimension of said projected figures when said opposing edges of scaling figures in that set are aligned.

Claim 6

Dependent Claim 30 words

The apparatus according to claim 4 wherein said absolute dimension corresponds to the linewidth of said projected figures, and wherein said linewidth is the critical dimension of said projected figures.

Claim 7

Dependent Claim 19 words

The apparatus according to claim 1 including electronic edge finding means for detecting said alignment of said scaling figures.

Claim 8

Dependent Claim 19 words

The apparatus according to claim 1 including optical edge finding means for detecting said alignment of said scaling figures.

Claim 9

Dependent Claim 50 words

The apparatus according to claim 1 wherein each of said scaling figures in a set of said aligning scaling figures has the same configuration as the other scaling figures in that set, and wherein each of said scaling figures has symmetry about an axis perpendicular to said axis of alignment.

Claim 10

Dependent Claim 16 words

The apparatus according to claim 8 wherein each of said scaling figures is rectilinear in configuration.

Claim 11

Dependent Claim 30 words

The apparatus according to claim 1 wherein said alignment of opposing edges of said scaling figures is taken along a horizontal axis for each set of said aligning scaling figures.

Claim 12

Dependent Claim 29 words

The apparatus according to claim 1 wherein each of said scaling figures may be aligned along a plurality of different edges with a corresponding plurality of different opposing edges.

Claim 13

Dependent Claim 50 words

The apparatus according to claim 11 wherein said plurality of different edges of each said scaling figures includes two parallel edges which may each be aligned with different opposing edges such that each of said scaling figures forms part of at least two different sets of said aligning scaling figures.

Claim 14

Dependent Claim 112 words

A dimensional measurement means for use in semiconductor fabrication apparatus, formed on the screen level which effects a critical dimension of printed screen features and which is subject to inaccuracies in printing which cause dimensional variation between said screen features and features printed from said screen, comprising: pattern means subject to concurrent dimensional distortion along with said screen figures during printing onto the projected surface means, said pattern means including at least one set of scaling figures spacially offset along a common axis whose alignment of opposing edges along said common axis represents a measure of said dimensional distortion; and means to detect alignment of said opposing edges along said common axis.

Claim 15

Dependent Claim 112 words

A dimensional measurement means for use in semiconductor fabrication apparatus, formed on the screen level which effects a critical dimension of printed screen features and which is subject to inaccuracies in printing which cause dimensional variation between said screen features and features printed from said screen, comprising: pattern means subject to concurrent dimensional distortion along with said screen figures during printing onto the projected surface means, said pattern means including at least one set of scaling figures spacially offset along a common axis whose alignment of opposing edges along said common axis represents a measure of said dimensional distortion; and means to detect alignment of said opposing edges along said common axis.

Claim 16

Dependent Claim 22 words

The apparatus according to claim 13 wherein said pattern means includes scaling figures each forming a line on said projected surface means.

Claim 17

Dependent Claim 22 words

The apparatus according to claim 13 wherein said pattern means includes scaling figures each forming a space on said projected surface means.

Claim 18

Dependent Claim 22 words

The apparatus according to claim 13 wherein said projected surface means is a mask for exposing a photoresist on a semiconductor wafer.

Claim 19

Dependent Claim 17 words

The apparatus according to claim 13 wherein said projected surface means is photoresist on a semiconductor wafer.

Claim 20

Dependent Claim 17 words

The apparatus according to claim 13 wherein said projected surface means is a permanent semiconductor wafer pattern.

Claim 21

Independent Claim 116 words

A method for determining dimensions of printed or projected figures comprising: projecting a pattern means onto the printed surface concurrently with the desired printed figures, said pattern means including at least one set of scaling figures arranged such that a predetermined level of dimensional distortion of said scaling figures causes alignment of opposing edges thereof, said scaling figures within said set being arranged such that said opposing edges are offset along the axis of alignment; detecting the alignment of said opposing edges along said axis of alignment; and correlating said predetermined level of dimensional distortion, as determined by said alignment, with the known dimensions prior to said projection to determine absolute dimensions of said projected figures.

Claim 22

Independent Claim 116 words

A method for determining dimensions of printed or projected figures comprising: projecting a pattern means onto the printed surface concurrently with the desired printed figures, said pattern means including at least one set of scaling figures arranged such that a predetermined level of dimensional distortion of said scaling figures causes alignment of opposing edges thereof, said scaling figures within said set being arranged such that said opposing edges are offset along the axis of alignment; detecting the alignment of said opposing edges along said axis of alignment; and correlating said predetermined level of dimensional distortion, as determined by said alignment, with the known dimensions prior to said projection to determine absolute dimensions of said projected figures.

Claim 23

Dependent Claim 60 words

The method according to claim 19 wherein said pattern means includes a plurality of said sets of scaling figures; and each of said sets has indicia associated therewith which is projected onto said printed surface along with said sets and which serves to indicate said absolute dimension for that predetermined level of distortion associated with each set of said sets.

Claim 24

Independent Claim 105 words

An apparatus for indicating the scale of dimensional variation of figures during a printing or projection process of comprising a pattern means disposed on a screen means for producing projected or printed figures, said pattern means including a plurality of spaced apart scaling figures, each of said scaling figures having at least one edge opposing an edge of another said scaling figures, said scaling figures being disposed in said pattern means offset from a scaling figure having said opposing edge along an axis of alingment such that alignment of said opposing edge along said axis represents a measure of dimensional variation of said scaling figures.

Claim 25

Independent Claim 105 words

An apparatus for indicating the scale of dimensional variation of figures during a printing or projection process of comprising a pattern means disposed on a screen means for producing projected or printed figures, said pattern means including a plurality of spaced apart scaling figures, each of said scaling figures having at least one edge opposing an edge of another said scaling figures, said scaling figures being disposed in said pattern means offset from a scaling figure having said opposing edge along an axis of alingment such that alignment of said opposing edge along said axis represents a measure of dimensional variation of said scaling figures.

Claim 26

Dependent Claim 34 words

The apparatus according to claim 21 wherein said alignment of said opposing edges along said axis represents a measure of dimensional variation resulting from the formation of said pattern means on said screen means.

Claim 27

Dependent Claim 52 words

The apparatus according to claim 21 wherein said alignment of said opposing edges along said axis represents a measure of dimensional variation resulting from either the formation of said pattern means on said screen means or the projection or printing of figures from said screen means onto another screen or wafer means.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1989-01-27	1989-07-29	1990-01-28	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1993-01-27	1993-07-29	1994-01-28	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	1997-01-27	1997-07-29	1998-01-28	$7700.00	Window Closed / Lapsed

Critical dimension measurement structure

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