Soft X-ray generator

Claim 2

A soft X-ray generator comprising an electron gun for generating an electron beam, an anode irradiated with the electron beam to generate soft X-rays, and a vacuum chamber for containing said electron gun and said anode, wherein an incident angle ξ of the electron beam with respect to said anode, an angle θ formed between said anode and a line interconnecting a point at which the soft X-rays are generated in said anode and the center of a field of irradiation by the soft X-rays, and an angle ζ formed between the line interconnecting said soft X-ray generating point and the center of said field of irradiation and a line interconnecting said soft X-ray generating point and an outer peripheral edge of said field of irradiation are selected so that a function ##EQU7## becomes a maximum, F being the intensity of the soft X-rays at a location in said field of irradiation where said intensity is most feeble, μ being the soft X-ray absorption coefficient of said anode and d being an average depth of said soft X-ray generating point in said anode, and wherein said electron gun, said anode and said field of irradiation are arranged at locations determined by the selected angles ξ, θ and ζ.

Claim 3

A soft X-ray generator according to claim 1, further comprising a metal mesh of high aperture ratio within said vacuum chamber between said soft X-ray generating point and said field of irradiation.

Claim 4

A soft X-ray generator according to claim 1, further comprising a window within said vacuum chamber between said soft X-ray generating point and said field of irradiation, said window making the intensity distribution of the soft X-rays uniform.

Claim 5

A soft X-ray generator according to claim 3, wherein said window includes a layer made of a material which serves to absorb a part of the soft X-rays.

Claim 6

A soft X-ray generator according to claim 1, further comprising a conduit within said vacuum chamber for guiding the electron beam from said electron gun onto said anode in a focused form.

Claim 7

A soft X-ray generator according to claim 5, wherein said conduit has a length sufficient for focusing the electron beam from said electron gun.

Claim 8

A soft X-ray generator according to claim 1, wherein said anode includes a rotatable body having a side face irradiated with the electron beam from said electron gun.

Claim 9

A soft X-ray generator according to claim 7, wherein said rotatable body has a hollow configuration for permitting coolant to flow into the interior of said body.

Claim 10

A soft X-ray generator comprising: an anode irradiated with an electron beam to generate soft X-rays; a first vacuum container provided with a window member through which said soft X-rays are taken out, said first container accommodating therein said anode; an electron gun for generating said electron beam; a second vacuum container for accommodating therein said electron gun; a conduit disposed between said first and second vacuum containers for coupling said containers to each other and guiding said electron beam from said electron gun to said anode; an electron lens mounted in combination with said conduit for focusing said electron beam guided through said conduit onto said anode electrode; and wherein said anode has a surface for receiving said electron beam, said surface being inclined relative to a line interconnecting a point at which the soft X-rays are generated and the center of a field of irradiation so that the following quantity F(θ) becomes maximum, ##EQU8## where F(θ): intensity of the soft X-rays at a location of said field of irradiation where said intensity is most feeble, μ: absorption coefficient of the soft X-rays of the anode material, d: average depth of the portion at which the soft X-rays are generated, ξ: incident angle of the electron beam. θ: angle formed between the electron beam receiving surface of said anode electrode and the line interconnecting the soft X-ray generating point and the center of the field of irradiation, and ζ: angle formed between the line interconnecting the soft X-ray generating point and the center of the field of irradiation and a line interconnecting the soft X-ray generating point and an outer peripheral edge of said field of irradiation.

Claim 11

A soft X-ray generator comprising: an anode irradiated with an electron beam to generate soft X-rays; a first vacuum container provided with a window member through which said soft X-rays are taken out, said first container accommodating therein said anode; an electron gun for generating said electron beam; a second vacuum container for accommodating therein said electron gun; a conduit disposed between said first and second vacuum containers for coupling said containers to each other and guiding said electron beam from said electron gun to said anode; an electron lens mounted in combination with said conduit for focusing said electron beam guided through said conduit onto said anode electrode; and wherein said anode has a surface for receiving said electron beam, said surface being inclined relative to a line interconnecting a point at which the soft X-rays are generated and the center of a field of irradiation so that the following quantity F(θ) becomes maximum, ##EQU8## where F(θ): intensity of the soft X-rays at a location of said field of irradiation where said intensity is most feeble, μ: absorption coefficient of the soft X-rays of the anode material, d: average depth of the portion at which the soft X-rays are generated, ξ: incident angle of the electron beam. θ: angle formed between the electron beam receiving surface of said anode electrode and the line interconnecting the soft X-ray generating point and the center of the field of irradiation, and ζ: angle formed between the line interconnecting the soft X-ray generating point and the center of the field of irradiation and a line interconnecting the soft X-ray generating point and an outer peripheral edge of said field of irradiation.

Claim 12

A soft X-ray generator according to claim 9, wherein said anode electrode is implemented in a disc-like configuration having passages for coolant formed in the interior and is supported rotatablywithin said first vacuum container.

Claim 13

A soft X-ray generator according to claim 9, wherein said window member has a layer formed thereon, said layer serving to absorb a part of the soft X-rays.