Process gas controller

Claim 2

A process gas controller of the type for connection to a purging gas source and a process gas source for supplying process gas to equipment, the controller comprising: a main gas line having a main inlet and a main outlet, said main inlet fluidly connected to the process gas source and said main outlet fluidly connected to the equipment; a first valve positioned between the purging gas source and said main inlet; a pressure regulator positioned along said main gas line for providing the process gas to the equipment at a regulated pressure; a second valve positioned along said main gas line between said main outlet and said regulator; a third valve positioned along said main gas line between said regulator and said main inlet; a fourth valve having a fourth valve inlet, fluidly connected to said main gas line between said regulator and said second valve and a fourth valve outlet fluidly connected to a first vent region; a fifth valve having a fifth valve inlet fluidly connected to said main gas line between said inlet and said third valve and a fifth valve outlet fluidly connected to second vent region, said first through fifth valves being operable to isolate the process gas source from the equipment, to vent gas to said first and second vent regions and to purge the main gas line with gas from the purging gas source; and a valve controller having a plurality of user selected operating positions and being coupled to a plurality of said first through fifth valves, said valve controller arranged and adapted to control the opening and closing of said plurality of valves according to the operating position chosen by the user.

Claim 3

The process gas controller of claim 1 further comprising a purging gas line along which said first valve is positioned.

Claim 4

The process gas controller of claim 1 further comprising first and second vent lines along which said fourth and fifth valves are positioned respectively.

Claim 5

The process gas controller of claim 1 wherein said valve controller includes at least eight operating positions and said valve controller controls said first through fifth valves as follows: ______________________________________ Operating Valve Position First Second Third Fourth Fifth ______________________________________ 1 C O O C C 2 C C C C C 3 C C C O O 4 O C C C C 5 C C C C C 6 C C O C O 7 O C O C C 8 O O O C C ______________________________________ wherein: C=closed valve and O=open valve.

Claim 6

The process gas controller of claim 1 wherein said valve controller is a fluid pressure device and includes: a program member having passageways fluidly coupled to said plurality of valves and having fluid passage ports, fluidly coupled to said passageways, at selected positions along an outer surface of said program member; and an inlet member having an inner surface conformingly configured for mating sliding engagement with said program member outer surface, said inlet member including an inlet passage formed into said inner surface, said inlet passage adapted to fluidly engage at least one of said fluid passage ports when said valve controller is in at least one of said operating positions thereby selectively fluidly connecting said inlet passage to one or more of said plurality of valves to actuate said one or more valves.

Claim 7

The process gas controller of claim 5 wherein said program member has a disk shape.

Claim 8

The process gas controller of claim 6 wherein said passageways are concentric.

Claim 9

The process gas controller of claim 6 wherein said outer surface is flat and wherein said passageways are circular concentric grooves formed within said program member, said grooves defining a common axis.

Claim 10

The process gas controller of claim 8 wherein said program member includes a base member and a cover member, said base member including said flat outer surface, said base and cover members being fixed to one another to prevent relative movement therebetween.

Claim 11

The process gas controller of claim 8 wherein said program member and said inlet member are flat disks, said fluid passage ports being arranged parallel to the common axis and said inlet passage being arranged transverse to the common axis.

Claim 12

A process gas controller of the type for connection to a purging gas source and a process gas source for supplying process gas to equipment, the controller comprising: a main gas line having a main inlet and a main outlet, said main inlet fluidly connected to the process gas source and said main outlet fluidly connected to the equipment; a first valve positioned between the purging gas source and said main inlet; a pressure regulator positioned along said main gas line for providing the process gas to the equipment at a regulated pressure; a second valve positioned along said main gas line between said main outlet and said regulator; a third valve positioned along said main gas line between said regulator and said main inlet; a fourth valve having a fourth valve inlet, fluidly connected to said main gas line between said regulator and said second valve and a fourth valve outlet fluidly connected to a first vent region; a fifth valve having a fifth valve inlet fluidly connected to said main gas line between said inlet and said third valve and a fifth valve outlet fluidly connected to second vent region; and a valve controller having a plurality of user selected operating positions and being operably coupled to said first through fifth valves, said valve controller arranged and adapted to control the opening and closing of said plurality of valves according to the operating position chosen by the user as follows: ______________________________________ Operating Valve Position First Second Third Fourth Fifth ______________________________________ 1 C O O C C 2 C C C C C 3 C C C O O 4 O C C C C 5 C C C C C 6 C C O C O 7 O C O C C 8 O O O C C ______________________________________ wherein: C=closed valve and O=open valve.

Claim 13

A process gas controller of the type for connection to a purging gas source and a process gas source for supplying process gas to equipment, the controller comprising: a main gas line having a main inlet and a main outlet, said main inlet fluidly connected to the process gas source and said main outlet fluidly connected to the equipment; a first valve positioned between the purging gas source and said main inlet; a pressure regulator positioned along said main gas line for providing the process gas to the equipment at a regulated pressure; a second valve positioned along said main gas line between said main outlet and said regulator; a third valve positioned along said main gas line between said regulator and said main inlet; a fourth valve having a fourth valve inlet, fluidly connected to said main gas line between said regulator and said second valve and a fourth valve outlet fluidly connected to a first vent region; a fifth valve having a fifth valve inlet fluidly connected to said main gas line between said inlet and said third valve and a fifth valve outlet fluidly connected to second vent region; and a valve controller having a plurality of user selected operating positions and being operably coupled to said first through fifth valves, said valve controller arranged and adapted to control the opening and closing of said plurality of valves according to the operating position chosen by the user as follows: ______________________________________ Operating Valve Position First Second Third Fourth Fifth ______________________________________ 1 C O O C C 2 C C C C C 3 C C C O O 4 O C C C C 5 C C C C C 6 C C O C O 7 O C O C C 8 O O O C C ______________________________________ wherein: C=closed valve and O=open valve.

Claim 14

The process gas controller of claim 11 wherein said valve controller is a fluid pressure device and includes: a program member having passageways fluidly coupled to said plurality of valves and fluid passage ports, fluidly coupled to said passageways, at selected positions along an outer surface of said program member; an inlet member having an inner surface conformingly configured for mating sliding engagement with said program member outer surface, said inlet member including an inlet passage formed into said inner surface, said inlet passage adapted to fluidly engage at least one of said fluid passage ports when said valve controller is in at least six of said operating positions thereby selectively fluidly connecting said air inlet to one or more of said plurality of valves to actuate said one or more valves.

Claim 15

A controller for supplying fluid from a fluid source to selected fluid actuated devices comprising: a program member having a plurality of actuation ports fluidly coupled to the devices and a plurality of coaxial passageways, each said passageway fluidly coupled to at least one said actuation port, said program member including a program surface positioned on one side of said program member and a plurality of program ports positioned within said program member and extending between said passageways and said program surface; and a selection member movably mounted to said program member, said selection member having an inner surface conformingly configured for mating sliding engagement with said program surface, said selection member having an elongate inlet passage, fluidly connected to the fluid source, formed in said inner surface and sized to fluidly connected selected ones of said program ports according to the relative positions of said program member, the identity and number of said selected ones of said program ports, corresponding to the relative positions of said program member and said selection member, being selectable independent of the arrangement of said coaxial passageways, and said selection member thereby fluidly coupling the fluid source to selected ones of the fluid actuated devices.

Claim 16

A controller for supplying fluid from a fluid source to selected fluid actuated devices comprising: a program member having a plurality of actuation ports fluidly coupled to the devices and a plurality of coaxial passageways, each said passageway fluidly coupled to at least one said actuation port, said program member including a program surface positioned on one side of said program member and a plurality of program ports positioned within said program member and extending between said passageways and said program surface; and a selection member movably mounted to said program member, said selection member having an inner surface conformingly configured for mating sliding engagement with said program surface, said selection member having an elongate inlet passage, fluidly connected to the fluid source, formed in said inner surface and sized to fluidly connected selected ones of said program ports according to the relative positions of said program member, the identity and number of said selected ones of said program ports, corresponding to the relative positions of said program member and said selection member, being selectable independent of the arrangement of said coaxial passageways, and said selection member thereby fluidly coupling the fluid source to selected ones of the fluid actuated devices.

Claim 17

The controller of claim 13 wherein said program member is a disk-like member, said program surface being a flat surface, and wherein said passageways are circular concentric grooves formed in said program member, said grooves defining a common axis.

Claim 18

The controller of claim 13 wherein said program member includes a base and a cover, said base, said cover, and said selection member being flat disks, said inlet passage being arranged transverse to said common axis, and means for fixedly mounting said base to said cover.

Claim 19

The controller of claim 13 including at least eight operating positions and wherein said controller controls first through fifth device as follows: ______________________________________ Operating Device Position First Second Third Fourth Fifth ______________________________________ 1 C O O C C 2 C C C C C 3 C C C O O 4 O C C C C 5 C C C C C 6 C C O C O 7 O C O C C 8 O O O C C ______________________________________ wherein: C=closed valve and O=open valve.

Claim 20

The controller of claim 13 wherein the passageways are circular.

Claim 21

The controller of claim 17 wherein the passageways are concentric.