Semiconductor memory device

Claim 2

A semiconductor memory device including a matrix of memory cells arranged in rows and columns, said semiconductor memory device comprising: a plurality of groups of memory cells divided by segmenting said matrix in the direction of the columns; memory cell group selection lines for every one of said groups for selecting any one of said plurality of the groups of said memory cells; row decoders for every one of said rows for decoding of row address information for a particular memory cell to be accessed; preceding word lines each connected to the output of each of said row decoders; AND gates each provided for providing a logical product of a group enable signal carried on said memory cell group selection line and a row enable signal from said row decoders on said preceding word lines; group word lines each provided per group and per row for receiving the logical product output from each of said AND gates; wherein said particular memory cell is accessed with the logical product output from the corresponding one of said group word lines.

Claim 3

A semiconductor memory device in accordance with claim 1 further comprising memory cell group selectors receiving and decoding memory cell group selection signal for selecting one of said plurality of the groups of the memory cells and for supplying said group enable signal output onto said selected one of said memory cell group selection lines.

Claim 4

A semiconductor memory device in accordance with claim 2 further comprising column decoders for decoding column address information for said particular memory cell to be accessed, wherein said group enable signal output on said selected one of said memory cell group selection lines is supplied to the corresponding ones of said column decoders to serve as pre-decoding means for columns selection.

Claim 5

A semiconductor memory device in accordance with claim 1 wherein said semiconductor memory device is set up on a semiconductor chip and a column of said row decoders are arranged at an edge portion of a memory region of said chip.

Claim 6

A semiconductor memory device in accordance with claim 1 wherein said semiconductor memory device is set up on a semiconductor chip and said preceding word lines are made up of relatively low resistance material.

Claim 7

A semiconductor memory device in accordance with claim 1 wherein said semiconductor memory device is set up on a semiconductor chip; said respective memory cells include an access transistor having a control electrode connected to the corresponding one of said group word lines and made up by a layer of polysilicon; said group word lines are formed by the same layer of polysilicon as that forming said control electrode; said preceding word lines are made up by a layer of polysilicon different from said layer of polysilicon or a layer of metallic wiring material; and said group word lines and said preceding word lines are aligned in parallel in the direction of the rows.

Claim 8

A semiconductor memory device in accordance with claim 1 wherein said AND gates each comprises: a first input portion receiving said group enable signal from the corresponding one of said memory cell group selection lines; a second input portion receiving said row enable signal from the corresponding one of said preceding word lines; an output portion supplying said logical product output to the corresponding one of said group word lines; a first transistor having a control electrode connected to said first input portion and a pair of electrodes one of which is connected to said second input portion and the other of which is connected to said output portion; an inverter means receiving said group enable signal from said first input portion and providing its logical "NOT" output; and a second transistor having a control electrode supplied with said "NOT" output from said inverter means and a pair of electrodes one of which is connected to said output portion and the other of which is grounded.

Claim 9

A semiconductor memory device in accordance with claim 1 further comprising a plurality of inverter means each provided for each of the groups for receiving said group enable signal from the corresponding memory cell group selection line and providing its logical "NOT" output; and wherein said AND gates each comprises: a first input portion receiving said group enable signal from the corresponding one of said memory cell group selection lines; a second input portion receiving said row enable signal from the corresponding one of said preceding word lines; an output portion supplying said logical product output to the corresponding one of said group word lines; a first transistor having a control electrode connected to said first input portion and a pair of electrodes one of which is connected to said second input portion and the other of which is connected to said output portion; and a second transistor having a control electrode supplied with said "NOT" output from the corresponding one of said inverter means and a pair of electrodes one of which is connected to said output portion and the other of which is grounded.

Claim 10

A semiconductor memory device in accordance with claim 1 wherein said preceding word lines are isolated from said group word lines so that said preceding word lines are free of influence of a parasitic capacitor in said memory cells.

Claim 11

A semiconductor memory device in accordance with claim 9 wherein said AND gates each comprises: a first input portion receiving said group enable signal from the corresponding one of said memory cell group selection lines; a second input portion receiving said row enable signal from the corresponding one of said preceding word lines; an output portion providing said logical product output to the corresponding one of said group word lines; a first transistor having a control electrode connected to said second input portion and a pair of electrodes one of which is connected to said first input portion and the other of which is connected to said output portion; an inverter means receiving said row enable signal from said second input portion and providing its logical "NOT" output; and a second transistor having a control electrode receiving said "NOT" output from said inverter means and a pair of electrodes one of which is connected to said output portion and the other of which is grounded.

Claim 12

A semiconductor memory device in accordance with claim 10 wherein said preceding word lines are made up by relatively low resistance material.

Claim 13

A semiconductor memory device in accordance with claim 11 wherein said material is metal.