Patent US4546016A successfully refreshed from Google Patents.
US4546016A
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US
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Deposition of borophosphosilicate glass
Assignee: Intersil Corp
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Filing: 1984-08-06
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Granted: 1985-10-08
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Expires: 2004-08-06
Abstract
Abstract An improved method of depositing borophosphosilicate glass (BPSG) on a substrate is disclosed. The improved method uses temperatures substantially lower than conventional and a volume ratio of oxygen to the total hydride content in the deposition mixture substantially higher than conventional. A BPSG film of increased purity is produced at a rate of deposition substantially faster than conventional procedures.
Inventors
- 👤 Werner Kern
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 16:32
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6923; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/66; H10P14/668; H10P14/6681; H10P14/6682
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
69 words
In a method for forming a layer of borophosphosilicate glass on a suitable substrate by chemical vapor deposition of a mixture of oxygen and the hydrides of silicon, boron and phosphorus, the improvement wherein the deposition is carried out at a temperature of from about 365° to about 375° C., and the volume ratio of oxygen to the total of said hydrides is from about 40:1 to about 60:1.
Claim 2
Dependent Claim
69 words
In a method for forming a layer of borophosphosilicate glass on a suitable substrate by chemical vapor deposition of a mixture of oxygen and the hydrides of silicon, boron and phosphorus, the improvement wherein the deposition is carried out at a temperature of from about 365° to about 375° C., and the volume ratio of oxygen to the total of said hydrides is from about 40:1 to about 60:1.
Claim 3
Dependent Claim
16 words
A method in accordance with claim 1, wherein the deposition is carried out at about 370°.
Claim 4
Dependent Claim
20 words
A method in accordance with claim 1, wherein the volume ratio of oxygen to the total hydrides is about 40:1.
Claim 5
Dependent Claim
33 words
A method in accordance with claim 1, wherein the deposition is carried out at a temperature of about 370° C. and the volume ratio of oxygen to the total hydrides is about 40:1.
Claim 6
Dependent Claim
33 words
A method in accordance with claim 1, wherein the deposition is carried out at a temperature of about 370° C. and the volume ratio of oxygen to the total hydrides is about 60:1.
Claim 7
Dependent Claim
15 words
A method in accordance with claim 1, wherein the mixture also contains an inert diluent.
Claim 8
Dependent Claim
12 words
A method in accordance with claim 6, wherein said diluent is nitrogen.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-10-07 | 1989-04-08 | 1989-10-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-10-07 | 1993-04-08 | 1993-10-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-10-07 | 1997-04-08 | 1997-10-08 | $7700.00 | Window Closed / Lapsed |