US4539250A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Resist material and process for forming fine resist pattern
Assignee: Daikin Industries Ltd
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Filing: 1982-12-17
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Granted: 1985-09-03
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Expires: 2002-12-17
Abstract
Abstract A resist material of positive type having a high sensitivity, a high resolving power and an excellent adhesion property to substrates, which comprises a copolymer of a fluoroalkyl acrylate having the general formula: ##STR1## wherein R 1 is methyl group, ethyl group, a halogen-substituted methyl or ethyl group, a halogen atom or hydrogen atom, R 2 is a bivalent hydrocarbon group having 1 to 6 carbon atoms, and R f is a fluoroalkyl group having 1 to 15 carbon atoms, with an acrylic comonomer selected from the group consisting of a glycidyl acrylate, an acrylic acid, an acrylamide and an α-cyanoacrylate.
Inventors
- 👤 Tsuneo Fujii
- 👤 Hiroshi Inukai
- 👤 Takayuki Deguchi
- 👤 Toshihiko Amano
- 👤 Masami Kakuchi
- 👤 Hiroshi Asakawa
- 👤 Osamu Kogure
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 14:00
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24826
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
185 words
A resist material coated on a substrate, wherein portions of the material are irradiated and developed to form a pattern, which comprises a copolymer of a fluoroalkyl acrylate having the general formula (I): ##STR8## wherein R 1 is methyl group, ethyl group, a halogen-substituted methyl or ethyl group, a halogen atom or hydrogen atom, R 2 is a bivalent hydrocarbon group having 1 to 6 carbon atoms, and R f is a fluoroalkyl group having 1 to 15 carbon atoms, and an acrylic comonomer selected from the group consisting of a glycidyl acrylate having the general formula (II): ##STR9## wherein R 3 is hydrogen atom, methyl group or ethyl group, an acrylic acid having the general formula (III): ##STR10## wherein R 3 is as defined above, an acrylamide having the general formula (IV): ##STR11## wherein R 3 is as defined above, and an α-cyanoacrylate having the general formula (V): ##STR12## wherein R 4 is hydrogen atom or alkyl group having 1 to 5 carbon atoms and wherein the ratio of the fluoroalkyl acrylate (I) to the acrylic comonomer is from 60:40 to 99.9:0.1 by mole.
Claim 2
Dependent Claim
185 words
A resist material coated on a substrate, wherein portions of the material are irradiated and developed to form a pattern, which comprises a copolymer of a fluoroalkyl acrylate having the general formula (I): ##STR8## wherein R 1 is methyl group, ethyl group, a halogen-substituted methyl or ethyl group, a halogen atom or hydrogen atom, R 2 is a bivalent hydrocarbon group having 1 to 6 carbon atoms, and R f is a fluoroalkyl group having 1 to 15 carbon atoms, and an acrylic comonomer selected from the group consisting of a glycidyl acrylate having the general formula (II): ##STR9## wherein R 3 is hydrogen atom, methyl group or ethyl group, an acrylic acid having the general formula (III): ##STR10## wherein R 3 is as defined above, an acrylamide having the general formula (IV): ##STR11## wherein R 3 is as defined above, and an α-cyanoacrylate having the general formula (V): ##STR12## wherein R 4 is hydrogen atom or alkyl group having 1 to 5 carbon atoms and wherein the ratio of the fluoroalkyl acrylate (I) to the acrylic comonomer is from 60:40 to 99.9:0.1 by mole.
Claim 3
Dependent Claim
25 words
The resist material of claim 1, wherein the ratio of the fluoroalkyl acrylate (I) to the acrylic comonomer is from 80:20 to 99.9:0.1 by mole.
Claim 4
Dependent Claim
19 words
The resist material of claim 1, wherein said copolymer has a weight average molecular weight of 10,000 to 20,000,000.
Claim 5
Dependent Claim
19 words
The resist material of claim 1, wherein said copolymer has a weight average molecular weight of 50,000 to 10,000,000.
References Cited (Backward Citations)
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US3235421A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-09-02 | 1989-03-04 | 1989-09-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-09-02 | 1993-03-04 | 1993-09-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-09-02 | 1997-03-04 | 1997-09-03 | $7700.00 | Window Closed / Lapsed |