Patent JPS6134922A successfully refreshed from Google Patents.
Patent US4539062A successfully refreshed from Google Patents.
US4539062A
Expired / Lapsed
US
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Modular plasma reactor with local atmosphere
Assignee: Motorola Solutions Inc
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Filing: 1984-03-12
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Granted: 1985-09-03
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Expires: 2004-03-12
Abstract
Abstract A plasma reactor system is described in which a plurality of components are segregated into modules. Devices known as mass flow controllers for gas supply lines are located one each per module. A plenum for inert gas is connected to each module to bath the module in an inert atmosphere.
Inventors
- 👤 John P. Zajac
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:16
CPC Classifications
B; B01; B01J; B01J4/00; C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; B01J2219/00; B01J2219/08; B01J2219/0894; Y; Y10; Y10S; Y10S438/00; Y10S438/935
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
81 words
In equipment for processing semiconductor wafers with a plasma, said equipment including as components a reactor chamber, one or more gas supply lines associated with said chamber, an electronic control unit, and a plurality of transducers coupled to said control unit, the improvement comprising: a plurality of modules for containing at least some of said components; a plenum for containing an inert atmosphere; and said modules being coupled to said plenum so that said atmosphere flows through and around said module.
Claim 2
Dependent Claim
81 words
In equipment for processing semiconductor wafers with a plasma, said equipment including as components a reactor chamber, one or more gas supply lines associated with said chamber, an electronic control unit, and a plurality of transducers coupled to said control unit, the improvement comprising: a plurality of modules for containing at least some of said components; a plenum for containing an inert atmosphere; and said modules being coupled to said plenum so that said atmosphere flows through and around said module.
Claim 3
Dependent Claim
17 words
The equipment as set forth in claim 1 wherein said modules form one wall of said plenum.
Claim 4
Dependent Claim
22 words
The equipment as set forth in claim 1 or 2 wherein at least one of said modules comprises a mass flow controller.
Claim 5
Dependent Claim
21 words
The equipment as set forth in claim 3 wherein a plurality of said modules each comprise a single mass flow controller.
References Cited (Backward Citations)
US4209357A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-09-02 | 1989-03-04 | 1989-09-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-09-02 | 1993-03-04 | 1993-09-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-09-02 | 1997-03-04 | 1997-09-03 | $7700.00 | Window Closed / Lapsed |