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US4537759A
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Production of elemental silicon from impure silane feed
Assignee: Eagle Picher Industries Inc
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Filing: 1983-06-27
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Granted: 1985-08-27
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Expires: 2003-06-27
Abstract
Abstract Elemental silicon is produced by a process and apparatus wherein relatively impure silane (SiH 4 ) is purified in the gaseous state, while mixed with an inert carrier gas, to a content of electronically active impurities which is no higher than that of "electronic grade" silicon. The silane so purified is then thermally decomposed to form elemental silicon of electronic grade purity, without need for further purification of the elemental silicon itself. The silane purification is carried out by injecting the impure silane gas as a series of timed, spaced pulses into a carrier gas stream which transports the silane pulses to a gas chromatographic column, through which the pulses flow in sequence. The column has a porous polymer or a molecular sieve packing which is specially preconditioned to achieve high resolution separation of the components of the feed. The components of each pulse are differentially retarded by this packing so that they move through the column at different rates, as a result of which they exit at different but precisely spaced time intervals in relation to pulse input time. The emergence from the column of the silane "peak" or portion of the respective pulse is detected individually or is timed from the pulse input. When detected or timed, the eluent silane peak and admixed carrier gas are valved to a receiver separately from the other components, which exit before and after that peak. The silane gas fraction of the peak is then thermally decomposed, to form elemental silicon which is of electronic purity, or it may be collected and pressurized before thermal decomposition. The admixed carrier gas is not decomposed, remains a gas, and thereby is separated from the silicon. Depending on the extent to which the gas purification is carried, the product silicon may have a measured resistivity of about 1500 ohms cm or better, and can be used in fabrication of solar cells or semiconductor device without further purification.
Inventors
- 👤 Joe M. Walker
- 👤 Thomas M. Potts
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 12:55
CPC Classifications
B; B01; B01D; B01D53/00; B01D53/02; B01D53/025; C; C01; C01B; C01B33/00; C01B33/02; C01B33/021; C01B33/027; C01B33/029; C01B33/04; C01B33/046
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
281 words
In the production of elemental silicon by decomposition of silane, the improvement comprising, providing a gas chromatograph column having a packing selected from the group consisting of porous polymer and molecular sieve column packing materials and which differentially retards the flow through it of silane gas in comparison to the flow of undesirable impurities contained in said gas, preconditioning said packing by heating the column and packing therein for a period of at least one hour at a temperature about 10°-30° C. below the maximum operating temperature of the packing, then flowing a stream of silane gas over the packing so heated for a period of at least about one-half hour, the column so conditioned providing substantially better separation of silane from impurities than a corresponding column which is not so preconditioned, providing a silane gas feed containing undesirable impurities of the electronically active type, injecting said feed as a series of regularly spaced pulses into a stream of an inert carrier gas, passing the resulting stream through said column, the packing therein differentially retarding the silane gas component of each respective pulse so that it elutes from the column as a silane peak at a different time than the said impurities, operating a valve to direct the silane peak of each respective pulse to a separate outlet line from the impurities, said valve being opened only during elution of the silane peak, for so brief a period that the purity of the valved silane and admixed carrier gas is no less than that of electronic grade silicon, and decomposing the thus separated silane, in the presence of the carrier gas, to produce elemental silicon of at least electronic grade purity.
Claim 2
Dependent Claim
281 words
In the production of elemental silicon by decomposition of silane, the improvement comprising, providing a gas chromatograph column having a packing selected from the group consisting of porous polymer and molecular sieve column packing materials and which differentially retards the flow through it of silane gas in comparison to the flow of undesirable impurities contained in said gas, preconditioning said packing by heating the column and packing therein for a period of at least one hour at a temperature about 10°-30° C. below the maximum operating temperature of the packing, then flowing a stream of silane gas over the packing so heated for a period of at least about one-half hour, the column so conditioned providing substantially better separation of silane from impurities than a corresponding column which is not so preconditioned, providing a silane gas feed containing undesirable impurities of the electronically active type, injecting said feed as a series of regularly spaced pulses into a stream of an inert carrier gas, passing the resulting stream through said column, the packing therein differentially retarding the silane gas component of each respective pulse so that it elutes from the column as a silane peak at a different time than the said impurities, operating a valve to direct the silane peak of each respective pulse to a separate outlet line from the impurities, said valve being opened only during elution of the silane peak, for so brief a period that the purity of the valved silane and admixed carrier gas is no less than that of electronic grade silicon, and decomposing the thus separated silane, in the presence of the carrier gas, to produce elemental silicon of at least electronic grade purity.
Claim 3
Dependent Claim
12 words
The process of claim 1 wherein the packing is a porous polymer.
Claim 4
Dependent Claim
22 words
The process of claim 1 wherein the column is operated at a temperature in the range of about 40° to 90° C.
Claim 5
Dependent Claim
47 words
The process of claim 1 wherein the separated silane and admixed carrier gas contain no more than the following impurities: ______________________________________
Total Parts Per
Purity Billion Atomic
______________________________________
Group III elements
0.3
Group V elements
1.5
Heavy metals 0.1
Carbon 300
Oxygen 50
All others 0.001
______________________________________
Claim 6
Dependent Claim
34 words
The process of claim 1 wherein the silane feed contains impurities of the group AsX 3 , BX 3 , SiHX 3 , SiH 3 X, and PX 3 where X is a halogen.
Claim 7
Dependent Claim
30 words
The process of claim 1 wherein the silane feed contains one or more gaseous compounds of the group AsH 3 , B 2 H 6 , and PH 3 .
Claim 8
Dependent Claim
66 words
The process of claim 1 wherein the carrier gas flows continuously through the column and wherein the silane gas is admitted to the carrier gas stream as square wave pulses separated from start to start by an interval such that trailing impurities, eluted after the silane peak of a first pulse, are eluted at substantially the same time as the leading impurities of a second pulse.
Claim 9
Dependent Claim
19 words
The process of claim 1 wherein said valve is open only for a central portion of the silane peak.
Claim 10
Dependent Claim
15 words
The process of claim 1 wherein no step of purifying said elemental silicon is present.
Claim 11
Dependent Claim
290 words
In the production of elemental silicon by decomposition of silane, the improvement comprising, providing a silane gas feed containing undesirable impurities, providing a gas chromatograph column having a packing selected from the group consisting of porous polymer and molecular sieve column packing materials and which differentially retards the flow through it of the silane gas in said gas feed, preconditioning said packing by heating the column and packing therein for a period of at least one hour at a temperature about 10°-30° C. below the maximum operating temperature of the packing, then flowing a stream of silane gas over the packing so heated for a period of at least about one-half hour, the column so conditioned providing substantially better separation of silane from impurities than a corresponding column which is not so preconditioned, injecting said feed as a series of regularly spaced pulses into a stream of an inert carrier gas, passing the resulting stream through said column so that the silane gas component of each respective pulse elutes from the column at a different time than the said impurities, impurities contained in one pulse being eluted at essentially the same time as impurities from an immediately preceding pulse or an immediately following pulse, operating a valve during elution of the silane gas component of each respective pulse to direct the silane gas component of the respective pulse to a separate outlet line from the impurities; said valve being opened during elution of the silane component to direct said silane component and admixed carrier gas only to said outlet line, and decomposing the thus separated purified silane, to produce elemental silicon, without other purification, said elemental silicon having a purity corresponding to a resistivity of at least 1.0 ohm cms.
Claim 12
Dependent Claim
290 words
In the production of elemental silicon by decomposition of silane, the improvement comprising, providing a silane gas feed containing undesirable impurities, providing a gas chromatograph column having a packing selected from the group consisting of porous polymer and molecular sieve column packing materials and which differentially retards the flow through it of the silane gas in said gas feed, preconditioning said packing by heating the column and packing therein for a period of at least one hour at a temperature about 10°-30° C. below the maximum operating temperature of the packing, then flowing a stream of silane gas over the packing so heated for a period of at least about one-half hour, the column so conditioned providing substantially better separation of silane from impurities than a corresponding column which is not so preconditioned, injecting said feed as a series of regularly spaced pulses into a stream of an inert carrier gas, passing the resulting stream through said column so that the silane gas component of each respective pulse elutes from the column at a different time than the said impurities, impurities contained in one pulse being eluted at essentially the same time as impurities from an immediately preceding pulse or an immediately following pulse, operating a valve during elution of the silane gas component of each respective pulse to direct the silane gas component of the respective pulse to a separate outlet line from the impurities; said valve being opened during elution of the silane component to direct said silane component and admixed carrier gas only to said outlet line, and decomposing the thus separated purified silane, to produce elemental silicon, without other purification, said elemental silicon having a purity corresponding to a resistivity of at least 1.0 ohm cms.
Claim 13
Dependent Claim
226 words
In the production of elemental silicon by decomposition of silane, the improvement comprising, providing a gas chromatograph column having a styrene-divinyl benzene porous polymer packing, preconditioning said packing by heating it in the column for a period of at least one hour at a temperature about 10°-30° C. below the maximum operating temperature of the packing, then flowing a stream of silane gas over the packing so heated for a period of at least about one-half hour, providing a silane gas feed containing undesirable impurities of the electronically active type, injecting said feed as a series of regularly spaced pulses into a stream of an inert carrier gas, passing the resulting stream through said column, the packing therein differentially retarding the silane gas component of each respective pulse so that it elutes from the column as a silane peak at a different time than the said impurities, operating a valve to direct the silane peak of each respective pulse to a separate outlet line from the impurities, said valve being opened only during elution of the silane peak, for so brief a period that the purity of the valved silane and admixed carrier gas is no less than that of electronic grade silicon, and decomposing the thus separated silane, in the presence of the carrier gas, to produce elemental silicon of at least electronic grade purity.
Claim 14
Dependent Claim
226 words
In the production of elemental silicon by decomposition of silane, the improvement comprising, providing a gas chromatograph column having a styrene-divinyl benzene porous polymer packing, preconditioning said packing by heating it in the column for a period of at least one hour at a temperature about 10°-30° C. below the maximum operating temperature of the packing, then flowing a stream of silane gas over the packing so heated for a period of at least about one-half hour, providing a silane gas feed containing undesirable impurities of the electronically active type, injecting said feed as a series of regularly spaced pulses into a stream of an inert carrier gas, passing the resulting stream through said column, the packing therein differentially retarding the silane gas component of each respective pulse so that it elutes from the column as a silane peak at a different time than the said impurities, operating a valve to direct the silane peak of each respective pulse to a separate outlet line from the impurities, said valve being opened only during elution of the silane peak, for so brief a period that the purity of the valved silane and admixed carrier gas is no less than that of electronic grade silicon, and decomposing the thus separated silane, in the presence of the carrier gas, to produce elemental silicon of at least electronic grade purity.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-08-26 | 1989-02-25 | 1989-08-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-08-26 | 1993-02-25 | 1993-08-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-08-26 | 1997-02-25 | 1997-08-27 | $7700.00 | Window Closed / Lapsed |