Patent US4537244A successfully refreshed from Google Patents.
US4537244A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for optimum conductive heat transfer with a thin flexible workpiece
Assignee: Varian Semiconductor Equipment Associates Inc
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Filing: 1984-03-02
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Granted: 1985-08-27
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Expires: 2004-03-02
Abstract
Abstract Conductive heat transfer between a thin deformable workpiece and heat sink is optimized by imposing a load over the workpiece resulting in a uniform contact pressure distribution in said workpiece which is also the maximum stress consistent with the elastic properties of the workpiece. The surface of the heat sink is given a contour determined by these criteria for a thin circular disk clamped thereto.
Inventors
- 👤 Scott C. Holden
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 07:00
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; H01; H01J; H01J37/00; H01J37/02; H01J37/20; H01J37/30; H01J37/317
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
94 words
A method for optimizing transfer of thermal energy with a thin, flexible workpiece in vacuum comprising: establishing the geometry and material of the thin, flexible workpiece; and selecting a contour of a nonplanar, nonspherical contact surface, based on the geometry and material of said workpiece, for transfer of thermal energy to or from said workpiece when said workpiece is clamped thereto at its periphery, said contour being selected to impose uniformity of contact pressure over the surface area of said workpiece and to simultaneously stress said workpiece to approach the limiting elastic stress thereof.
Claim 2
Independent Claim
94 words
A method for optimizing transfer of thermal energy with a thin, flexible workpiece in vacuum comprising: establishing the geometry and material of the thin, flexible workpiece; and selecting a contour of a nonplanar, nonspherical contact surface, based on the geometry and material of said workpiece, for transfer of thermal energy to or from said workpiece when said workpiece is clamped thereto at its periphery, said contour being selected to impose uniformity of contact pressure over the surface area of said workpiece and to simultaneously stress said workpiece to approach the limiting elastic stress thereof.
Claim 3
Dependent Claim
65 words
The method as defined in claim 1 wherein said workpiece is a disc of radius r o and wherein said step of selecting includes selecting the contour to have the general mathematical form ##EQU7## where α and β are constants, y max is the maximum deflection of the disc and y is the elevation of said contour from the radial plane at the coordinate r.
Claim 4
Independent Claim
108 words
A method for transfer of thermal energy with a thin, flexible workpiece in vacuum comprising: providing a thermally conductive member having a nonplanar, nonspherical contact surface for transfer of thermal energy to or from said workpiece, including the step of selecting the contour of said contact surface to impose uniformity of contact pressure over the surface area of said workpiece for peripheral clamping and to simultaneously stress said workpiece to approach the limiting elastic stress thereof; and clamping a peripheral portion of said workpiece to said contact surface such that said workpiece conforms to said contact surface with uniform contact pressure over the surface area of said workpiece.
Claim 5
Independent Claim
108 words
A method for transfer of thermal energy with a thin, flexible workpiece in vacuum comprising: providing a thermally conductive member having a nonplanar, nonspherical contact surface for transfer of thermal energy to or from said workpiece, including the step of selecting the contour of said contact surface to impose uniformity of contact pressure over the surface area of said workpiece for peripheral clamping and to simultaneously stress said workpiece to approach the limiting elastic stress thereof; and clamping a peripheral portion of said workpiece to said contact surface such that said workpiece conforms to said contact surface with uniform contact pressure over the surface area of said workpiece.
Claim 6
Dependent Claim
83 words
The method as defined in claim 3 wherein said workpiece is a disc of radius r o , wherein said step of clamping includes clamping a narrow continuous region at the periphery of said disc and wherein said step of selecting includes selecting the contour to have the general mathematical form ##EQU8## where α and β are constants, y max is the maximum deflection of the disc and y is the elevation of said contour from the radial plane at the coordinate r.
Claim 7
Dependent Claim
40 words
The method as defined in claim 3 wherein said step of clamping said workpiece to said contact surface includes stressing said workpiece to produce a tensile stress component at the outer surface of said workpiece which approaches the elastic limit.
Claim 8
Independent Claim
70 words
The method of optimizing transfer of heat by conduction between a thin deformable workpiece and a heat sink surface comprising (a) clamping a peripheral portion of said workpiece to said heat sink surface, (b) deforming said workpiece against said heat sink surface, (c) maintaining a uniformly distributed contact pressure between said workpiece and said heat sink surface, and simultaneously (d) stressing said workpiece to approach the limiting elastic stress thereof.
Claim 9
Independent Claim
70 words
The method of optimizing transfer of heat by conduction between a thin deformable workpiece and a heat sink surface comprising (a) clamping a peripheral portion of said workpiece to said heat sink surface, (b) deforming said workpiece against said heat sink surface, (c) maintaining a uniformly distributed contact pressure between said workpiece and said heat sink surface, and simultaneously (d) stressing said workpiece to approach the limiting elastic stress thereof.
Claim 10
Dependent Claim
86 words
The method as defined in claim 6 wherein said workpiece is a disc of radius r o , wherein said step of clamping includes clamping a narrow continuous region at the periphery of said disc, and further including the step of providing said heat sink surface with a contour having the general mathematical form ##EQU9## where α and β are constants, y max is the maximum deflection of the disc and y is the elevation of said contour from the radial plane at the coordinate r.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-08-26 | 1989-02-25 | 1989-08-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-08-26 | 1993-02-25 | 1993-08-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-08-26 | 1997-02-25 | 1997-08-27 | $7700.00 | Window Closed / Lapsed |