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US4532424A Expired / Lapsed US ⏱️ 0.0 years remaining

Pyroelectric thermal detector array

Assignee: Boeing North American Inc
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Filing: 1983-04-25
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Granted: 1985-07-30
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Expires: 2003-04-25
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Abstract

Abstract A thermal detector array includes a substrate layer with a pyroelectric layer attached to the substrate, a plurality of detector regions being defined in the pyroelectric layer by openings through the layer. An array of cavities in the substrate surface separates the detector regions from the surface. First and second electrodes are placed on opposite sides of each detector region or on a single side in a coplanar embodiment. The array is joined to a signal processing device by means of corresponding metallic contacts on the pyroelectric layer and the processing device.

Inventors

  • 👤 Derek T. Cheung

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 20:41
CPC Classifications
H; H10; H10N; H10N19/00; G; G01; G01J; G01J5/00; G01J5/10; G01J5/34; H10N15/00; H10N15/10

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 65 words
A thermal detector array, comprising: a substrate layer; a pyroelectric layer supported by a surface of said substrate; a plurality of detector regions in said pyroelectric layer, each region defined by a plurality of openings which extend through said pyroelectric layer and circumscribe said region; and a plurality of cavities in said substrate surface, each cavity separating one of said detector regions from said surface.
Claim 2
Dependent Claim 65 words
A thermal detector array, comprising: a substrate layer; a pyroelectric layer supported by a surface of said substrate; a plurality of detector regions in said pyroelectric layer, each region defined by a plurality of openings which extend through said pyroelectric layer and circumscribe said region; and a plurality of cavities in said substrate surface, each cavity separating one of said detector regions from said surface.
Claim 3
Dependent Claim 37 words
The detector array of claim 1, further comprising: a first electrode disposed on a first side of each detector region adjacent said substrate surface; and a second electrode disposed on a second side of each detector region.
Claim 4
Dependent Claim 37 words
The detector array of claim 1, further comprising: a first electrode disposed on a first side of each detector region opposite said substrate surface; and a second electrode disposed on said first side of each detector region.
Claim 5
Dependent Claim 15 words
The detector array of claim 1, wherein said pyroelectric layer further comprises a ferroelectric crystal.
Claim 6
Dependent Claim 16 words
The detector array of claim 1, wherein said pyroelectric layer further comprises a pyroelectric organic polymer.
Claim 7
Dependent Claim 14 words
The detector array of claim 1, wherein said substrate further comprises a silicon substrate.
Claim 8
Dependent Claim 109 words
A thermal detector array, comprising: a substrate layer; a pyroelectric layer supported by a surface of said substrate; a plurality of detector regions in said pyroelectric layer, each region defined by a plurality of openings which extend through said pyroelectric layer and circumscribe said region; a plurality of first electrodes, one of said first electrodes being disposed on a first side of each detector region adjacent said substrate surface; a plurality of second electrodes, one of said second electrodes being disposed on a second side of each detector region; and a plurality of cavities in said substrate surface, each cavity separating one of said detector regions from said surface.
Claim 9
Dependent Claim 109 words
A thermal detector array, comprising: a substrate layer; a pyroelectric layer supported by a surface of said substrate; a plurality of detector regions in said pyroelectric layer, each region defined by a plurality of openings which extend through said pyroelectric layer and circumscribe said region; a plurality of first electrodes, one of said first electrodes being disposed on a first side of each detector region adjacent said substrate surface; a plurality of second electrodes, one of said second electrodes being disposed on a second side of each detector region; and a plurality of cavities in said substrate surface, each cavity separating one of said detector regions from said surface.
Claim 10
Dependent Claim 34 words
The detector array of claim 7, further comprising: a semiconductor signal processing device affixed to said pyroelectric layer and in electrical contact with each of said first electrodes and each of said second electrodes.
Claim 11
Dependent Claim 50 words
The detector array of claim 8, further comprising: a plurality of electrically conductive contacts, each of said contacts being connected to one of said second electrodes and to said signal processing device for coupling said second electrode to said signal processing device and spacing said device from said detector regions.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1988-07-29 1989-01-28 1989-07-30 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1992-07-29 1993-01-28 1993-07-30 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1996-07-29 1997-01-28 1997-07-30 $7700.00 Window Closed / Lapsed

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