US4528332A
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Epoxy compounds, process for the preparation thereof and resist materials comprising thereof
Assignee: Asahi Kasei Corp
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Filing: 1984-01-03
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Granted: 1985-07-09
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Expires: 2004-01-03
Abstract
Abstract Novel copolymers having a weight average molecular weight of 500 to 5,000,000 and comprising 1 to 99% by weight of a recurring unit represented by the formula (I), 1 to 99% by weight of a recurring unit represented by the formula (II) and 0 to 98% by weight of a recurring unit represented by the formula (III): ##STR1## wherein R 1 is a hydrogen atom or a methyl group; X is a hydrogen atom, a methyl group or a phenyl group; Y is a hydrogen atom, a halogen atom, a methyl group, a phenyl group or a cyano group; and Z is a phenyl group, a phenyl group substituted by at least one alkyl group having 1 to 8 carbon atoms, a polycyclic aromatic hydrocarbon group having 10 to 20 carbon atoms, a cyano group, --COOR 2 (in which R 2 is an alkyl group having 1 to 20 carbon atoms or an aromatic hydrocarbon group having 6 to 14 carbon atoms), --COR 3 (in which R 3 is an alkyl group having 1 to 12 carbon atoms or an aromatic hydrocarbon group having 6 to 14 carbon atoms), a nitro group, a pyridyl group, ##STR2## (in which R 3 has the same meaning as defined above), or a halogen atom. The above-mentioned copolymers are useful as resist materials which are sensitive to high-energy radiations.
Inventors
- 👤 Hideo Ai
- 👤 Akihiko Ikeda
- 👤 Yoshio Matsuoka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:49
CPC Classifications
C; C08; C08F; C08F8/00; C08F8/08; C08F2800/00; C08F2800/10; C08F2800/20; Y; Y10; Y10S; Y10S430/00; Y10S430/143; Y10S430/167
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
211 words
A copolymer having a weight average molecular weight of 500 to 5,000,000 and comprising 2 to 60% by weight of a recurring unit represented by the formula (I), 10 to 70% by weight of a recurring unit represented by the formula (II) and 10 to 90% by weight of a recurring unit represented by the formula (III): ##STR8## wherein R 1 is a hydrogen atom or a methyl group; X is a hydrogen atom, a methyl group or a phenyl group; Y is a hydrogen atom, a halogen atom, a methyl group, a phenyl group or a cyano group; and Z is a phenyl group, a phenyl group substituted by at least one alkyl group having 1 to 8 carbon atoms, a polycyclic aromatic hydrocarbon group having 10 to 20 carbon atoms, a cyano group, --COOR 2 (in which R 2 is an alkyl group having 1 to 20 carbon atoms or an aromatic hydrocarbon group having 6 to 14 carbon atoms), --COR 3 (in which R 3 is an alkyl group having 1 to 12 carbon atoms or an aromatic hydrocarbon group having 6 to 14 carbon atoms), a nitro group, a pyridyl group, ##STR9## (in which R 3 has the same meaning as defined above), or a halogen atom.
Claim 2
Dependent Claim
211 words
A copolymer having a weight average molecular weight of 500 to 5,000,000 and comprising 2 to 60% by weight of a recurring unit represented by the formula (I), 10 to 70% by weight of a recurring unit represented by the formula (II) and 10 to 90% by weight of a recurring unit represented by the formula (III): ##STR8## wherein R 1 is a hydrogen atom or a methyl group; X is a hydrogen atom, a methyl group or a phenyl group; Y is a hydrogen atom, a halogen atom, a methyl group, a phenyl group or a cyano group; and Z is a phenyl group, a phenyl group substituted by at least one alkyl group having 1 to 8 carbon atoms, a polycyclic aromatic hydrocarbon group having 10 to 20 carbon atoms, a cyano group, --COOR 2 (in which R 2 is an alkyl group having 1 to 20 carbon atoms or an aromatic hydrocarbon group having 6 to 14 carbon atoms), --COR 3 (in which R 3 is an alkyl group having 1 to 12 carbon atoms or an aromatic hydrocarbon group having 6 to 14 carbon atoms), a nitro group, a pyridyl group, ##STR9## (in which R 3 has the same meaning as defined above), or a halogen atom.
Claim 3
Dependent Claim
13 words
The copolymer according to claim 1, wherein R 1 is a hydrogen atom.
Claim 4
Dependent Claim
44 words
The copolymer according to claim 1, wherein the position of the vinyl group in relation to the main chain in the formula (I) and the position of the epoxy group in relation to the main chain in the formula (II) are meta-positions or parapositions.
Claim 5
Dependent Claim
42 words
The copolymer according to claim 3, wherein the position of the vinyl group in relation to the main chain in the formula (I) and the position of the epoxy group in relation to the main chain in the formula (II) are para-positions.
Claim 6
Dependent Claim
12 words
The copolymer according to claim 2, wherein X is a hydrogen atom.
Claim 7
Dependent Claim
12 words
The copolymer according to claim 2, wherein X is a phenyl group.
Claim 8
Dependent Claim
12 words
The copolymer according to claim 2, wherein Y is a hydrogen atom.
Claim 9
Dependent Claim
12 words
The copolymer according to claim 2, wherein Y is a phenyl group.
Claim 10
Dependent Claim
29 words
The copolymer according to claim 2, wherein Z is a phenyl group or a phenyl group substituted by at least one alkyl group having 1 to 8 carbon atoms.
Claim 11
Dependent Claim
14 words
The copolymer according to claim 2, wherein Z is a polycyclic aromatic hydrocarbon group.
Claim 12
Dependent Claim
22 words
The copolymer according to claim 2, wherein each of X and Y is a hydrogen atom and Z is a phenyl group.
Claim 13
Dependent Claim
23 words
The copolymer according to claim 2, wherein X is a phenyl group, Y is a hydrogen atom, and Z is a phenyl group.
Claim 14
Dependent Claim
22 words
The copolymer according to claim 2, wherein X is a hydrogen atom and each of Y and Z is a phenyl group.
Claim 15
Dependent Claim
22 words
The copolymer according to claim 2, wherein each of X and Y is a hydrogen atom and Z is a naphthyl group.
Claim 16
Dependent Claim
23 words
The copolymer according to claim 2, wherein each of X and Y is a hydrogen atom and Z is an ethylsubstituted phenyl group.
Claim 17
Dependent Claim
39 words
The copolymer according to claim 1, wherein the proportions of the recurring units represented by the formulae (I), (II) and (III) are 10 to 50% by weight, 20 to 60% by weight and 30 to 70% by weight, respectively.
Claim 18
Dependent Claim
14 words
The copolymer according to claim 1, wherein the molecular weight is 1,000 to 1,000,000.
Claim 19
Dependent Claim
14 words
The copolymer according to claim 17, wherein the molecular weight is 3,000 to 300,000.
Claim 20
Dependent Claim
227 words
A resist material which can be cured upon irradiation with a high-energy radiation and comprises a copolymer having a weight average molecular weight of 500 to 5,000,000 and comprising 1 to 99% by weight of a recurring unit represented by the structural formula (I), 1 to 99% by weight of a recurring unit represented by the formula (II) and 0 to 98% by weight of a recurring unit represented by the formula (III): ##STR10## wherein R 1 is a hydrogen atom or a methyl group; X is a hydrogen atom, a methyl group or a pheny group; Y is a hydrogen atom, a halogen atom, a methyl group, a phenyl group or a cyano group; and Z is a phenyl group, a phenyl group substituted by at least one alkyl group having 1 to 8 carbon atoms, a polycyclic aromatic hydrocarbon group having 10 to 20 carbon atoms, a cyano group, --COOR 2 (in which R 2 is an alkyl group having 1 to 20 carbon atoms or an aromatic hydrocarbon group having 6 to 14 carbon atoms), --COR 3 (in which R 3 is an alkyl group having 1 to 12 carbon atoms or an aromatic hydrocarbon group having 6 to 14 carbon atoms), a nitro group, a pyridyl group, ##STR11## (in which R 3 has the same meaning as defined above), or a halogen atom.
Claim 21
Dependent Claim
227 words
A resist material which can be cured upon irradiation with a high-energy radiation and comprises a copolymer having a weight average molecular weight of 500 to 5,000,000 and comprising 1 to 99% by weight of a recurring unit represented by the structural formula (I), 1 to 99% by weight of a recurring unit represented by the formula (II) and 0 to 98% by weight of a recurring unit represented by the formula (III): ##STR10## wherein R 1 is a hydrogen atom or a methyl group; X is a hydrogen atom, a methyl group or a pheny group; Y is a hydrogen atom, a halogen atom, a methyl group, a phenyl group or a cyano group; and Z is a phenyl group, a phenyl group substituted by at least one alkyl group having 1 to 8 carbon atoms, a polycyclic aromatic hydrocarbon group having 10 to 20 carbon atoms, a cyano group, --COOR 2 (in which R 2 is an alkyl group having 1 to 20 carbon atoms or an aromatic hydrocarbon group having 6 to 14 carbon atoms), --COR 3 (in which R 3 is an alkyl group having 1 to 12 carbon atoms or an aromatic hydrocarbon group having 6 to 14 carbon atoms), a nitro group, a pyridyl group, ##STR11## (in which R 3 has the same meaning as defined above), or a halogen atom.
Claim 22
Dependent Claim
18 words
The resist material according to claim 19, wherein the high-energy radiation is electron beam, ultraviolet ray or X-ray.
References Cited (Backward Citations)
SU317669A1
Cited
JPS56149012A
Cited
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