Automatic repetitive registration and imagewise exposure of sheet substrates

Claim 2

A substrate exposure apparatus comprising: a framework: means for registering a photomask with respect to substrate with a photosensitive layer; optional means for displacing the registered substrate and photomask with respect to the framework to an exposure position; means for exposing the photosensitive substrate; a laminator means for laminating the photomask to the surface of the substrate with the photosensitive layer optionally as the substrate and the photomask are displaced to the exposure position including means for applying pressure to the substrate with a photosensitive layer and the photomask to allow contact through a liquid layer; means for applying relative movement between (a) the substrate with the photosensitive layer and the photomask and (b) means for applying pressure; and an applicator for applying a liquid positioned adjacent at least one of the surfaces of the photosensitive layer and the photomask whereby an excess of liquid can be obtained at a nip where the photosensitive layer and photomask contact one another through the liquid.

Claim 3

The substrate exposure apparatus of claim 1 wherein both the substrate and the photomask have a registration aperture therein; and wherein the registering means comprises a front bar having a registration pin thereon, the front bar being displaceable with respect to the substrate and to the photomask to dispose the registration pin through the registration apertures in both the substrate and the photomask thereby to register the same.

Claim 4

The substrate exposure apparatus of claim 1 wherein both the substrate and the photomask or photomask carrier assembly have an aperture therein; and wherein the registering means comprises: a backbar having a locating pin therein, the backbar being adapted to receive the photomask or photomask carrier assembly in a predetermined position thereon; and, a front bar having a locating opening therein and a registration pin thereon, the front bar being displaceable with respect to the substrate, the photomask or photomask carrier assembly and the backbar to simultaneously dispose the locating pin on the backbar into the locating opening in the front bar and the registration pin on the front bar through the apertures in the substrate and the photomask or photomask carrier assembly thereby to register the same.

Claim 5

The substrate exposure apparatus of claim 1 further comprising: clamp means for grasping the registered substrate and photomask to maintain them in register as they are displaced to the exposure position.

Claim 6

The substrate exposure apparatus of claim 2 further comprising: clamp means from grasping the registered substrate and photomask to maintain them in a register as they are displaced to the exposure position.

Claim 7

The substrate exposure apparatus of claim 3 further comprising: clamp means for grasping the registered substrate and photomask to maintain them in register as they are displaced to the exposure position.

Claim 8

The substrate exposure apparatus of claim 4 wherein the clamp means comprises: a clamp bar mountable on and movable with respect to the backbar; and, an actuator connected to the clamp bar for moving the same with respect to the backbar to exert a grasping force on the substrate and the photomask when the same are registered to grasp the substrate and photomask between the clamp bar and the backbar.

Claim 9

The substrate exposure apparatus of claim 1 wherein the applicator comprises a spray tube, the tube being arranged to direct a liquid spray toward the surface of the substrate onto which the photomask is laminated.

Claim 10

The substrate exposure apparatus of claim 1 further comprising: an exposure unit mounted to the framework; and wherein the framework is formed of a hollow member having an opening communicating with the interior of the exposure unit, the hollow member being adapted to conduct a cooling medium into a heat exchange relationship with the exposure unit thereby to cool the same.

Claim 11

The substrate exposure apparatus of claim 8 further comprising: an exposure unit mounted to the framework; and wherein the framework is formed of a hollow member having an opening communicating with the interior of the exposure unit, the hollow member being adapted to conduct a cooling medium into a heat exchange relationship with the exposure unit thereby to cool the same.

Claim 12

The substrate exposure apparatus of claim 2 further comprising: a substrate conveyor for carrying unexposed substrates; and a substrate transfer arrangement disposed beneath the registering means, the transfer arrangement having a substrate lifting arm and a substrate lowering arm, each arm having a carriage thereon, the transfer arrangement being movable with respect to the framework from a substrate receiving position in which the lifting arm is aligned with the conveyor and the lowering arm is disposed directly beneath the registering means to a substrate deposit position in which the lifting arm is disposed directly beneath the registering means, the transfer arrangement, while in the substrate receiving position, being adapted to accept an unexposed substrate from the conveyor onto the carriage on the lifting arm and to accept an exposed substrate onto the carriage on the lowering arm, and being further adapted upon movement with respect to the framework to the substrate deposit position to deposit the exposed substrate onto a predetermined location and to lift the unexposed substrate into proximity to the registering means.

Claim 13

The substrate exposure apparatus of claims 8 further comprising: a substrate conveyor for carrying unexposed substrates; and a substrate transfer arrangement disposed beneath the registering means, the transfer arrangement having a substrate lifting arm and a substrate lowering arm, each arm having a carriage thereon, the transfer arrangement being movable with respect to the framework from a substrate receiving position in which the lifting arm is aligned with the conveyor and the lowering arm is disposed directly beneath the registering means to a substrate deposit position in which the lifting arm is disposed directly beneath the registering means, the transfer arrangement, while in the substrate receiving position, being adapted to accept an unexposed substrate from the conveyor onto the arriage on the lifting arm and to accept an exposed substrate onto the carriage on the lowering arm, and being further adapted upon movement with respect to the framework to the substrate deposit position to deposit the exposed substrate onto a predetermined location and to lift the unexposed substrate into proximity to the registering means.

Claim 14

The substrate exposure apparatus of claims 9 further comprising: a substrate conveyor for carrying unexposed substrates; and a substrate transfer arrangement disposed beneath the registering means, the transfer arrangement having a substrate lifting arm and a substrate lowering arm, each arm having a carriage thereon, the transfer arrangement being movable with respect to the framework from a substrate receiving position in which the lifting arm is aligned with the conveyor and the lowering arm is disposed directly beneath the registering means to a substrate deposit position in which the lifting arm is disposed directly beneath the registering means, the transfer arrangement, while in the substrate receiving position, being adapted to accept an unexposed substrate from the conveyor onto the arriage on the lifting arm and to accept an exposed substrate onto the carriage on the lowering arm, and being further adapted upon movement with respect to the framework to the substrate deposit position to deposit the exposed substrate onto a predetermined location and to lift the unexposed substrate into proximity to the registering means.

Claim 15

A substrate exposure apparatus comprising: a framework; a registration arrangement for registering each surface of a substantially upright substrate with a photomask while the substrate is in a registration position; a substrate displacement arrangement for displacing the registered substrate and photomasks substantially vertically with respect to the framework from the registration position to an exposure position; a clamp arrangement for grasping the registered substrate and photomasks to maintain the same in register as they are displaced to the exposure position; an exposure unit operative to expose the clamped and registered substrate and photomasks to actinic radiation; a laminating arrangement for laminating the photomasks to each surface of the substrate as the registered substrate and photomasks move to the exposure position whereby substantially no movement of the substrate relative to the photomasks occurs; and an applicator for applying a liquid onto each surface of the substrate as the photomasks are laminated thereto.

Claim 16

A substrate exposure apparatus comprising: a framework; a registration arrangement for registering each surface of a substantially upright substrate with a photomask while the substrate is in a registration position; a substrate displacement arrangement for displacing the registered substrate and photomasks substantially vertically with respect to the framework from the registration position to an exposure position; a clamp arrangement for grasping the registered substrate and photomasks to maintain the same in register as they are displaced to the exposure position; an exposure unit operative to expose the clamped and registered substrate and photomasks to actinic radiation; a laminating arrangement for laminating the photomasks to each surface of the substrate as the registered substrate and photomasks move to the exposure position whereby substantially no movement of the substrate relative to the photomasks occurs; and an applicator for applying a liquid onto each surface of the substrate as the photomasks are laminated thereto.

Claim 17

The substrate exposure apparatus of claim 14 wherein both the substrate and the photomasks have a registration aperture therein; and wherein the registering means comprises a front bar having a registration pin thereon, the front bar being displaceable with respect to the substrate and to the photomasks to dispose the pin through the apertures in both the substrate and the photomasks thereby to register the same.

Claim 18

The substrate exposure apparatus of claim 14 wherein both the substrate and the photomasks or photomask carrier assembly have an aperture therein; and wherein the registering means comprises: a backbar having a locating pin therein, the backbar being adapted to receive the photomasks or photomask carrier assembly in a predetermined position thereon; and, a front bar having a locating opening and a registration pin thereon, the front bar being displaceable with respect to the substrate, the photomasks or photomask carrier assembly, and the backbar to simultaneously dispose the locating pin on the backbar into the locating opening in the front bar and the registration pin on the front bar through the apertures in the substrate and the photomasks or photomask carrier assembly thereby to register the same.

Claim 19

The substrate exposure apparatus of claim 15 wherein the clamp arrangement comprises: a clamp bar having a locating opening therein, the clamp bar being mountable on the backbar when the locating pin on the backbar is received through the locating opening in the clamp bar; and, an actuator for exerting a grasping force on the substrate and the photomasks when the same are registered to grasp the substrate and photomasks between the clamp bar and the backbar.

Claim 20

The substrate exposure apparatus of claim 16 wherein the clamp arrangement comprises: a clamp bar mountable on the locating pin and movable with respect to the backbar; a clamp finger connected to the clamp bar; and an actuator connected to the clamp finger to displace the same with respect to the backbar to move the clamp bar toward the backbar to exert a grasping force on the substrate and the photomasks when the same are registered to grasp the substrate and photomasks between the clamp bar and the backbar.

Claim 21

The substrate exposure apparatus of claim 15 wherein the applicator comprises a first and a second spray tube each having an array of holes therein, each tube being arranged to direct a liquid spray toward one surface of the substrate.

Claim 22

The substrate exposure apparatus of claim 15 wherein an exposure unit is mounted to the framework and wherein the framework is formed of a hollow member having an opening communicating with the interior of the exposure unit, the hollow member being adapted to conduct a cooling medium into a heat exchange relationship with the exposure unit thereby to cool the same.

Claim 23

The substrate exposure apparatus of claim 19 wherein an exposure unit is mounted to the framework; and wherein the framework is formed of a hollow member having an opening communicating with the interior of the exposure unit, the hollow member being adapted to conduct a cooling medium into a heat exchange relationship with the exposure unit thereby to cool the same.

Claim 24

The substrate exposure apparatus of claim 15 further comprising: a substrate conveyor for carrying unexposed substrates; and a substrate transfer arrangement disposed beneath the registering means, the transfer arrangement having a substrate lifting arm and a substrate lowering arm, each arm having a carriage thereon, the transfer arrangement being movable with respect to the framework from a substrate receiving position in which the lifting arm is aligned with the conveyor and the lowering arm is disposed directly beneath the registering means to a substrate deposit position in which the lifting arm is disposed directly beneath the registering means, the transfer arrangement, while in the substrate receiving position, being adapted to accept an unexposed substrate from the conveyor onto the arriage on the lifting arm and to accept an exposed substrate onto the carriage on the lowering arm, and being further adapted upon movement with respect to the framework to the substrate deposit position to deposit the exposed substrate onto a predetermined location and to lift the unexposed substrate into proximity to the registering means.

Claim 25

The substrate exposure apparatus of claim 19 further comprising: a substrate conveyor for carrying unexposed substrates; and a substrate transfer arrangement disposed beneath the registering means, the transfer arrangement having a substrate lifting arm and a substrate lowering arm, each arm having a carriage thereon, the transfer arrangement being movable with respect to the framework from a substrate receiving position in which the lifting arm is aligned with the conveyor and the lowering arm is disposed directly beneath the registering means to a substrate deposit position in which the lifting arm is disposed directly beneath the registering means, the transfer arrangement, while in the substrate receiving position, being adapted to accept an unexposed substrate from the conveyor onto the arriage on the lifting arm and to accept an exposed substrate onto the carriage on the lowering arm, and being further adapted upon movement with respect to the framework to the substrate deposit position to deposit the exposed substrate onto a predetermined location and to lift the unexposed substrate into proximity to the registering means.

Claim 26

The substrate exposure apparatus of claim 20 further comprising: a substrate conveyor for carrying unexposed substrates; and a substrate transfer arrangement disposed beneath the registering means, the transfer arrangement having a substrate lifting arm and a substrate lowering arm, each arm having a carriage thereon, the transfer arrangement being movable with respect to the framework from a substrate receiving position in which the lifting arm is aligned with the conveyor and the lowering arm is disposed directly beneath the registering means to a substrate deposit position in which the lifting arm is disposed directly beneath the registering means, the transfer arrangement, while in the substrate receiving position, being adapted to accept an unexposed substrate from the conveyor onto the carriage on the lifting arm and to accept an exposed substrate onto the carriage on the lowering arm, and being further adapted upon movement with respect to the framework to the substrate deposit position to deposit the exposed substrate onto a predetermined location and to lift the unexposed substrate into proximity to the registering means.