Patent US4527358A successfully refreshed from Google Patents.
US4527358A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Removable polishing pad assembly
Assignee: Speedfam IPEC Corp
•
Filing: 1983-08-29
•
Granted: 1985-07-09
•
Expires: 2003-08-29
Abstract
Abstract A removable polishing pad for a polishing machine that provides a rotatable polishing platen that supports the polishing pad. The pad assembly of this invention includes a circular polishing pad that is adhesively attached to one surface of a circular carrier disc. The polishing pad has a diameter less than that of the carrier disc such that the exposed circumferential edge of the disc is equipped to provide means for removably securing the disc to the platen for rotation therewith.
Inventors
- 👤 Lawrence Day
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 23:18
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/11; B24B37/12; B24B37/16
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
218 words
A polishing pad assembly for a work piece polishing machine, comprising; (a) a polishing platen rotatable about a vertical axis through a horizontal plane, (b) a polishing pad carrier disc removably mounted upon one exposed surface of said platen, (c) a polishing pad releasably attached to one surface of said carrier disc and providing an exposed polishing face for engagement with a work piece to be polished, (d) a set of work piece holder plates freely positioned in facial abutment upon said exposed polishing face of said polishing pad, (e) a series of holding pins extending perpendicularly from said one exposed surface of said platen in a circular pattern about the periphery thereof, and a series of openings formed in a like circular pattern in said polishing pad carrier disc and into which said pins project for releasably mounting said polishing pad carrier disc onto said one exposed surface of said platen for rotation therewith through a horizontal plane, and (f) a series of gear like teeth formed on the periphery of each of said work piece holder plates for engaging said holding pins as they project through said openings formed in said polishing pad carrier disc, rotating said work piece holder plate about their vertical axis as said platen rotates about its axis through a horizontal plane.
Claim 2
Dependent Claim
218 words
A polishing pad assembly for a work piece polishing machine, comprising; (a) a polishing platen rotatable about a vertical axis through a horizontal plane, (b) a polishing pad carrier disc removably mounted upon one exposed surface of said platen, (c) a polishing pad releasably attached to one surface of said carrier disc and providing an exposed polishing face for engagement with a work piece to be polished, (d) a set of work piece holder plates freely positioned in facial abutment upon said exposed polishing face of said polishing pad, (e) a series of holding pins extending perpendicularly from said one exposed surface of said platen in a circular pattern about the periphery thereof, and a series of openings formed in a like circular pattern in said polishing pad carrier disc and into which said pins project for releasably mounting said polishing pad carrier disc onto said one exposed surface of said platen for rotation therewith through a horizontal plane, and (f) a series of gear like teeth formed on the periphery of each of said work piece holder plates for engaging said holding pins as they project through said openings formed in said polishing pad carrier disc, rotating said work piece holder plate about their vertical axis as said platen rotates about its axis through a horizontal plane.
Claim 3
Dependent Claim
39 words
A polishing pad assembly as defined by claim 1, including means between the confronting surfaces of said polishing pad carrier disc and said one exposed surface of said platen restricting facial separation therebetween during rotation through a horizontal plane.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-07-08 | 1989-01-07 | 1989-07-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-07-08 | 1993-01-07 | 1993-07-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-07-08 | 1997-01-07 | 1997-07-09 | $7700.00 | Window Closed / Lapsed |