Patent US4525523A successfully refreshed from Google Patents.
US4525523A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Negative-working photoresist coating composition
Assignee: Toshiba Corp
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Filing: 1983-08-26
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Granted: 1985-06-25
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Expires: 2003-08-26
Abstract
Abstract There is proposed a negative-working photoresist coating composition of an improved resolution, which comprises a cyclized polyisoprene having a weight-average molecular weight of 10,000 to 100,000 and a molecular weight distribution of not more than 1.9, an organic solvent of the cyclized polyisoprene, and a bisazido compound as a crosslinking agent.
Inventors
- 👤 Hatsuo Nakamura
- 👤 Tiharu Kato
- 👤 Toshio Yonezawa
- 👤 Shigeo Koguchi
- 👤 Kiyoto Mori
- 👤 Masahiko Igarashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 19:10
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/008; G03F7/012; G03F7/0125; C; C08; C08K; C08K5/00; C08K5/16; C08K5/22; C08K5/27; C08K5/28
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
43 words
A negative-working photoresist coating composition comprising a cyclized polyisoprene having a weight-average molecular weight of 10,000 to 100,000 and a molecular weight distribution of not more than 1.9, an organic solvent of the cyclized polyisoprene, and a bisazido compound as a crosslinking agent.
Claim 2
Dependent Claim
43 words
A negative-working photoresist coating composition comprising a cyclized polyisoprene having a weight-average molecular weight of 10,000 to 100,000 and a molecular weight distribution of not more than 1.9, an organic solvent of the cyclized polyisoprene, and a bisazido compound as a crosslinking agent.
Claim 3
Dependent Claim
24 words
A coating composition according to claim 1, wherein the weight-average molecular weight of the cyclized polyisoprene is in a range of 27,000 to 49,000.
Claim 4
Dependent Claim
21 words
A coating composition according to claim 1, wherein the molecular weight distribution of the cyclized polyisoprene is not more than 1.7.
Claim 5
Dependent Claim
15 words
A coating composition according to claim 1, further comprising a predetermined amount of a stabilizer.
Claim 6
Dependent Claim
16 words
A coating composition according to claim 1, further comprising a predetermined amount of a light-absorbing agent.
Claim 7
Dependent Claim
16 words
A coating composition according to claim 1, wherein the organic solvent is an aromatic hydrocarbon-type solvent.
Claim 8
Dependent Claim
39 words
The coating composition according to claim 1, wherein the weight-average molecular weight of the cyclized polyisoprene is in a range of 27,000 to 62,000 and wherein the molecular weight distribution of the cyclized polyisoprene is from 1.2 to 1.9.
Claim 9
Dependent Claim
38 words
The coating composition of claim 7 wherein the weight-average molecular weight of the cyclized polyisoprene is in a range of 27,000 to 49,000 and wherein the molecular weight distribution of the cyclized polyisoprene is from 1.2 to 1.7.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-06-24 | 1988-12-24 | 1989-06-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-06-24 | 1992-12-24 | 1993-06-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-06-24 | 1996-12-24 | 1997-06-25 | $7700.00 | Window Closed / Lapsed |