Patent US4523094A successfully refreshed from Google Patents.
US4523094A
Expired / Lapsed
US
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Evaluation device for electron-optical images
Assignee: Carl Zeiss AG
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Filing: 1984-02-08
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Granted: 1985-06-11
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Expires: 2004-02-08
Abstract
Abstract The invention contemplates an electron microscope having provision for semi-automatic evaluation of the electron-optical image of the microscope, by superposing a light-optical image on the electron-optical image. For this purpose, an image plane (14) near the microscope column is imaged via two deflection mirrors (23, 25) and by an objective (24) onto the output-image fluorescent screen. A marking device having a light spot or an illuminated measurement diaphragm or the cursor of a digitizer equipped with a light spot is movable in the image plane (14).
Inventors
- 👤 Eberhard Rossow
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:52
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/22; H01J37/224
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
210 words
In an electron microscope having an evacuated envelope with a window (13) through which an output-image fluorescent screen (21) of the microscope is observable, the microscope including electron-optical means (22) for projecting a divergent beam of electrons to form an output image upon said screen (21), a device for evaluating electron-optical images by simultaneous observation of the electron-optical image and of a light-optical image; said device comprising means external to said envelope for establishing an image plane (14) of a visible-light plane, a housing (15) attached to and forming part of said envelope and extending both into and out of said envelope at a location offset from both said screen (21) and said image plane (14), and light-image projecting means carried by said housing and comprising an objective (24) within said housing and a reflector (25) within said envelope and a reflector (23) outside said envelope, said reflectors and objective being positioned to superpose the central ray from the light-image plane (14) upon the intercept of the electron-optical axis with said fluorescent screen (21), and said reflector within said envelope being positioned near said electron-optical means and in clearance with the electron beam whereby to achieve substantial directional conformance of focused electron-optical and of focused light-optical impingement upon said screen.
Claim 2
Dependent Claim
210 words
In an electron microscope having an evacuated envelope with a window (13) through which an output-image fluorescent screen (21) of the microscope is observable, the microscope including electron-optical means (22) for projecting a divergent beam of electrons to form an output image upon said screen (21), a device for evaluating electron-optical images by simultaneous observation of the electron-optical image and of a light-optical image; said device comprising means external to said envelope for establishing an image plane (14) of a visible-light plane, a housing (15) attached to and forming part of said envelope and extending both into and out of said envelope at a location offset from both said screen (21) and said image plane (14), and light-image projecting means carried by said housing and comprising an objective (24) within said housing and a reflector (25) within said envelope and a reflector (23) outside said envelope, said reflectors and objective being positioned to superpose the central ray from the light-image plane (14) upon the intercept of the electron-optical axis with said fluorescent screen (21), and said reflector within said envelope being positioned near said electron-optical means and in clearance with the electron beam whereby to achieve substantial directional conformance of focused electron-optical and of focused light-optical impingement upon said screen.
Claim 3
Dependent Claim
21 words
A device according to claim 1, in which one of the two reflectors (23, 25) is a roof prism (e.g. 25').
Claim 4
Dependent Claim
35 words
A device according to claim 1, in which the reflector (25") within said envelope has an aperture and that the electron-optical axis passes through the aperture, whereby electron-optical imaging is effected through the reflector (25").
Claim 5
Dependent Claim
19 words
A device according to claim 1, in which the interior of said housing is hermetically sealed by window means.
Claim 6
Dependent Claim
42 words
A device according to claim 1, in which said window means includes said objective (24) or a lens of said objective (24), and in which the hermetic seal is via the mount of said objective or of said lens of the objective.
Claim 7
Dependent Claim
88 words
A device according to claim 1, in which a planar drawing surface (10) is provided beneath and parallel to said image plane (14) and that a tracing device (31) having a drawing stylus (33) is displaceable on the drawing plane (10), said tracing device (31) having a flat resting surface (32) and a light spot (35) being arranged in the image plane (14) at a location and on an alignment on a normal to the resting surface (32) and above the drawing point (34) of the stylus (33).
Claim 8
Dependent Claim
31 words
A device according to claim 1, in which an illuminated measurement diaphragm (40) of variable diameter is connected with an evaluation unit (43) and is displaceable in the image plane (14).
Claim 9
Dependent Claim
60 words
A device according to claim 1, in which a digitizer has a table (45) in the drawing plane, and in which a cursor (47) having a light spot (46) in the image plane (14) is displaceable on said table and therefore on the drawing plane (10), and in which the table and cursor are connected with an evaluation unit (49).
Claim 10
Independent Claim
132 words
The method of using a stylus-mounted light source to aid the analysis of a viewable electron-optical image at the image plane within the envelope of an electron microscope, which method comprises establishing a reference plane of movable stylus support external to the microscope envelope, whereby movement of the stylus on said support necessarily moves the light source in a light-source plane at constant offset from the support plane, optically imaging the light-source plane at the electron-image plane by projection through the microscope envelope, whereby the light-spot image may be so moved by stylus manipulation on the support plane as to enable viewed light-spot tracing of a selected profile in a viewed electron-optical image, and entering into computer storage digitized data of stylus displacement in the course of a given manipulated profile tracing.
Claim 11
Independent Claim
132 words
The method of using a stylus-mounted light source to aid the analysis of a viewable electron-optical image at the image plane within the envelope of an electron microscope, which method comprises establishing a reference plane of movable stylus support external to the microscope envelope, whereby movement of the stylus on said support necessarily moves the light source in a light-source plane at constant offset from the support plane, optically imaging the light-source plane at the electron-image plane by projection through the microscope envelope, whereby the light-spot image may be so moved by stylus manipulation on the support plane as to enable viewed light-spot tracing of a selected profile in a viewed electron-optical image, and entering into computer storage digitized data of stylus displacement in the course of a given manipulated profile tracing.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-06-10 | 1988-12-10 | 1989-06-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-06-10 | 1992-12-10 | 1993-06-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-06-10 | 1996-12-10 | 1997-06-11 | $7700.00 | Window Closed / Lapsed |