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US4523000A
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Copolymers, process for the preparation thereof and ionizing radiation sensitive resist using such copolymers
Assignee: Asahi Kasei Corp
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Filing: 1983-10-28
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Granted: 1985-06-11
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Expires: 2003-10-28
Abstract
Abstract Solvent-soluble copolymers having a number average molecular weight of about 1,000 to about 1,000,000 and comprising recurring units of the following formulae (I) and (II) (case A) or recurring unit of the following formulae (I), (II) and (III) (case B) or solvent-soluble graft copolymers having a number average molecular weight of about 1,500 to about 2,000,000 and comprising recurring units of the following formulae (I), (II) and/or (II'), and (IV) (case C) or recurring units of the following formulae (I), (II) and/or (II'), (III) and (IV) (case D), said recurring units being ##STR1## wherein each of R 1 , R 2 and R 3 represents independently hydrogen, a straight or branched chain alkyl group having 1 to 4 carbon atoms or a halogen; R 4 represents hydrogen or a straight or branched chain alkyl group having 1 to 10 carbon atoms; R 5 represents an alkyl group having 1 to 6 carbon atoms, a phenyl group or a benzyl group; R 6 represents hydrogen or a methyl group; R 7 represents a straight or branched chain alkyl group having 1 to 10 carbon atoms, an aryl group, an aralkyl group or an aminoalkyl group; and n is an integer of 1 to 50. A resist having an excellent sensitivity to ionizing radiations and a high resolution, and also having a high dry etching resistance is provided by using these copolymers and graft copolymers.
Inventors
- 👤 Koichi Hatada
- 👤 Yoshio Okamoto
- 👤 Tatsuki Kitayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 22:25
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; C; C08; C08F; C08F212/00; C08F212/02; C08F212/32; C08F212/34; C08F212/36; C08F257/00; G03F7/027; G03F7/032; G03F7/033
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
99 words
A solvent-soluble copolymer having a number average molecular weight of about 1,000 to about 1,000,000 and comprising recurring units represented by the following formulae (I) and (II), said recurring units being combined to form the main alkylene chain, in which the amount of the formula (I) unit is about 3 to about 60 mol % of the total amount of the units of the formulae (I) and (II): ##STR8## wherein each of R 1 , R 2 and R 3 represents independently hydrogen, a straight or branched chain alkyl group having 1 to 4 carbon atoms or a halogen.
Claim 2
Dependent Claim
99 words
A solvent-soluble copolymer having a number average molecular weight of about 1,000 to about 1,000,000 and comprising recurring units represented by the following formulae (I) and (II), said recurring units being combined to form the main alkylene chain, in which the amount of the formula (I) unit is about 3 to about 60 mol % of the total amount of the units of the formulae (I) and (II): ##STR8## wherein each of R 1 , R 2 and R 3 represents independently hydrogen, a straight or branched chain alkyl group having 1 to 4 carbon atoms or a halogen.
Claim 3
Dependent Claim
16 words
The copolymer according to claim 1, wherein each of R 1 and R 2 is hydrogen.
Claim 4
Dependent Claim
11 words
The copolymer according to claim 1, wherein R 3 is hydrogen.
Claim 5
Dependent Claim
11 words
The copolymer according to claim 2, wherein R 3 is hydrogen.
Claim 6
Dependent Claim
23 words
The copolymer according to claim 1, wherein each of R 1 and R 2 is a methyl group and R 3 is hydrogen.
Claim 7
Dependent Claim
31 words
The copolymer according to claim 1, wherein the group --CH═CH 2 in the formula (II) is at the meta- or para-position in relation to the carbon atoms in the main chain.
Claim 8
Dependent Claim
31 words
The copolymer according to claim 4, wherein the group --CH═CH 2 in the formula (II) is at the meta- or para-position in relation to the carbon atoms in the main chain.
Claim 9
Dependent Claim
19 words
The copolymer according to claim 1 which has a number average molecular weight of about 1,000 to about 300,000.
Claim 10
Dependent Claim
35 words
The copolymer according to claim 1, wherein the amount of the formula (I) unit is about 3 to about 50 mol % of the total amount of the units of the formulae (I) and (II).
Claim 11
Dependent Claim
159 words
A solvent-soluble copolymer having a number average molecular weight of about 1,000 to about 1,000,000 and comprising recurring units represented by the following formulae (I), (II) and (III), said recurring units being combined to form the main alkylene chain, in which the total amount of the units of the formulae (I) and (II) is about 60 to about 99 mol % of the total amount of the whole units, the amount of the formula (III) unit is about 1 to about 40 mol % of the total amount of the whole units, and the amount of the formula (I) unit is about 3 to about 60 mol % of the total amount of the units of the formulae (I) and (II): ##STR9## wherein R 1 , R 2 and R 3 have the same meanings as defined in claim 1, and R 4 is hydrogen or a straight or branched chain alkyl group having 1 to 10 carbon atoms.
Claim 12
Dependent Claim
16 words
The copolymer according to claim 10, wherein each of R 1 and R 2 is hydrogen.
Claim 13
Dependent Claim
11 words
The copolymer according to claim 10, wherein R 3 is hydrogen.
Claim 14
Dependent Claim
11 words
The copolymer according to claim 11, wherein R 3 is hydrogen.
Claim 15
Dependent Claim
31 words
The copolymer according to claim 10, wherein the group --CH═CH 2 in the formula (II) is at the meta- or para-position in relation to the carbon atoms in the main chain.
Claim 16
Dependent Claim
31 words
The copolymer according to claim 13, wherein the group --CH═CH 2 in the formula (II) is at the meta- or para-position in relation to the carbon atoms in the main chain.
Claim 17
Dependent Claim
18 words
The copolymer according to claim 10, wherein R 4 is hydrogen, a methyl group or an ethyl group.
Claim 18
Dependent Claim
19 words
The copolymer according to claim 10 which has a number average molecular weight of about 1,000 to about 300,000.
Claim 19
Dependent Claim
35 words
The copolymer according to claim 10, wherein the amount of the formula (I) unit is about 3 to about 50 mol % of the total amount of the units of the formulae (I) and (II).
Claim 20
Dependent Claim
62 words
A process for producing the copolymer as claimed in claim 1, which comprises copolymerizing a mixture of at least one monomer of the following formula (1)and at least one monomer of the following formula (2) in the presence of an anionic polymerization initiator: ##STR10## wherein R 1 , R 2 and R 3 have the same meanings as defined in claim 1.
Claim 21
Dependent Claim
14 words
The process according to claim 19, wherein the anionic polymerization initiator is an alkyllithium.
Claim 22
Dependent Claim
14 words
The process according to claim 19, wherein the alkyllithium is ethyllithium, n-butyllithium or sec-butyllithium.
Claim 23
Dependent Claim
19 words
The process according to claim 19, wherein the copolymerization is carried out in the presence of an inert medium.
Claim 24
Dependent Claim
11 words
The process of claim 22, wherein the inert medium is tetrahydrofuran.
Claim 25
Dependent Claim
22 words
The process according to claim 19, wherein the copolymerization is performed at a temperature of about -90° C. to about 50° C.
Claim 26
Dependent Claim
75 words
A process for producing the copolymer as claimed in claim 10, which comprises copolymerizing a mixture of at least one monomer of the following formula (1), at least one monomer of the following formula (2), and at least one monomer of the following formula (3) in the presence of an anionic polymerization initiator: ##STR11## wherein R 1 , R 2 , R 3 and R 4 have the same meanings as defined in claim 10.
Claim 27
Dependent Claim
14 words
The process according to claim 25, wherein the anionic polymerization initiator is an alkyllithium.
Claim 28
Dependent Claim
14 words
The process according to claim 26, wherein the alkyllithium is ethyllithium, n-butyllithium or sec-butyllithium.
Claim 29
Dependent Claim
19 words
The process according to claim 25, wherein the copolymerization is carried out in the presence of an inert medium.
Claim 30
Dependent Claim
11 words
The process of claim 28, wherein the inert medium is tetrahydrofuran.
Claim 31
Dependent Claim
22 words
The process according to claim 25, wherein the copolymerization is performed at a temperature of about -90° C. to about 50° C.
Claim 32
Dependent Claim
13 words
An ionizing radiation sensitive resist comprising the copolymer as claimed in claim 1.
Claim 33
Dependent Claim
13 words
An ionizing radiation sensitive resist comprising the copolymer as claimed in claim 10.
References Cited (Backward Citations)
US3043817A
Cited
US3493636A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-06-10 | 1988-12-10 | 1989-06-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-06-10 | 1992-12-10 | 1993-06-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-06-10 | 1996-12-10 | 1997-06-11 | $7700.00 | Window Closed / Lapsed |