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US4522679A Expired / Lapsed US ⏱️ 0.0 years remaining

Apparatus for sticking adhesive film on a ring and a thin article

Assignee: Nitto Denko Corp
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Filing: 1984-07-11
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Granted: 1985-06-11
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Expires: 2004-07-11
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Abstract

Abstract An apparatus for semiautomatically sticking an adhesive film on a silicon wafer and on a ring used as a carrier. After the ring and the silicon wafer have been manually positioned on tables, an adhesive film is automatically stuck on the ring and the silicon wafer. The excess portion of the film is then cut by hand along the ring and transversely. The apparatus greatly facilitates these works.

Inventors

  • 👤 Keigo Funakoshi
  • 👤 Minoru Ametani

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 13:40
CPC Classifications
B; B65; B65H; B65H35/00; B65H35/04; B65H35/06; B29; B29C; B29C63/00; B29C63/02; B28; B28D; B28D5/00; B28D5/0058; B28D5/0082; B65B; B65B15/00; B29C2793/00; Y; Y10; Y10T; Y10T156/00; Y10T156/10; Y10T156/1052; Y10T156/108; Y10T156/12; Y10T156/1348; Y10T156/17; Y10T156/1788; Y10T156/1793; Y10T156/1795; Y10T156/18; Y10T83/00; Y10T83/748; Y10T83/7487; Y10T83/7493; Y10T83/7507; Y10T83/768; Y10T83/7755; Y10T83/7788; Y10T83/869; Y10T83/8748; Y10T83/8749

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 129 words
An apparatus for sticking an adhesive film on a ring as a carrier and a thin article such as a silicon wafer comprising: a frame; a table mounted on said frame for holding the ring thereon; a table mounted on said frame for holding the thin article thereon; sticking means adapted to move along the top surface of said tables for pressing the adhesive film against the ring and the thin article to stick it thereon; a cutter supporting frame pivotally mounted on said frame at one end thereof; cutting-out means mounted on said cutter supporting frame for cutting out the web of adhesive film along the outer periphery of said ring; and cutting means mounted on said cutter supporting frame for cutting the web of adhesive film transversely.
Claim 2
Independent Claim 129 words
An apparatus for sticking an adhesive film on a ring as a carrier and a thin article such as a silicon wafer comprising: a frame; a table mounted on said frame for holding the ring thereon; a table mounted on said frame for holding the thin article thereon; sticking means adapted to move along the top surface of said tables for pressing the adhesive film against the ring and the thin article to stick it thereon; a cutter supporting frame pivotally mounted on said frame at one end thereof; cutting-out means mounted on said cutter supporting frame for cutting out the web of adhesive film along the outer periphery of said ring; and cutting means mounted on said cutter supporting frame for cutting the web of adhesive film transversely.
Claim 3
Dependent Claim 28 words
An apparatus as claimed in claim 1, wherein said table for holding the thin article is resiliently supported while said table for holding the ring is fixedly mounted.
Claim 4
Dependent Claim 24 words
An apparatus as claimed in claim 1, wherein said table for holding the ring is integral with said table for holding the thin article.

References Cited (Backward Citations)

US1527763A Cited
US2873789A Cited
US3971691A Cited
US4060893A Cited
US4050971A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1988-06-10 1988-12-10 1989-06-11 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1992-06-10 1992-12-10 1993-06-11 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1996-06-10 1996-12-10 1997-06-11 $7700.00 Window Closed / Lapsed

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