Photodetector

Claim 2

A junction field effect transistor photodetector comprising: a semi-insulating substrate; a semiconductive layer of one type deposited on the substrate; and a relatively narrow rib of semiconductive material of an opposite type deposited on the layer and protruding therefrom; wherein source and drain contacts are provided on the semiconductive layer on opposite sides of the rib and a gate contact is provided on said rib, the rib has a root portion adjacent the layer formed of a higher band gap lower refractive index material covering an optically absorbing lower band gap higher refractive index material of said layer at or immediately beneath the root of the rib disposed such that the rib forms an optical waveguide adapted to guide light, and the lower band gap higher refractive index material of the layer absorbs light in said optical absorbing material.

Claim 3

A photodetector as claimed in claim 1 wherein said optically absorbing lower band gap material is constituted by a strip of material contiguous with said semiconductive layer on which source and drain contacts are provided.

Claim 4

A photodetector as claimed in claim 2 wherein said strip and said layer are of opposite conductivity type.

Claim 5

A photodetector as claimed in claim 2 wherein said strip and said layer are of the same conductivity type.

Claim 6

A photodetector as claimed in claim 1 wherein said rib structure optical waveguide is optically coupled with a further rib waveguide formed integrally with said junction field effect transistor in the material of said layer.

Claim 7

A photodetector as claimed in claim 1 wherein terminal connection with the gate contact of the junction field effect transistor is made by way of a terminal pad that is capacitatively decoupled from said layer to minimise its contribution to gate capacitance.

Claim 8

A photodetector as claimed in claim 6 including an insulating layer formed between the pad and the semiconductive layer for decoupling the pad from said semiconductive layer.

Claim 9

A photodetector as claimed in claim 6 wherein a trough is formed in the semiconductive layer for decoupling the pad from said layer.

Claim 10

A junction field effect transistor photodetector comprising: a semi-insulating substrate; a semiconductive layer of one type deposited on the substrate; and a relatively narrow rib or semiconductive material of an opposite type deposited on a free surface of the layer, said rib extending from a root portion adjacent the layer and protruding therefrom; source and drain contacts deposited on the semiconductive layer on opposite sides of the rib and a gate contact deposited on said rib, the root portion being formed of a material having a selected band gap and refractive index, the layer adjacent the root portion being covered thereby and formed of a material having a selected band gap higher than the rib material and a refractive index lower than said rib material gap such that the rib forms an optical waveguide adapted to guide light to the lower band gap higher refractive index material of the layer for absorption therein.

Claim 11

A junction field effect transistor photodetector comprising: a semi-insulating substrate; a semiconductive layer of one type deposited on the substrate; and a relatively narrow rib or semiconductive material of an opposite type deposited on a free surface of the layer, said rib extending from a root portion adjacent the layer and protruding therefrom; source and drain contacts deposited on the semiconductive layer on opposite sides of the rib and a gate contact deposited on said rib, the root portion being formed of a material having a selected band gap and refractive index, the layer adjacent the root portion being covered thereby and formed of a material having a selected band gap higher than the rib material and a refractive index lower than said rib material gap such that the rib forms an optical waveguide adapted to guide light to the lower band gap higher refractive index material of the layer for absorption therein.

Claim 12

A photodetector as claimed in claim 9 including a transformer region formed in the semi-insulating layer for efficiently coupling light into said waveguide.