Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
112 words
A photochemical vapor deposition apparatus comprising: means, including a vessel, for defining a reaction space in which the photochemical vapor deposition occurs and a discharge space in which electric plasma discharge is generated, said reaction space forming a passage for a photoreactive gas, and said electric plasma being generated for radiating ultraviolet rays which cause a photochemical reaction of said photoreactive gas; a mercury reservoir outside said vessel and in communication with the discharge space by way of a communication pipe; means heating said communication pipe to a temperature higher than the temperature of the mercury reservoir; and means, including a Peltier effect element, for controlling the temperature of the mercury reservoir.
Claim 2
Dependent Claim
112 words
A photochemical vapor deposition apparatus comprising: means, including a vessel, for defining a reaction space in which the photochemical vapor deposition occurs and a discharge space in which electric plasma discharge is generated, said reaction space forming a passage for a photoreactive gas, and said electric plasma being generated for radiating ultraviolet rays which cause a photochemical reaction of said photoreactive gas; a mercury reservoir outside said vessel and in communication with the discharge space by way of a communication pipe; means heating said communication pipe to a temperature higher than the temperature of the mercury reservoir; and means, including a Peltier effect element, for controlling the temperature of the mercury reservoir.
Claim 3
Dependent Claim
31 words
A photochemical vapor deposition apparatus as set forth in claim 1, in which a water-cooled block is provided in contact with one side of the Peltier effect element for cooling thereof.
Claim 4
Dependent Claim
96 words
A photochemical vapor deposition apparatus comprising: means, including a vessel, for defining a reaction space in which the photochemical vapor deposition occurs and a discharge space in which electric plasma discharge is generated, said reaction space forming a passage for a photoreactive gas, and said electric plasma being generated for radiating ultraviolet rays which cause a photochemical reaction of said photoreactive gas; a mercury reservoir outside said vessel and in communication with the discharge space by way of a communication pipe; and means, including a Peltier effect element, for controlling the temperature of the mercury reservoir.
Claim 5
Dependent Claim
96 words
A photochemical vapor deposition apparatus comprising: means, including a vessel, for defining a reaction space in which the photochemical vapor deposition occurs and a discharge space in which electric plasma discharge is generated, said reaction space forming a passage for a photoreactive gas, and said electric plasma being generated for radiating ultraviolet rays which cause a photochemical reaction of said photoreactive gas; a mercury reservoir outside said vessel and in communication with the discharge space by way of a communication pipe; and means, including a Peltier effect element, for controlling the temperature of the mercury reservoir.