Economical transducer apparatus for use in the medical field

Claim 2

A pressure transducer apparatus particularly adapted for use in implementing pressure measurements in the medical field comprising: a planar member fabricated from a highly insulative material and having on a surface a given area adapted to deflect upon application of a force thereto; a dome member having an opened bottom and a domed surface with a hollow between said opened bottom and said domed surface with said opened bottom coupled about said given area of said planar member, with said dome member having at least one pressure port extending from said domed surface and communicating with said hollow, a piezoresistive sensor member secured to said planar member and within said given area, a terminal planar member fabricated from an insulative material and coupled to said planar member, said terminal planar member having an aperture aligned with said active area, and having on a top surface thereof a series of terminal areas, and means coupled said piezoresistive sensor member to said terminal areas on said terminal planar member.

Claim 3

The pressure transducer according to claim 1, wherein said planar member is a rectangular member fabricated from ceramic and having a depression on a surface indicative of said given area.

Claim 4

The pressure transducer according to claim 1, wherein said planar member is a composite member comprising a first glass planar member of a given thickness secured to a thinner glass planar member with said planar member having an aperture indicative of said given area.

Claim 5

The pressure transducer according to claim 1, wherein said terminal planar member is fabricated from a ceramic material.

Claim 6

The pressure transducer according to claim 1, wherein said piezoresistive sensor member is a bridge array bonded to said planar member by an electrostatic bond.

Claim 7

The pressure transducer according to claim 1, wherein said dome member is coupled to said planar member by means of an epoxy.

Claim 8

The pressure transducer according to claim 1, further including a plastic housing secured about said planar members for containing the same.

Claim 9

A pressure transducer, comprising; a first planar member fabricated from a ceramic material and having an aperture located on a surface thereof, a second planar member secured in congruency to said first member, said second member fabricated from glass and being relatively thin as compared to said first member, a semiconductor gage configuration bonded to said second member at the surface opposite to the surface secured to said first member, a third glass planar member secured in congruency to said second planar member at said opposite surface and having an aperture for surrounding said gage configuration, a fourth ceramic planar member secured to said third glass member and having an aperture coaxial with said aperture in said third member, said fourth ceramic member having terminal paths on a surface opposite to the surface secured to said third planar member, and means coupling said gage configuration to said terminal paths on said fourth planar member.

Claim 10

A pressure transducer, comprising; a first planar member fabricated from a ceramic material and having an aperture located on a surface thereof, a second planar member secured in congruency to said first member, said second member fabricated from glass and being relatively thin as compared to said first member, a semiconductor gage configuration bonded to said second member at the surface opposite to the surface secured to said first member, a third glass planar member secured in congruency to said second planar member at said opposite surface and having an aperture for surrounding said gage configuration, a fourth ceramic planar member secured to said third glass member and having an aperture coaxial with said aperture in said third member, said fourth ceramic member having terminal paths on a surface opposite to the surface secured to said third planar member, and means coupling said gage configuration to said terminal paths on said fourth planar member.

Claim 11

The pressure transducer according to claim 8, wherein said second and third members are secured together by an electrostatic bond.

Claim 12

The pressure transducer according to claim 8, further including a hemispherical hollow dome assembly having an opened bottom and at least one pressure port extending from said dome, with said opened bottom secured about said aperture in said first planar member.

Claim 13

The pressure transducer according to claim 8, wherein said dome is secured to said first planar member by means of an epoxy.

Claim 14

The pressure transducer according to claim 8, wherein said planar members are rectangular in configuration.

Claim 15

A pressure transducer comprising: a first planar glass member having located on a surface thereof a depression, a second planar ceramic member secured in congruency with said first member at the surface opposite to that containing said depression, said second member having an aperture of a given diameter coaxially aligned with said depression, a piezoresistive gage bonded to said first member at said surface secured to said second member and located so as to be surrounded by said aperture, a third planar ceramic member having an aperture coaxial with said aperture in said second planar member and bonded at a surface to said second planar member, with the surface opposite said bonded surface having a plurality of interconnection paths and areas coupling said gage to said interconnection paths.

Claim 16

A pressure transducer comprising: a first planar glass member having located on a surface thereof a depression, a second planar ceramic member secured in congruency with said first member at the surface opposite to that containing said depression, said second member having an aperture of a given diameter coaxially aligned with said depression, a piezoresistive gage bonded to said first member at said surface secured to said second member and located so as to be surrounded by said aperture, a third planar ceramic member having an aperture coaxial with said aperture in said second planar member and bonded at a surface to said second planar member, with the surface opposite said bonded surface having a plurality of interconnection paths and areas coupling said gage to said interconnection paths.

Claim 17

The pressure transducer according to claim 13, further comprising a pressure receiving dome having an opened bottom bonded about said depression in said first planar member and having a pressure input port.

Claim 18

The pressure transducer according to claim 13, wherein said planar members are rectangular in configuration.

Claim 19

The pressure transducer, according to claim 13, wherein said first planar member is secured to said second planar member by means of an RTV.

Claim 20

The pressure transducer according to claim 13, wherein said piezoresistive gage is electrostatically bonded to said second planar member.

Claim 21

A pressure transducer apparatus particularly adapted for use in implementing pressure measurements in the medical field, comprising; a first planar member fabricated from a first highly insulative material and having on a surface a given area adapted to deflect upon application of a force thereto; a hemispherical hollow member having an opened bottom and a domed surface with said opened bottom coupled about said given area of said first planar member, with said hemispherical member having at least one pressure port extending from said domed surface and communicating with said hollow, a piezoresistive sensor member secured to said first planar member and within said given area and located on a surface opposite to that containing said area, a second planar member fabricated from a second highly insulative material and coupled to said first planar member and having an aperture surrounding said given area, a third planar member fabricated from an insulative material and coupled to said second member, said third planar member having an aperture coaxial with and aligned with said first aperture, and having on a top surface thereof a series of terminal areas, and means coupling said piezoresistive sensor member to said terminal areas on said third planar member.

Claim 22

A pressure transducer apparatus particularly adapted for use in implementing pressure measurements in the medical field, comprising; a first planar member fabricated from a first highly insulative material and having on a surface a given area adapted to deflect upon application of a force thereto; a hemispherical hollow member having an opened bottom and a domed surface with said opened bottom coupled about said given area of said first planar member, with said hemispherical member having at least one pressure port extending from said domed surface and communicating with said hollow, a piezoresistive sensor member secured to said first planar member and within said given area and located on a surface opposite to that containing said area, a second planar member fabricated from a second highly insulative material and coupled to said first planar member and having an aperture surrounding said given area, a third planar member fabricated from an insulative material and coupled to said second member, said third planar member having an aperture coaxial with and aligned with said first aperture, and having on a top surface thereof a series of terminal areas, and means coupling said piezoresistive sensor member to said terminal areas on said third planar member.

Claim 23

The pressure transducer according to claim 18, wherein said second planar member is fabricated from a glass material.

Claim 24

The pressure transducer according to claim 18, wherein said third planar member is fabricated from a ceramic material with said terminal areas printed thereon by a thick film technique.