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US4515887A Expired / Lapsed US ⏱️ 0.0 years remaining

Photopatternable dielectric compositions, method for making and use

Assignee: Shin Etsu MicroSi Inc
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Filing: 1983-08-29
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Granted: 1985-05-07
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Expires: 2003-08-29
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Abstract

Abstract There is provided a photosensitive modified silicone-aromatic polyamide acid convertible to a patterned silicone-polyimide. A silicone-polyamide acid is modified with an isocyanatoalkylacrylate to produce a silicone-aromatic polyamide acid having acrylate alkylamide groups attached to the silicone-aromatic polyamide acid backbone by nitrogen-nuclear bound carbon linkages.

Inventors

  • 👤 Gary C. Davis

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 18:38
CPC Classifications
C; C08; C08L; C08L83/00; C08L83/04; C08L83/08; G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0757; C08G; C08G73/00; C08G73/06; C08G73/10; C08G73/1057; C08G73/106; C08L79/00; C08L79/04; C08L79/08; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/12; Y10S522/00; Y10S522/904; Y10S522/905

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 189 words
A photosensitive silicone-polyamide acid composition comprising by weight, (A) up to 95% of an inert organic solvent, (B) at least 5% of a modified silicone-aromatic polyamide acid consisting essentially of chemically combined units of the formulas, ##STR9## (C) an effective amount of sensitizer, where Q 1 is a monovalent radical selected from carboxy and acrylate amide groups of the formula, ##STR10## and there are at least 10 mole percent of the acrylate amide groups based on the total carboxy and acrylate amide groups in the silicone-aromatic polyamide, where R is a tetravalent C.sub.(6-30) aromatic radical selected from ##STR11## R 1 is a divalent C.sub.(2-13) organic radical, R 2 is a divalent C.sub.(2-8) organo radical, R 3 is selected from C.sub.(1-3) monovalent hydrocarbon radicals and substituted C.sub.(1-13) monovalent hydrocarbon radicals, Q is a divalent radical having the formula, --ZR.sup.4 Z--, Z is selected from --O-- and --NH--, R 4 and R 5 are selected from C.sub.(2-13) organic radicals, R 6 and R 7 are selected from hydrogen and C.sub.(1-8) alkyl radicals, R 8 is a C.sub.(1-13) divalent organo radical and n is an integer equal to 1 to 20 inclusive.
Claim 2
Dependent Claim 189 words
A photosensitive silicone-polyamide acid composition comprising by weight, (A) up to 95% of an inert organic solvent, (B) at least 5% of a modified silicone-aromatic polyamide acid consisting essentially of chemically combined units of the formulas, ##STR9## (C) an effective amount of sensitizer, where Q 1 is a monovalent radical selected from carboxy and acrylate amide groups of the formula, ##STR10## and there are at least 10 mole percent of the acrylate amide groups based on the total carboxy and acrylate amide groups in the silicone-aromatic polyamide, where R is a tetravalent C.sub.(6-30) aromatic radical selected from ##STR11## R 1 is a divalent C.sub.(2-13) organic radical, R 2 is a divalent C.sub.(2-8) organo radical, R 3 is selected from C.sub.(1-3) monovalent hydrocarbon radicals and substituted C.sub.(1-13) monovalent hydrocarbon radicals, Q is a divalent radical having the formula, --ZR.sup.4 Z--, Z is selected from --O-- and --NH--, R 4 and R 5 are selected from C.sub.(2-13) organic radicals, R 6 and R 7 are selected from hydrogen and C.sub.(1-8) alkyl radicals, R 8 is a C.sub.(1-13) divalent organo radical and n is an integer equal to 1 to 20 inclusive.
Claim 3
Dependent Claim 21 words
A photosensitive silicone-polyamide acid composition in accordance with claim 1, where the nuclear bound acrylate alkylamide groups are methacrylate ethylamide groups.
Claim 4
Dependent Claim 23 words
A photosensitive silicone-polyamide acid composition in accordance with claim 1, where the organic solvent is N-methylpyrrolidone or a mixture of N-methylpyrrolidone and toluene.
Claim 5
Dependent Claim 24 words
A photosensitive silicone-polyamide acid composition in accordance with claim 1, where the sensitizer is Michler's ketone or a mixture of Michler's ketone and N-methyldiethanolamine.

References Cited (Backward Citations)

US30186A Cited
USRE30186E Cited
US4017340A Cited
US4321319A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1988-05-06 1988-11-05 1989-05-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1992-05-06 1992-11-05 1993-05-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1996-05-06 1996-11-05 1997-05-07 $7700.00 Window Closed / Lapsed

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