US4515652A
Expired / Lapsed
US
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Plasma sculpturing with a non-planar sacrificial layer
Assignee: Harris Corp
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Filing: 1984-03-20
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Granted: 1985-05-07
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Expires: 2004-03-20
Abstract
Abstract A method of plasma planarization of the surface topography of a substrate layer is provided wherein a sacrificial layer, having an etch rate substantially different from the etch rate of the substrate layer, is applied to the surface topography of that substrate layer. The sacrificial and substrate layers are then plasma etched to remove the sacrificial layer and portions of the substrate layer. The ratio of substrate layer to sacrificial layer etch rate can be controlled by the specific material and etchant used to compensate for non-planar surface features of the sacrificial layer such that the resulting substrate surface topography is planar.
Inventors
- 👤 George E. Gimpelson
- 👤 Cheryl L. Russo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 22:00
CPC Classifications
C; C03; C03C; C03C15/00; B; B23; B23K; B23K10/00; B23K28/00; C03C23/00; C03C23/0005; C03C23/006; H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10P95/00; H10P95/06; H10P95/062; H10P95/064
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
58 words
A method of plasma planarization of a topographically rough surface layer comprising: selecting a sacrificial layer having an etch rate different from the etch rate of said surface layer in a given plasma environment; applying said sacrificial layer over said surface layer; and plasma etching said sacrificial layer and said surface layer to produce a planar surface layer.
Claim 2
Independent Claim
58 words
A method of plasma planarization of a topographically rough surface layer comprising: selecting a sacrificial layer having an etch rate different from the etch rate of said surface layer in a given plasma environment; applying said sacrificial layer over said surface layer; and plasma etching said sacrificial layer and said surface layer to produce a planar surface layer.
Claim 3
Dependent Claim
26 words
The method of plasma planarization according to claim 1, wherein said sacrificial layer is non-conforming to the rough topography of said surface layer when applied thereto.
Claim 4
Dependent Claim
23 words
The method of plasma planarization according to claim 1, wherein said sacrificial layer is completely removed from said surface layer during plasma etching.
Claim 5
Dependent Claim
26 words
The method of plasma planarization according to claim 1, wherein said sacrifical layer at least covers each feature of the rough topography of said surface layer.
Claim 6
Dependent Claim
34 words
The method of plasma planarization according to claim 1, wherein said etch rate of the sacrificial layer is at least 30% less than said etch rate of the surface layer in the plasma environment.
Claim 7
Independent Claim
65 words
A method of planarizing a topographically rough surface on a substrate by plasma etching comprising: applying a sacrificial layer to said rough surface, wherein said sacrificial layer has, as a function of a plasma environment, an etch rate substantially different from the etch rate of said surface; and plasma etching said sacrificial layer and said surface to produce a topographically planar surface on said substrate.
Claim 8
Independent Claim
65 words
A method of planarizing a topographically rough surface on a substrate by plasma etching comprising: applying a sacrificial layer to said rough surface, wherein said sacrificial layer has, as a function of a plasma environment, an etch rate substantially different from the etch rate of said surface; and plasma etching said sacrificial layer and said surface to produce a topographically planar surface on said substrate.
Claim 9
Dependent Claim
27 words
The method of planarizing according to claim 6, wherein the differences of etch rates during said plasma etching compensates for non-planar surface features of said sacrificial layer.
Claim 10
Dependent Claim
14 words
The method of planarizing according to claim 6, wherein said plasma etching is anisotropic.
Claim 11
Dependent Claim
17 words
The method of planarizing according to claim 6, wherein said sacrificial layer includes low viscosity organic material.
Claim 12
Dependent Claim
34 words
The method of planarizing according to claim 6, wherein the ratio of said etch rate of the substrate to said etch rate of the sacrificial layer is in the range of 1.4 to 10.0.
Claim 13
Dependent Claim
19 words
The method of planarizing according to claim 6, wherein said plasma environment includes CHF 3 and O 2 gases.
Claim 14
Dependent Claim
24 words
The method of planarizing according to claim 11, wherein said etch rate ratio may be selected by controlling one of said gases flow rate.
Claim 15
Independent Claim
77 words
A method of controlling the surface topography of a substrate layer comprising: applying a sacrificial layer over the surface of said substrate layer; and etching said sacrificial layer and said substrate layer in a plasma environment, to remove said sacrificial layer and portions of said substrate layer to produce a selected surface topography on said substrate layer, as a function of the plasma etchant and the relative difference in etching rates of said sacrificial and substrate layers.
Claim 16
Independent Claim
77 words
A method of controlling the surface topography of a substrate layer comprising: applying a sacrificial layer over the surface of said substrate layer; and etching said sacrificial layer and said substrate layer in a plasma environment, to remove said sacrificial layer and portions of said substrate layer to produce a selected surface topography on said substrate layer, as a function of the plasma etchant and the relative difference in etching rates of said sacrificial and substrate layers.
Claim 17
Dependent Claim
40 words
The method of controlling surface topography according to claim 13 wherein the ratio of etching rates of said sacrificial to said substrate layer is solely a function of the material forming said sacrificial layer and the thickness of that layer.
Claim 18
Independent Claim
95 words
A method of producing a semiconductor device comprising the steps of forming an insulating layer on an uneven surface of a substrate having recesses and projections, said insulating layer having recesses and projections substantially corresponding to the recesses and projections of said substrate surface; applying a non-conforming sacrificial layer over said insulating layer; and plasma etching said sacrificial and insulating layers to completely remove said sacrificial layer and remove said insulating layer at a faster rate than said sacrificial layer and thereby decrease the recess and projection dimensions and sidewall angles on said insulating layer.
Claim 19
Independent Claim
95 words
A method of producing a semiconductor device comprising the steps of forming an insulating layer on an uneven surface of a substrate having recesses and projections, said insulating layer having recesses and projections substantially corresponding to the recesses and projections of said substrate surface; applying a non-conforming sacrificial layer over said insulating layer; and plasma etching said sacrificial and insulating layers to completely remove said sacrificial layer and remove said insulating layer at a faster rate than said sacrificial layer and thereby decrease the recess and projection dimensions and sidewall angles on said insulating layer.
Claim 20
Dependent Claim
23 words
The method according to claim 15, wherein said insulating layer includes an oxide of the material comprising the surface of said semiconductor body.
Claim 21
Dependent Claim
28 words
The method according to claim 15, wherein said sacrificial layer includes a photoresist which at least completely fills and covers the recesses and projections of said insulating layer.
Claim 22
Independent Claim
73 words
The method of removing surface irregularities from semiconductor layers to produce a substantially planar surface comprising: applying at least one viscous sacrificial layer to at least cover said surface irregularities; and reactive ion etching said sacrificial layer at an etch rate whose ratio with respect to the etch rate of said surface irregularities is sufficiently less than unity so as to cause planarization of said semiconductor layers when said sacrificial layer is removed.
Claim 23
Independent Claim
73 words
The method of removing surface irregularities from semiconductor layers to produce a substantially planar surface comprising: applying at least one viscous sacrificial layer to at least cover said surface irregularities; and reactive ion etching said sacrificial layer at an etch rate whose ratio with respect to the etch rate of said surface irregularities is sufficiently less than unity so as to cause planarization of said semiconductor layers when said sacrificial layer is removed.
Claim 24
Dependent Claim
20 words
The method according to claim 18, wherein said sacrificial layer is of low viscosity and non-conforming to said surface irregularities.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-05-06 | 1988-11-05 | 1989-05-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-05-06 | 1992-11-05 | 1993-05-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-05-06 | 1996-11-05 | 1997-05-07 | $7700.00 | Window Closed / Lapsed |