Patent US4515480A successfully refreshed from Google Patents.
US4515480A
Expired / Lapsed
US
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Pattern alignment system and method
Assignee: MICRO AUTOMATION Inc
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Filing: 1982-04-07
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Granted: 1985-05-07
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Expires: 2002-04-07
Abstract
Abstract A pattern recognition system for providing automatic alignment capability for a semiconductor wafer or other object. The system includes an integrator for electronically smearing input data representing the reflected light level of a scanned object, means for digitizing the smeared data, and processor means for determining the best match between the smeared, digitized data and predetermined stored data, thereby representing proper alignment of the wafer or other object.
Inventors
- 👤 William I. Miller
- 👤 Robert D. Reimiller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 09:15
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G06; G06V; G06V30/00; G06V30/10; G06V30/14; G06V30/146; G06V30/1475; G06V30/1478
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
87 words
An object alignment system comprising means for optically scanning an object to generate first data signals representing the reflected light level of said scanned object, integrator means connected to receive said first data signals for averaging said first data signals to form second data signals representing electronically smeared data signals for each scan line of said scanned object, and means for determining the best match between said averaged data signals and predetermined stored data signals without regard or dependence upon the sharpness of said averaged data signals.
Claim 2
Dependent Claim
87 words
An object alignment system comprising means for optically scanning an object to generate first data signals representing the reflected light level of said scanned object, integrator means connected to receive said first data signals for averaging said first data signals to form second data signals representing electronically smeared data signals for each scan line of said scanned object, and means for determining the best match between said averaged data signals and predetermined stored data signals without regard or dependence upon the sharpness of said averaged data signals.
Claim 3
Dependent Claim
27 words
A system as in claim 1 wherein said means for determining include means for determining the smallest difference between said stored data signals and said averaged signals.
Claim 4
Dependent Claim
34 words
A system as in claim 1 wherein said means for optically scanning include means for forming first data signals representing split-field data signals which represent at least two different portions of said scanned object.
Claim 5
Dependent Claim
14 words
A system as in claim 1 including means for digitizing said first data signals.
Claim 6
Dependent Claim
14 words
A system as in claim 1 including means for digitizing said second data signals.
Claim 7
Dependent Claim
19 words
A system as in claim 5 including synchronization means for synchronizing said integrator means and said means for determining.
Claim 8
Dependent Claim
13 words
A system as in claim 6 wherein said object is a semiconductor wafer.
Claim 9
Dependent Claim
81 words
In an object alignment system, the method comprising the steps of optically scanning an object to generate first data signals representing the reflected light level of said scanned object, averaging said first data signals to form second data signals representing an electronically smeared data signal for each scan line of said scanned object, and comparing said averaged data signals with predetermined stored data signals to determine the best match therebetween without regard or dependence upon the sharpness of said averaged signal.
Claim 10
Dependent Claim
81 words
In an object alignment system, the method comprising the steps of optically scanning an object to generate first data signals representing the reflected light level of said scanned object, averaging said first data signals to form second data signals representing an electronically smeared data signal for each scan line of said scanned object, and comparing said averaged data signals with predetermined stored data signals to determine the best match therebetween without regard or dependence upon the sharpness of said averaged signal.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-05-06 | 1988-11-05 | 1989-05-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-05-06 | 1992-11-05 | 1993-05-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-05-06 | 1996-11-05 | 1997-05-07 | $7700.00 | Window Closed / Lapsed |