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US4514636B1
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US4514636B1 - - Google Patents
Assignee: Axcelis Technologies Inc
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Filing: 1984-08-13
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Granted: 1989-11-14
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Expires: 2004-08-13
Abstract
No abstract record available.
Inventors
No inventors recorded.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 22:56
CPC Classifications
C; C30; C30B; C30B23/00; C30B23/02; C30B23/06; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/541; C30B31/00; C30B31/20; C30B31/22; H; H10; H10P; H10P30/00; H10P30/20
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-11-13 | 1993-05-15 | 1993-11-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-11-13 | 1997-05-15 | 1997-11-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-11-13 | 2001-05-15 | 2001-11-14 | $7700.00 | Window Closed / Lapsed |