US4513076A
Expired / Lapsed
US
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Electron beam sensitive resist
Assignee: ISP Investments LLC
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Filing: 1983-05-24
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Granted: 1985-04-23
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Expires: 2003-05-24
Abstract
Abstract This invention describes an improved ionizing radiation sensitive material having high contrast, high sensitivity and comprised of a metal complex of a mixed half-ester or half amide product of the reaction of an N-hydroxy or N-aminoalkyl amide and a hydroxy alkyl terminally unsaturated compound with an alkylvinyl ether-maleic anhydride copolymer. A typical material is made by reacting a metal salt with the mixed half-ester or half-amide product of the reaction of an N-hydroxy or N-amino alkyl amide and a hydroxy alkyl terminally unsaturated compound with an alkyl vinyl ether-maleic anhydride copolymer.
Inventors
- 👤 David F. Lewis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 16:34
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; C; C08; C08F; C08F8/00; C08F8/44; G03F7/0388
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
87 words
An improved high sensitivity electron beam resist polymer which is a metal complex, wherein the metal is selected from a group consisting of lead, rhodium, calcium or thallium, wherein the lead, calcium or thallium complex is a salt formed by an excess metal ion and carboxyl ion and the rhodium complex is a metal ion and an olifin group in a one to one relationship of the mixed half-ester reaction product of an alkyl vinyl ether-maleic anhydride copolymer with a terminally unsaturated alcohol and an N-hydroxyalkyl amide.
Claim 2
Dependent Claim
87 words
An improved high sensitivity electron beam resist polymer which is a metal complex, wherein the metal is selected from a group consisting of lead, rhodium, calcium or thallium, wherein the lead, calcium or thallium complex is a salt formed by an excess metal ion and carboxyl ion and the rhodium complex is a metal ion and an olifin group in a one to one relationship of the mixed half-ester reaction product of an alkyl vinyl ether-maleic anhydride copolymer with a terminally unsaturated alcohol and an N-hydroxyalkyl amide.
Claim 3
Dependent Claim
88 words
A high sensitivity electron beam resist polymer comprising the mixed half-ester product of the reaction of a N-hydroxyalkyl amide and a terminally unsaturated alcohol with a metal complex, wherein the metal is selected from a group consisting of lead, rhodium, calcium or thallium, wherein the lead, calcium or thallium complex is a salt formed by an excess metal ion and a carboxy ion and the rhodium complex is a metal ion and an olifin group in a one to one relationship, of an alkyl vinyl ether-maleic anhydride copolymer.
Claim 4
Dependent Claim
88 words
A high sensitivity electron beam resist polymer comprising the mixed half-ester product of the reaction of a N-hydroxyalkyl amide and a terminally unsaturated alcohol with a metal complex, wherein the metal is selected from a group consisting of lead, rhodium, calcium or thallium, wherein the lead, calcium or thallium complex is a salt formed by an excess metal ion and a carboxy ion and the rhodium complex is a metal ion and an olifin group in a one to one relationship, of an alkyl vinyl ether-maleic anhydride copolymer.
Claim 5
Dependent Claim
16 words
A resist according to claim 1 in which said N-hydroxyalkyl amide is an N-hydroxyalkyl cyclic amide.
Claim 6
Dependent Claim
14 words
A resist according to claim 3 in which said amide is an hydroxyalkyl pyrrolidone.
Claim 7
Dependent Claim
16 words
A resist according to claim 1 in which said N-hydroxyalkyl amide is an N-hydroalkyl linear amide.
Claim 8
Dependent Claim
33 words
A resist according to claim 1 in which said N-hydroxyalkyl amide and terminally unsaturated alcohol compounds are present in a molar ratio of about 40:60 to 60:40 to one another in said polymer.
Claim 9
Dependent Claim
33 words
A resist according to claim 1 in which said N-hydroxyalkyl amide and terminally unsaturated alcohol compounds are present in a molar ratio of about 10:90 to 90:10 to one another in said polymer.
Claim 10
Dependent Claim
31 words
A resist according to claim 1 in which said N-hydroxyalkyl amide and terminally unsaturated alcohol compounds are present in a molar ratio of about 50:50 to one another in said polymer.
Claim 11
Dependent Claim
11 words
A resist according to claim 1 wherein said metal is lead.
Claim 12
Dependent Claim
95 words
An information recording material with improved sensitivity to ionizing radiation exposure comprising a copolymer of a metal complex, wherein the metal is selected from a group consisting of lead, rhodium, calcium or thallium, wherein the lead, calcium or thallium complex is a salt formed by an excess metal ion and a carboxy ion and the rhodium complex is a metal ion and an olifin group in a one to one relationship of maleic anhydride and a vinyl monomer, said copolymer being reacted with a mixture of a terminally unsaturated alcohol compound and an N-hydroxyalkyl amide.
Claim 13
Dependent Claim
95 words
An information recording material with improved sensitivity to ionizing radiation exposure comprising a copolymer of a metal complex, wherein the metal is selected from a group consisting of lead, rhodium, calcium or thallium, wherein the lead, calcium or thallium complex is a salt formed by an excess metal ion and a carboxy ion and the rhodium complex is a metal ion and an olifin group in a one to one relationship of maleic anhydride and a vinyl monomer, said copolymer being reacted with a mixture of a terminally unsaturated alcohol compound and an N-hydroxyalkyl amide.
References Cited (Backward Citations)
US3703402A
Cited
US4375398A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-04-22 | 1988-10-22 | 1989-04-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-04-22 | 1992-10-22 | 1993-04-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-04-22 | 1996-10-22 | 1997-04-23 | $7700.00 | Window Closed / Lapsed |