US4511445A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process of enhancing conductivity of material
Assignee: Nokia Bell Labs
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Filing: 1982-06-18
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Granted: 1985-04-16
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Expires: 2002-06-18
Abstract
Abstract The conductivity of a wide range of carbon-containing materials is substantially increased by irradiation with particles having an atomic mass of at least 1. Both polymeric and nonpolymeric, organic and inorganic, materials can be used. The particulate irradiation, for example an ion beam, substantially breaks down the material to a form that includes amorphous carbon having unusually high conductivity. Resistivities of less than 10-3 ohm-cm are possible. When applied as a film on a substrate, the irradiated material can be used for device interconnects. Conducting lines can be produced in the film, as well as vertical contacts through the film.
Inventors
- 👤 Stephen R. Forrest
- 👤 Martin L. Kaplan
- 👤 Paul H. Schmidt
- 👤 Thirumalai N. C. Venkatesan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 02:33
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/45; H10W20/48; H05; H05K; H05K3/00; H05K3/10; H05K3/105; H10P; H10P14/00; H10P14/40; H10P14/412; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31551; Y10T428/31645; Y10T428/31649
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
97 words
A method of making an article characterized by irradiating with particles having an atomic weight of at least 1, at least a portion of carbon-containing material having a resistivity greater than 1 ohm-cm prior to said irradiating, thereby essentially permanently reducing the resistivity of the irradiated portion of the material to less than 0.1 ohm-cm, due substantially to the formation of conducting amorphous-type carbon in said irradiated portion and not due to a possible presence of any metal in the article, with said irradiated portion of the material being adapted for use for the conduction of electrons.
Claim 2
Independent Claim
97 words
A method of making an article characterized by irradiating with particles having an atomic weight of at least 1, at least a portion of carbon-containing material having a resistivity greater than 1 ohm-cm prior to said irradiating, thereby essentially permanently reducing the resistivity of the irradiated portion of the material to less than 0.1 ohm-cm, due substantially to the formation of conducting amorphous-type carbon in said irradiated portion and not due to a possible presence of any metal in the article, with said irradiated portion of the material being adapted for use for the conduction of electrons.
Claim 3
Dependent Claim
12 words
The method of claim 1 wherein said material is an organic compound.
Claim 4
Dependent Claim
12 words
The method of claim 1 wherein said material is a polymeric material.
Claim 5
Dependent Claim
12 words
The method of claim 1 wherein said material is a nonpolymeric material.
Claim 6
Dependent Claim
14 words
The method of claim 1 wherein said material is a film on a substrate.
Claim 7
Dependent Claim
24 words
The method of claim 1 wherein said irradiating reduces the resistivity of the irradiated portion of the material to less than 10 -2 ohm-cm.
Claim 8
Dependent Claim
19 words
The method of claim 1 wherein the initial resistivity of the carbon-containing material is greater than 10 10 ohm-cm.
Claim 9
Dependent Claim
45 words
The method of claim 1 wherein said carbon-containing material prior to said irradiating is a material selected from the group consisting of single crystal material, polycrystalline material, and polymeric material, whereby said irradiating converts the irradiated portion of the material to a substantially amorphous material.
Claim 10
Dependent Claim
34 words
The method of claim 1 wherein said irradiating is selectively applied to said material, whereby one or more irradiated regions are at least partially surrounded by nonirradiated regions of said material following said irradiating.
Claim 11
Dependent Claim
11 words
The method of claim 1 wherein said particles are argon ions.
Claim 12
Dependent Claim
21 words
The method of claim 10 wherein said argon ions have an energy in the range of 100,000 to 10,000,000 electron volts.
Claim 13
Dependent Claim
21 words
An article made according to the method of claim 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, or 11.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-04-15 | 1988-10-15 | 1989-04-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-04-15 | 1992-10-15 | 1993-04-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-04-15 | 1996-10-15 | 1997-04-16 | $7700.00 | Window Closed / Lapsed |