Patent US4508748A successfully refreshed from Google Patents.
US4508748A
Expired / Lapsed
US
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Manufacturing process for selenium photoreceptors
Assignee: Xis Inc
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Filing: 1984-02-13
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Granted: 1985-04-02
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Expires: 2004-02-13
Abstract
Abstract A vapor deposition apparatus including a vacuum chamber, a vacuum pump for evacuating the chamber, and a mounting assembly disposed within the chamber and adapted to support and electrically isolate a plurality of substrate electrode units to be coated. Electrical couplings connect the electrode units to a power supply that establishes therebetween potential gradients that produce a glow discharge and resultant heating thereof. Also disposed within the vacuum chamber is a source of evaporative coating for deposition on the glow discharge heated electrode units.
Inventors
- 👤 Richard C. Eriksson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:10
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32422; C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/541; G; G03; G03G; G03G5/00; G03G5/02; G03G5/04; G03G5/08; G03G5/082
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
99 words
A vacuum deposition method comprising the following steps: providing a vacuum chamber; disposing within said chamber a plurality of substrate electrode units to be coated; reducing the pressure within said vacuum chamber; establishing between said electrode units an electrical potential gradient that produces a glow discharge therebetween and resultant heating thereof; sensing the temperature of said electrode units produced by said glow discharge heating thereof; evaporatively coating said electrode units after a predetermined electrode unit temperature is produced by said glow discharge heating and sensed during said sensing step; and removing said coated electrode units from said vacuum chamber.
Claim 2
Dependent Claim
99 words
A vacuum deposition method comprising the following steps: providing a vacuum chamber; disposing within said chamber a plurality of substrate electrode units to be coated; reducing the pressure within said vacuum chamber; establishing between said electrode units an electrical potential gradient that produces a glow discharge therebetween and resultant heating thereof; sensing the temperature of said electrode units produced by said glow discharge heating thereof; evaporatively coating said electrode units after a predetermined electrode unit temperature is produced by said glow discharge heating and sensed during said sensing step; and removing said coated electrode units from said vacuum chamber.
Claim 3
Dependent Claim
25 words
A method according to claim 1 wherein said electrode units comprise hollow cylindrical electrode units and said glow discharge is produced internally and externally thereof.
Claim 4
Dependent Claim
18 words
A method according to claim 2 including the step of electrically isolating said electrode units from each other.
Claim 5
Dependent Claim
27 words
A method according to claim 3 wherein said disposing step comprises mounting within said chamber a plurality of arrays of uniformly dimensioned, electrically connected cylindrical electrode units.
Claim 6
Dependent Claim
17 words
A method according to claim 4 including the step of rotating said arrays during said coating step.
Claim 7
Dependent Claim
30 words
A method according to claim 5 including the steps of connecting said arrays to a power source during said heating period, and disconnecting said arrays therefrom during said coating step.
Claim 8
Dependent Claim
20 words
A method according to claim 6 including the step of providing gas flow paths into the ends for said arrays.
Claim 9
Dependent Claim
25 words
A method according to claim 4 wherein said establishing step comprises applying a different output of a multi-phase power supply to each of said arrays.
Claim 10
Dependent Claim
20 words
A method according to claim 8 wherein said reducing step comprises evacuating said chamber to a pressure below 100 millitorr.
Claim 11
Dependent Claim
31 words
A method according to claim 9 including the step of backfilling said chamber with an inert gas to a pressure of between 10 and 100 millitorr prior to said heating step.
Claim 12
Dependent Claim
28 words
A method according to claim 10 including the step of introducing into said chamber a controlled amount of oxygen after said heating step and before said coating step.
References Cited (Backward Citations)
US4223048A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-04-01 | 1988-10-01 | 1989-04-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-04-01 | 1992-10-01 | 1993-04-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-04-01 | 1996-10-01 | 1997-04-02 | $7700.00 | Window Closed / Lapsed |