US4504540A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin film element
Assignee: Panasonic Holdings Corp
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Filing: 1984-02-27
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Granted: 1985-03-12
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Expires: 2004-02-27
Abstract
Abstract The invention provides a thin film element which includes a thin film of an organic material, which has a multilayered structure of thin films, and which has a protective film of multilayered structure having films of at least two nonmagnetic materials, or of a thin film of a mixture of at least two nonmagnetic insulating materials. The protective film has a low internal stress, and the step coverage and adhesion strength thereof at edges of the high step portion is excellent.
Inventors
- 👤 Nobuyuki Kaminaka
- 👤 Kenji Kanai
- 👤 Noboru Nomura
- 👤 Yuji Omata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 00:11
CPC Classifications
B; B82; B82Y; B82Y25/00; G; G11; G11B; G11B5/00; G11B5/127; G11B5/31; G11B5/3103; G11B5/3106; H; H01; H01F; H01F10/00; H01F10/32; H01F10/324; H01F10/3254; Y; Y10; Y10S; Y10S428/00; Y10S428/90; Y10S428/901; Y10T; Y10T428/00; Y10T428/11; Y10T428/1193; Y10T428/24; Y10T428/24802; Y10T428/24851; Y10T428/24917
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
94 words
A thin film element, comprising: a substrate; a multilayer thin film structure formed on said substrate for performing a desired function, said structure having a layer comprising an organic material and a layer comprising a magnetic material; and a protective covering on said thin film structure, said covering comprising at least two protective layers of different inorganic nonmagnetic insulating material or mixture thereof, adjacent layers of said protective covering being of different composition, one of said protective layers covering said thin film structure and another of said protective layers covering said one protective layer.
Claim 2
Dependent Claim
94 words
A thin film element, comprising: a substrate; a multilayer thin film structure formed on said substrate for performing a desired function, said structure having a layer comprising an organic material and a layer comprising a magnetic material; and a protective covering on said thin film structure, said covering comprising at least two protective layers of different inorganic nonmagnetic insulating material or mixture thereof, adjacent layers of said protective covering being of different composition, one of said protective layers covering said thin film structure and another of said protective layers covering said one protective layer.
Claim 3
Dependent Claim
22 words
An element according to claim 1, wherein each layer of said protective covering comprises a mixture of at least two major constituents.
Claim 4
Dependent Claim
14 words
An element according to claim 1, wherein said protective covering comprises a multilayered film.
Claim 5
Dependent Claim
33 words
An element according to claim 1, wherein the nonmagnetic insulating materials of said protective covering are two materials selected from the group consisting of Al 2 O 3 , SiO 2 and SiC.
Claim 6
Dependent Claim
14 words
An element according to claim 1, wherein said organic material is a photoresist material.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-03-11 | 1988-09-10 | 1989-03-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-03-11 | 1992-09-10 | 1993-03-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-03-11 | 1996-09-10 | 1997-03-12 | $7700.00 | Window Closed / Lapsed |