Semiconductor circuit for compressing the dynamic range of a signal

Claim 3

The device of claim 1 wherein said channel is doped with impurities having a density to provide a predetermined immobile space charge density when the channel is depleted.

Claim 4

The device of claim 1 wherein said channel is doped with impurities of 1×10 14 atoms/cm 3 .

Claim 5

The device of claim 1 wherein said barrier includes a groove formed in said semiconductor substrate.

Claim 6

The device of claim 4 wherein said groove is at least 5 micrometers deep.

Claim 7

The device of claim 1 wherein said barrier includes an electrode positioned over said substrate and adapted for applying a potential to said electrode to repulse charge in the region underneath.

Claim 8

The device of claim 1 wherein said barrier includes a region of impurities of higher concentration than said substrate to form material of the same type as said substrate and adapted for applying a potential to said region to repulse charge in the region underneath.

Claim 9

The device of claim 1 wherein said semiconductor substrate is silicon and said impurities form P type material.

Claim 10

The device of claim 1 wherein said aperture is 3 micrometers wide.

Claim 11

The device of claim 1 wherein said first region is doped with impurities to form material of opposite type as said substrate.

Claim 12

The device of claim 1 wherein said second region is doped with impurities to form material of opposite type as said substrate.

Claim 13

The device of claim 1 wherein said first region includes a segment having its edge closest to said center line parallel to said center line.

Claim 14

The device of claim 1 wherein said second region includes a segment having its edge closest to said center line parallel to said center line.

Claim 15

The device of claim 1 wherein said first and second regions have edges extending from said barrier to a first predetermined distance away parallel to said center line and spaced from said center line by a second predetermined distance.

Claim 16

The device of claim 14 wherein said first predetermined distance is at least 10 micrometers.

Claim 17

The device of claim 14 wherein said second predetermined distance is at least 4.5 micrometers.

Claim 18

A sensor for detecting radiant energy over a first dynamic range and for providing an output over a second dynamic range less than said first dynamic range comprising: a semiconductor substrate having a plurality of photodetecting regions adapted for receiving radiant energy and doped with impurities for absorbing radiant energy to generate hole-electron pairs, each said photodetecting region coupled to a respective channel in said semiconductor substrate doped with impurities for forming a depletion mode channel, each said photodetecting region including electrode means for collecting and transferring charge from said photodetecting region into said channel, each said channel includes a charge barrier across said channel having an aperture of predetermined width for passing charge through said barrier from a first side to a second side of said barrier, a first region formed in said substrate positioned adjacent said second side of said barrier and to a first side of a center line through said aperture for generating a first electric field having a first potential gradient in said channel as a function of its potential for attracting charge passing through said aperture, a second region formed in said substrate positioned adjacent said second side of said barrier and to a second side of said center line through said aperture for generating a second electric field having a second potential gradient in said channel as a function of its potential for attracting charge passing through said aperture, first means for applying a first predetermined potential to said first region at selected times and for electrically isolating said first predetermined potential from said first region at other times to allow said first region to float electrically, second means for applying a second predetermined potential to said second region, said first and second predetermined potentials having a voltage sufficient to deplete the channel between said first and second regions of majority charge and to attract charge in said channel through said aperture from said first side to said second side, and third means for generating an output signal indicative of the charge collected on said first region.

Claim 19

A sensor for detecting radiant energy over a first dynamic range and for providing an output over a second dynamic range less than said first dynamic range comprising: a semiconductor substrate having a plurality of photodetecting regions adapted for receiving radiant energy and doped with impurities for absorbing radiant energy to generate hole-electron pairs, each said photodetecting region coupled to a respective channel in said semiconductor substrate doped with impurities for forming a depletion mode channel, each said photodetecting region including electrode means for collecting and transferring charge from said photodetecting region into said channel, each said channel includes a charge barrier across said channel having an aperture of predetermined width for passing charge through said barrier from a first side to a second side of said barrier, a first region formed in said substrate positioned adjacent said second side of said barrier and to a first side of a center line through said aperture for generating a first electric field having a first potential gradient in said channel as a function of its potential for attracting charge passing through said aperture, a second region formed in said substrate positioned adjacent said second side of said barrier and to a second side of said center line through said aperture for generating a second electric field having a second potential gradient in said channel as a function of its potential for attracting charge passing through said aperture, first means for applying a first predetermined potential to said first region at selected times and for electrically isolating said first predetermined potential from said first region at other times to allow said first region to float electrically, second means for applying a second predetermined potential to said second region, said first and second predetermined potentials having a voltage sufficient to deplete the channel between said first and second regions of majority charge and to attract charge in said channel through said aperture from said first side to said second side, and third means for generating an output signal indicative of the charge collected on said first region.

Claim 20

The sensor of claim 17 wherein said electrode means includes a dielectric layer on said semiconductor substrate above said photodetecting region, a resistive layer on said dielectric layer above said photodetecting region, having a first low resistance contact at an end nearest said channel and a second low resistance contact at the end opposite said first low resistance contact, fourth means for coupling a potential between said semiconductor substrate and said second low resistance contact, to form a depletion region in said photodetecting region, means for coupling a potential between said first and second low resistance contacts to form a depletion region in said photodetecting region and to attract electrons to the region beneath said first low resistance contact.

Claim 21

The sensor of claim 18 wherein said resistive layer is transparent to selected radiant energy.

Claim 22

The sensor of claim 18 wherein said resistive layer includes aluminum.

Claim 23

The sensor of claim 18 wherein said electrode means includes a gate electrode positioned above said semiconductor substrate on a dielectric layer and adjacent and between said photodetecting region and said charge barrier for transferring charge from beneath said first low resistance contact to said aperture.

Claim 24

The sensor of claim 17 wherein said semiconductor substrate includes a first layer of a first type of material and a second layer of a second type of material above said first layer, fourth means for coupling a potential between said first and second layers to form a reverse biased junction therebetween.

Claim 25

The sensor of claim 17 wherein at least one photodetector region is isolated by grooves in said semiconductor substrate extending from said barrier on each side of said aperture to along side said photodetector region and beyond said second contact.