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US4498772A
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Method to determine the crystalline properties of an interface of two materials by an optical technique
Assignee: Intersil Corp
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Filing: 1982-11-05
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Granted: 1985-02-12
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Expires: 2002-11-05
Abstract
Abstract Crystalline quality of a semiconductor material at its interface with an insulator is optically evaluated by a reflected light beam scanned in wavelength. The refractive index of the material at or near the interface is determined by calculation from the measured values of reflectivity extrema and compared, if desired, to the bulk refractive index of the material. This index is an indicia of the crystalline quality at the interface.
Inventors
- 👤 Lubomir L. Jastrzebski
- 👤 Jacek Lagowski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 07:36
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/41; G01N21/45; G01J; G01J3/00; G01J3/28; G01N21/55
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
217 words
A method for determining the crystalline quality of one material at an interface between said one material and a different material of different crystalline lattice, said one material (1) having an exposed surface opposed to said interface, (2) having negligible absorption in a given optical spectrum, and (3) having a known reflection coefficient at said exposed surface, comprising the steps of; (a) exposing said exposed surface to a light beam scanned sequentially with wavelengths within said optical spectrum whereby light reflected from said exposed surface oscillates in intensity between extrema as a result of interference reflections between said exposed surface and said interface; (b) measuring the intensity of reflections from said surface at each respective wavelength to obtain a series of reflection intensity signals corresponding to each said wavelength; (c) determining from said reflection signals said reflectivity extrema; (d) determining from said extrema the refractive index of said one material at said interface, said refractive index being a measure of the crystalline quality of said one material at or near said interface and comparing the bulk index of refraction of said one material to said determined index of refraction of said one material at or near said interface, the difference between said respective indexes being a measure of the quality of said one material at said interface.
Claim 2
Independent Claim
217 words
A method for determining the crystalline quality of one material at an interface between said one material and a different material of different crystalline lattice, said one material (1) having an exposed surface opposed to said interface, (2) having negligible absorption in a given optical spectrum, and (3) having a known reflection coefficient at said exposed surface, comprising the steps of; (a) exposing said exposed surface to a light beam scanned sequentially with wavelengths within said optical spectrum whereby light reflected from said exposed surface oscillates in intensity between extrema as a result of interference reflections between said exposed surface and said interface; (b) measuring the intensity of reflections from said surface at each respective wavelength to obtain a series of reflection intensity signals corresponding to each said wavelength; (c) determining from said reflection signals said reflectivity extrema; (d) determining from said extrema the refractive index of said one material at said interface, said refractive index being a measure of the crystalline quality of said one material at or near said interface and comparing the bulk index of refraction of said one material to said determined index of refraction of said one material at or near said interface, the difference between said respective indexes being a measure of the quality of said one material at said interface.
Claim 3
Dependent Claim
25 words
The method of claim 1 comprising the step of selecting said one material to be essentially monocrystalline silicon and said different material to be sapphire.
Claim 4
Dependent Claim
31 words
The method according to claim 1 comprising the step of selecting the value of said optical spectrum of light to have a value within the range of 0.5 to 1.0 micrometer.
Claim 5
Dependent Claim
29 words
The method according to claim 1 comprising the step of selecting the thickness of said one material to have a value on the order of 0.5 to 1.0 micrometer.
References Cited (Backward Citations)
US4352016A
Cited
US4352017A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-02-12 | 1988-08-13 | 1989-02-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-02-12 | 1992-08-13 | 1993-02-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-02-12 | 1996-08-13 | 1997-02-12 | $7700.00 | Window Closed / Lapsed |