Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
248 words
Sensor apparatus for measuring temperature or for thermally measuring rate of flow, in a flowing medium, comprising: means for supporting a metal foil in a flowing medium in a position in which said medium may flow along the surface of said foil in contact with at least one surface thereof; a metal foil held in said support means for exposing the surfaces of said foil for heat exchange with said medium, said foil having a stiffness sufficient for providing mechanical stability during exposure to flow of said medium at least up to a predetermined rate of flow thereof; an electrically insulating layer on said at least one surface of said foil; a plurality of resistors respectively constituted as patches of thin electrically resistant layers on said insulating layer, said resistors including at least one pair of resistors having a single common connection and also including two resistors having resistances which vary with temperature, one of which is connected in a circuit for heating said last-mentioned resistor to a regulated extent; connection means on said insulating layer for connecting the respective terminals of said resistors to connection conductors leading to an external measuring circuit; said resistors and connection means substantially covering said at least one surface of said foil, and said foil and said supporting means being of a configuration providing for thermal decoupling from each other of said two resistors of resistance that varies with temperature, by virtue of a subdivision (26, 27) of said foil (14, 14a).
Claim 2
Dependent Claim
248 words
Sensor apparatus for measuring temperature or for thermally measuring rate of flow, in a flowing medium, comprising: means for supporting a metal foil in a flowing medium in a position in which said medium may flow along the surface of said foil in contact with at least one surface thereof; a metal foil held in said support means for exposing the surfaces of said foil for heat exchange with said medium, said foil having a stiffness sufficient for providing mechanical stability during exposure to flow of said medium at least up to a predetermined rate of flow thereof; an electrically insulating layer on said at least one surface of said foil; a plurality of resistors respectively constituted as patches of thin electrically resistant layers on said insulating layer, said resistors including at least one pair of resistors having a single common connection and also including two resistors having resistances which vary with temperature, one of which is connected in a circuit for heating said last-mentioned resistor to a regulated extent; connection means on said insulating layer for connecting the respective terminals of said resistors to connection conductors leading to an external measuring circuit; said resistors and connection means substantially covering said at least one surface of said foil, and said foil and said supporting means being of a configuration providing for thermal decoupling from each other of said two resistors of resistance that varies with temperature, by virtue of a subdivision (26, 27) of said foil (14, 14a).
Claim 3
Dependent Claim
32 words
Sensor apparatus according to claim 1, in which said subdivision of said foil is provided by a slot in said foil located between said two resistors of resistance that varies with temperature.
Claim 4
Dependent Claim
26 words
Sensor apparatus according to claim 1, in which said resistors also comprise two resistors having resistance substantially invariant with temperature for a predetermined range of temperature.
Claim 5
Dependent Claim
63 words
Sensor apparatus according to claim 3, in which said resistors of resistance subject to variation which temperature are constituted by a two-layer system having a tantalum layer on said insulating layer and a nickel layer lying on said tantalum layer, and in which said resistors of resistance substantially invariant with temperature are constituted only by a layer of tantalum on said insulating layer.
Claim 6
Dependent Claim
112 words
Sensor apparatus according to claim 4 in which said resistors are connected in a bridge circuit having two branches each forming half of said bridge, each said branch including one of said resistors of resistance subject to variation with temperature and one resistor of resistance substantially invariant with temperature, one of said branches said one resistor having resistance which varies with temperature which is in said circuit for heating the same, the other resistor of the same branch also being connected in said heating circuit, and in which said subdivision of said foil for thermal decoupling is constituted by a slot separating the resistors of said respective branches of said bridge circuit.
Claim 7
Dependent Claim
30 words
Sensor apparatus according to claim 5, in which said subdivision of said foil includes at least one cutout in the region where said foil is held on said supporting means.
Claim 8
Dependent Claim
23 words
Sensor apparatus according to claim 6, in which said foil is held in said supporting means at only one end or side thereof.
Claim 9
Dependent Claim
36 words
Sensor apparatus according to claim 4, in which said foil is bent over into U-shape and in which said resistors are provided on the surface of said foil which is the interior surface of said U.
Claim 10
Dependent Claim
113 words
Sensor apparatus according to claim 3, in which said resistors are connected in a bridge circuit having two branches each forming half of said bridge circuit, each said branch including one of said resistors of resistance subject to variation with temperature and one resistor of resistance substantially invariant with temperature, one of said branches including said one resistor having resistance which varies with temperature which is in said circuit for heating the same, the other resistor of the same branch being connected in said heating circuit, and in which said subdivision of said foil for thermal decoupling is constituted by a slot separating the resistors of said respective branches of said bridge circuit.
Claim 11
Dependent Claim
30 words
Sensor apparatus according to claim 9, in which said subdivision of said foil includes at least one cutout in the region where said foil is held on said supporting means.
Claim 12
Dependent Claim
23 words
Sensor apparatus according to claim 10, in which said foil is held in said supporting means at only one end or side thereof.
Claim 13
Dependent Claim
30 words
Sensor apparatus according to claim 1, in which said subdivision of said foil includes at least one cutout in the region where said foil is held on said supporting means.
Claim 14
Dependent Claim
23 words
Sensor apparatus according to claim 12, in which said foil is held in said supporting means at only one end or side thereof.
Claim 15
Dependent Claim
36 words
Sensor apparatus according to claim 1, in which said foil is bent over into U-shape and in which said resistors are provided on the surface of said foil which is the interior surface of said U.
Claim 16
Dependent Claim
20 words
Sensor apparatus according to claim 1, in which said metal foil has a thickness of between 25 and 125 μm.
Claim 17
Dependent Claim
15 words
Sensor apparatus according to claim 15, in which said metal foil consists essentially of tantalum.
Claim 18
Dependent Claim
15 words
Sensor apparatus according to claim 1, in which said insulating layer consists essentially of glass.
Claim 19
Dependent Claim
31 words
Sensor apparatus according to claim 1, in which a protective layer is provided which covers said resistors as well as the remainder of said at least one surface of said foil.