US4486659A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Emisson-electron microscope
Assignee: Kevex Corp
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Filing: 1982-01-15
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Granted: 1984-12-04
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Expires: 2002-01-15
Abstract
Abstract An emission-electron microscope comprises an evacuated chamber with a superconducting magnet at one end generating a region of very high field strength. In this region a specimen is mounted and the surface of the specimen is irradiated with photons, typically x-ray or hard ultra-violet, from a source. As a result the specimen emits photo-electrons. The magnetic field is axially symmetrical along the length of the chamber and emitted electrons spiral about the lines of force traveling down the chamber into a region of lower magnetic field controlled by electro-magnet coils. Transverse kinetic energy of the electrons is converted into energy along the lines of force of the magnetic field and the divergence of the magnetic field lines causes electrons to produce on a detector an expanded electron image indicative of the distribution of electron flux across the surface region of the specimen. The emission-electrons may be produced by other stimulation methods, for example neutral atoms or heat (thermal electrons) and arrangements may be provided to permit only electrons of predetermined energy reaching the detector.
Inventors
- 👤 David W. Turner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 04:12
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/26; H01J37/285; Y; Y10; Y10S; Y10S505/00; Y10S505/825; Y10S505/879
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
270 words
An emission-electron microscope comprising: means for generating a magnetic field having a first region at which the field is relatively strong and a second region at which the field is relatively weak and which is interconnected by lines of flux with the first region, means for locating a specimen to be examined in said first region, the specimen being selected or arranged in use such that electrons are emitted by at least a portion of a surface of said specimen extending in said first region at an angle to said field, said magnetic field generating means being arranged so that the field in said first region is sufficiently strong that electrons emitted by the specimen at angles to the magnetic field are constrained by the field to spiral around the lines of flux of the field, electron detector means including a detector located in said second region, said detector means being arranged to provide an indication of the spatial distribution transversely of the field in said second region of electrons emitted by the specimen and travelling to said second region, thereby to provide a magnified emission-electron image of at least part of said surface portion of the specimen, means for controlling and adjusting the relative strengths of the magnetic fields in the first and second regions to effect adjustment of said image magnification, and resolution enhancement means for enhancing the resolution of said magnified image, including means in said first region, in front of said specimen locating means, for preventing continued passage towards said second region of emitted electrons with less than a predetermined kinetic energy along the flux lines.
Claim 2
Dependent Claim
270 words
An emission-electron microscope comprising: means for generating a magnetic field having a first region at which the field is relatively strong and a second region at which the field is relatively weak and which is interconnected by lines of flux with the first region, means for locating a specimen to be examined in said first region, the specimen being selected or arranged in use such that electrons are emitted by at least a portion of a surface of said specimen extending in said first region at an angle to said field, said magnetic field generating means being arranged so that the field in said first region is sufficiently strong that electrons emitted by the specimen at angles to the magnetic field are constrained by the field to spiral around the lines of flux of the field, electron detector means including a detector located in said second region, said detector means being arranged to provide an indication of the spatial distribution transversely of the field in said second region of electrons emitted by the specimen and travelling to said second region, thereby to provide a magnified emission-electron image of at least part of said surface portion of the specimen, means for controlling and adjusting the relative strengths of the magnetic fields in the first and second regions to effect adjustment of said image magnification, and resolution enhancement means for enhancing the resolution of said magnified image, including means in said first region, in front of said specimen locating means, for preventing continued passage towards said second region of emitted electrons with less than a predetermined kinetic energy along the flux lines.
Claim 3
Dependent Claim
34 words
An emission-electron microscope as claimed in claim 1 wherein the field in said first region is homogeneous in the field direction and said means for preventing in said first region is a retarding electrode.
Claim 4
Dependent Claim
56 words
An emission-electron microscope as claimed in claim 2 wherein said means for preventing in said first region includes a further electrode in said first region at a potential relative to said retarding electrode such as to restore the forward kinetic energy along the flux lines lost by the electrons which are transmitted by said retarding electrode.
Claim 5
Dependent Claim
92 words
An emission-electron microscope as claimed in claim 1 wherein the field strength in said first region reduces on each side, in the field direction, from a point of maximum field strength, and said means for locating the specimen is arranged for locating the specimen at a selected distance, in the field direcion, from said point of maximum field strength external to said second region, whereby said point of maximum field strength acts as a magnetic mirror to reflect back said electrons having less than said predetermined kinetic energy along the flux lines.
References Cited (Backward Citations)
US3822382A
Cited
US4096386A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-12-04 | 1988-06-04 | 1988-12-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-12-04 | 1992-06-04 | 1992-12-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-12-04 | 1996-06-04 | 1996-12-04 | $7700.00 | Window Closed / Lapsed |