US4484995A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thermally controlled sputtering of high anisotropy magnetic material
Assignee: Grumman Corp
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Filing: 1984-02-07
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Granted: 1984-11-27
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Expires: 2004-02-07
Abstract
Abstract A substrate coating of a ferromagnetic alloy of a rare earth-transition element mixture is prepared by a hollow cathode sputtering deposition method to produce near single domain films on various substrates.
Inventors
- 👤 Ronald G. Pirich
- 👤 David J. Larson, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:31
CPC Classifications
H; H01; H01F; H01F10/00; H01F10/08; H01F10/10; H01F10/12; H01F10/126; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414; H01F41/00; H01F41/14; H01F41/18
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
84 words
A method of coating a substrate with a magnetic material composed of a ferromagnetic alloy of a rare earth-transition element mixture which comprises hollow cathode sputtering a ferromagnetic alloy of a rare earth-transition element mixture from multiple sources, wherein each component of said mixture is sputtered from one of said multiple sources, at a temperature of from 200° C. to 1000° C. in an inert atmosphere onto a substrate to provide a coating thickness on said substrate of from 0.1 microns to 100 microns.
Claim 2
Independent Claim
84 words
A method of coating a substrate with a magnetic material composed of a ferromagnetic alloy of a rare earth-transition element mixture which comprises hollow cathode sputtering a ferromagnetic alloy of a rare earth-transition element mixture from multiple sources, wherein each component of said mixture is sputtered from one of said multiple sources, at a temperature of from 200° C. to 1000° C. in an inert atmosphere onto a substrate to provide a coating thickness on said substrate of from 0.1 microns to 100 microns.
Claim 3
Dependent Claim
21 words
The method of claim 1 wherein said sputtering is effected at a deposition rate of from 1 micron/hr to 50 microns/hr.
Claim 4
Dependent Claim
19 words
The method of claim 1 wherein the particle size of said substrate coating is less than about 2 microns.
Claim 5
Dependent Claim
32 words
The method of claim 1 wherein said inert atmosphere is provided by a gas selected from the group consisting of argon, helium, or neon or a suitable mixture of said inert gases.
Claim 6
Dependent Claim
39 words
The method of claim 1 wherein said hollow cathode sputtering is effected in a hollow cathode sputtering apparatus which employs a pressure in the range of from 10 microns to 200 microns, inert gas or mixture of inert gases.
Claim 7
Dependent Claim
23 words
The method of claim 1 wherein said substrate is contained in a substrate holder comprised of copper block having resistive heaters embedded therein.
Claim 8
Dependent Claim
23 words
The method of claim 6 further comprising containing said substrate holder in a static magnetic field which produces in-plane or out-of-plane magnetic alignment.
Claim 9
Dependent Claim
29 words
The method of claim 1 wherein said substrate is selected from copper, aluminum, aluminum oxide, titanium, glass or a transition metal element such as iron, Mn, Co, and Ni.
Claim 10
Dependent Claim
32 words
The method of claim 1 wherein said ferromagnetic alloy is selected from a mixture of Sm 2 Co 17 and Co and Sm and produced at an Ar pressure of 150 microns.
Claim 11
Dependent Claim
19 words
The method of claim 9 wherein said substrate temperature during processing is maintained in the range of 900° C.
Claim 12
Dependent Claim
30 words
The method of claim 1 wherein said ferromagnetic alloy is selected from a mixture of SmFe 17 and Fe and Sm and produced at an Ar pressure of 10 microns.
Claim 13
Dependent Claim
19 words
The method of claim 11 wherein said substrate temperature during processing is maintained in the range of 800°-900° C.
References Cited (Backward Citations)
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US4367253A
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US4347112A
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Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-11-27 | 1988-05-28 | 1988-11-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-11-27 | 1992-05-28 | 1992-11-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-11-27 | 1996-05-28 | 1996-11-27 | $7700.00 | Window Closed / Lapsed |