Concentric rod and tube sensor for thermal mass flow controller and flow meter

Claim 2

In a thermal mass flow meter for measuring the flow of fluid therethrough, said flow meter comprising a meter body having a flow path therethrough, the latter having an inlet and an outlet, means for heating said fluid flowing through said flow passage, means for sensing the temperature rise of said fluid flowing through said flow passage heated by said heating means, and means responsive to said temperature rise of said fluid for generating a signal proportional to the mass flow rate of said fluid flowing through said flow passage, wherein the improvement comprises: an inlet bushing within said flow path having at least one opening therethrough, an outlet busing within said flow path having at least one opening therethrough, a tube extending between said bushings, a rod disposed concentrically within said tube, means in said inlet and outlet bushings for positively holding said rod centered within said tube thereby to establish and to maintain a concentric annular opening between the outer surface of said rod and the inner surface of said tube, said annular opening constituting a portion of said flow path.

Claim 3

In a thermal mass flow meter as set forth in claim 1 wherein each of said bushings has a bore in one end thereof for receiving a respective end of said tube, and a socket coaxial with respect to said bore for receiving a respective end of said rod, said bore and socket constituting said means for positively holding said rod centered within said tube.

Claim 4

In a thermal mass flow meter as set forth in claim 2 wherein said socket has a conical taper converging away from said rod, said conical taper being coaxial with respect to said tube received in said bore of said bushing.

Claim 5

In a thermal mass flow meter as set forth in claim 2 wherein said bushing has a plurality of passages therethrough providing communication with said flow path at the end of the bushing opposite said rod and with the concentric annular opening between said rod and said tube.

Claim 6

In a thermal mass flow meter as set forth in claim 4 wherein said plurality of passages are generally axial with respect to said rod.

Claim 7

In a thermal mass flow meter as set forth in claim 4 wherein said plurality of passages are generally radial with respect to said rod.

Claim 8

In a thermal mass flow meter as set forth in claim 1 wherein one of said bushings is in axial engagement with said meter body, and wherein said flow meter further includes spring means interposed between said meter body and the other of said bushings thereby to resiliently bias said other bushing and said tube and said rod into engagement with said bushings.

Claim 9

In a thermal mass flow meter as set forth in claim 1 further comprising seal means engagable with the outer surface of said tube thereby to prevent the flow of fluid past the outer surface of said tube.

Claim 10

In a thermal mass flow meter as set forth in claim 1 wherein said meter body comprises a main body, an inlet body, and an outlet body, fastener means for positively securing said inlet and outlet bodies to said main body, said inlet bushing being received within said inlet body, said outlet bushing being received within said outlet body, and seal means adjacent the inlet and outlet ends of said tube sealingly engageable with said tube and said meter body for preventing the flow of fluid between said meter body and the outer surface of said tube.

Claim 11

In a thermal mass flow meter as set forth in claim 9 wherein one of said end bodies may be removed from the main body so as to permit removal and reinsertion of said tube and rod within said flow meter.

Claim 12

In a thermal mass flow meter for measuring the flow of fluid therethrough, said flow meter comprising a meter body having a flow path therethrough, the latter having an inlet and an outlet, means for heating said fluid flowing through said flow passage, means for sensing the temperature rise of said fluid flowing through said flow passage heated by said heating means, and means responsive to said temperature rise of said fluid for generating a signal proportional to the mass flow rate of said fluid flowing through said flow passage, wherein the improvement comprises: an inlet bushing within said flow path, an outlet bushing within said flow path, a tube extending between said bushings, a rod disposed concentrically within said tube, means in said inlet and outlet bushings for positively holding said rod centered within said tube thereby to establish and to maintain a concentric annular flow passage between the outer surface of said rod and the inner surface of said tube, each of said bushings having a plurality of openings therethrough for providing communication with said flow path at the end of the bushing opposite said rod and with the annular flow passage between said rod and said tube.

Claim 13

In a thermal mass flow meter for measuring the flow of fluid therethrough, said flow meter comprising a meter body having a flow path therethrough, the latter having an inlet and an outlet, means for heating said fluid flowing through said flow passage, means for sensing the temperature rise of said fluid flowing through said flow passage heated by said heating means, and means responsive to said temperature rise of said fluid for generating a signal proportional to the mass flow rate of said fluid flowing through said flow passage, wherein the improvement comprises: an inlet bushing within said flow path, an outlet bushing within said flow path, a tube extending between said bushings, a rod disposed concentrically within said tube, means in said inlet and outlet bushings for positively holding said rod centered within said tube thereby to establish and to maintain a concentric annular flow passage between the outer surface of said rod and the inner surface of said tube, each of said bushings having a plurality of openings therethrough for providing communication with said flow path at the end of the bushing opposite said rod and with the annular flow passage between said rod and said tube.

Claim 14

In a thermal mass flow meter for measuring the flow of fluid therethrough, said flow meter comprising a meter body having a low passage therethrough, the latter having an inlet and an outlet, means for heating said fluid flowing through said flow passage, means for sensing the temperature rise of said fluid flowing through said flow passage heated by said heating means, and means responsive to said temperature rise of said fluid for generating a signal proportional to the mass flow rate of said fluid flowing through said flow passage, wherein the improvement comprises: an inlet bushing within said meter body, an outlet bushing within said meter body, a tube extending between and received by said bushings, a rod disposed concentrically within said tube, means in said inlet and outlet bushings for receiving a respective end of the tube and of said rod so as to positively hold said rod centered within said tube thereby to establish and to maintain a concentric annular flow passage between the outer surface of said rod and the inner surface of said tube, each of said bushings having a bore in one end thereof for receiving a respective end of said tube, and a socket coaxial with respect to said bore for receiving a respective end of said rod, each of said bushings having at least one opening therethrough for providing communication with a portion of said flow passage at the end of the bushing opposite said rod and with the annular flow passage between said rod and said tube, said flow meter further including a spring interposed between said meter body and one of said bushings thereby to resiliently bias said bushings and said tube and rod into engagement with one another.

Claim 15

In a thermal mass flow meter for measuring the flow of fluid therethrough, said flow meter comprising a meter body having a low passage therethrough, the latter having an inlet and an outlet, means for heating said fluid flowing through said flow passage, means for sensing the temperature rise of said fluid flowing through said flow passage heated by said heating means, and means responsive to said temperature rise of said fluid for generating a signal proportional to the mass flow rate of said fluid flowing through said flow passage, wherein the improvement comprises: an inlet bushing within said meter body, an outlet bushing within said meter body, a tube extending between and received by said bushings, a rod disposed concentrically within said tube, means in said inlet and outlet bushings for receiving a respective end of the tube and of said rod so as to positively hold said rod centered within said tube thereby to establish and to maintain a concentric annular flow passage between the outer surface of said rod and the inner surface of said tube, each of said bushings having a bore in one end thereof for receiving a respective end of said tube, and a socket coaxial with respect to said bore for receiving a respective end of said rod, each of said bushings having at least one opening therethrough for providing communication with a portion of said flow passage at the end of the bushing opposite said rod and with the annular flow passage between said rod and said tube, said flow meter further including a spring interposed between said meter body and one of said bushings thereby to resiliently bias said bushings and said tube and rod into engagement with one another.