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Process for producing silicon nitride

Assignee: Toyota Central R&D Labs Inc
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Filing: 1983-07-18
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Granted: 1984-11-20
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Expires: 2003-07-18
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Abstract

Abstract Impurities are removed from chaff by acid treatment, and the chaff is heated for carbonization. Silicon is reduced from the carbonized chaff, and nitrided to form silicon nitride.

Inventors

  • 👤 Masahiro Sugiura
  • 👤 Toshio Kandori
  • 👤 Haruo Doi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 15:23
CPC Classifications
C; C01; C01B; C01B21/00; C01B21/06; C01B21/068; C01B21/0685; C01P; C01P2002/00; C01P2002/70; C01P2002/72

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 50 words
A process for producing silicon nitride, comprising: immersing chaff in a solution of an acid for a time sufficient to remove impurity elements therefrom; washing said chaff with water; drying said chaff; heating said chaff to carbonize it; and reducing silicon from said carbonized chaff and simultaneously nitriding said silicon.
Claim 2
Dependent Claim 50 words
A process for producing silicon nitride, comprising: immersing chaff in a solution of an acid for a time sufficient to remove impurity elements therefrom; washing said chaff with water; drying said chaff; heating said chaff to carbonize it; and reducing silicon from said carbonized chaff and simultaneously nitriding said silicon.
Claim 3
Dependent Claim 17 words
A process according to claim 1, wherein said solution has an acid concentration of 0.01 to 10N.
Claim 4
Dependent Claim 19 words
A process according to claim 2, wherein said chaff is left in said solution for one to 20 hours.
Claim 5
Dependent Claim 28 words
A process according to claim 2, wherein said acid is an inorganic acid selected from the group consisting of hydrochloric acid, nitric acid, sulfuric acid and phosphoric acid.
Claim 6
Dependent Claim 26 words
A process according to claim 2, wherein said acid is an organic acid selected from the group consisting of formic acid, acetic acid and tartaric acid.
Claim 7
Dependent Claim 15 words
A process according to claim 1, wherein said heating is carried out before said immersing.

References Cited (Backward Citations)

US3754076A Cited
US3855395A Cited
JPS52799A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-11-20 1988-05-21 1988-11-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-11-20 1992-05-21 1992-11-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-11-20 1996-05-21 1996-11-20 $7700.00 Window Closed / Lapsed

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