Double self-aligned fabrication process for making a bipolar transistor structure having a small polysilicon-to-extrinsic base contact area

Claim 1

A method for fabricating a bipolar transistor structure comprising the steps of: A. providing a substrate composed a first conductivity type semiconductor material and including a region of insulating material recessed therein and surrounding a central device region, a region of epitaxial material over said substrate and within said surrounding recessed insulating material to form a collector and a second conductivity type subcollector region in said substrate below said epitaxial collector and said central device region, B. depositing a first layer of electrically insulating material over the surface of said substrate, C. depositing a first layer of electrically conductive polysilicon over said first layer of electrically insulating material, D. depositing a second layer of electrically insulating material over said first layer of electrically conductive polysilicon deposited in step C, E. etching a vertical hole through said second layer of insulating material, said layer of conductive material and said first layer of insulating material over said central device region to expose the surface of said substrate to form a device region opening in said structure, said first and second layers of insulating material and said layer of conductive material extending within said region surrounded by said recessed insulating material, F. depositing a second layer of electrically conductive first conductivity type doped polysilicon over said structure, including over the sidewalls of said vertical hole and over said device region opening, said electrically conductive doped polysilicon over said sidewalls of said vertical hole being in contact with said first layer of electrically conductive polysilicon deposited in step C, G. etching away horizontal portions of said second layer of electrically conductive polysilicon to leave remaining vertical portions of said second layer of electrically conductive polysilicon on said sidewalls of said vertical hole to form a vertical region of doped electrically conductive polysilicon between said first layer of electrically conductive polysilicon and the surface of said substrate, H. driving in first conductivity type impurities from said remaining second layer of doped, electrically conductive polysilicon region of step G into said surface of said substrate to form an extrinsic base region having a width substantially the same as said doped, electrically conductive polysilicon region, I. oxidizing said exposed surface of said substrate provided in step E and the sidewall of said vertical region of electrically conductive polysilicon formed in step G such that said vertical region has a width less than said extrinsic base region, J. depositng a layer of oxider over said oxide formed in step I, K. vertically etching said oxide layer formed in step J to remove the horizontal portion thereof to expose the surface of said substrate in said device region and said surface of said second insulting layer formed in step D to leave a remaining oxide sidewall over said vertical region of electrically conductive polysilicon formed in step G, L. forming an intrinsic base region by introducing impurities through the hole formed in step E and bounded by the oxide sidewall formed in step K, said base region thereby being aligned with said oxide sidewall, M. implanting a second conductivity type emitter electrode in said device region, said emitter electrode being aligned with said oxide sidewall formed in step K and and thereby also aligned with said base region formed in step L.

Claim 2

A method for fabricating a bipolar transistor structure comprising the steps of: A. providing a substrate composed a first conductivity type semiconductor material and including a region of insulating material recessed therein and surrounding a central device region, a region of epitaxial material over said substrate and within said surrounding recessed insulating material to form a collector and a second conductivity type subcollector region in said substrate below said epitaxial collector and said central device region, B. depositing a first layer of electrically insulating material over the surface of said substrate, C. depositing a first layer of electrically conductive polysilicon over said first layer of electrically insulating material, D. depositing a second layer of electrically insulating material over said first layer of electrically conductive polysilicon deposited in step C, E. etching a vertical hole through said second layer of insulating material, said layer of conductive material and said first layer of insulating material over said central device region to expose the surface of said substrate to form a device region opening in said structure, said first and second layers of insulating material and said layer of conductive material extending within said region surrounded by said recessed insulating material, F. depositing a second layer of electrically conductive first conductivity type doped polysilicon over said structure, including over the sidewalls of said vertical hole and over said device region opening, said electrically conductive doped polysilicon over said sidewalls of said vertical hole being in contact with said first layer of electrically conductive polysilicon deposited in step C, G. etching away horizontal portions of said second layer of electrically conductive polysilicon to leave remaining vertical portions of said second layer of electrically conductive polysilicon on said sidewalls of said vertical hole to form a vertical region of doped electrically conductive polysilicon between said first layer of electrically conductive polysilicon and the surface of said substrate, H. driving in first conductivity type impurities from said remaining second layer of doped, electrically conductive polysilicon region of step G into said surface of said substrate to form an extrinsic base region having a width substantially the same as said doped, electrically conductive polysilicon region, I. oxidizing said exposed surface of said substrate provided in step E and the sidewall of said vertical region of electrically conductive polysilicon formed in step G such that said vertical region has a width less than said extrinsic base region, J. depositng a layer of oxider over said oxide formed in step I, K. vertically etching said oxide layer formed in step J to remove the horizontal portion thereof to expose the surface of said substrate in said device region and said surface of said second insulting layer formed in step D to leave a remaining oxide sidewall over said vertical region of electrically conductive polysilicon formed in step G, L. forming an intrinsic base region by introducing impurities through the hole formed in step E and bounded by the oxide sidewall formed in step K, said base region thereby being aligned with said oxide sidewall, M. implanting a second conductivity type emitter electrode in said device region, said emitter electrode being aligned with said oxide sidewall formed in step K and and thereby also aligned with said base region formed in step L.