US4482914A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Contact structure of semiconductor device
Assignee: Fujitsu Ltd
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Filing: 1981-12-28
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Granted: 1984-11-13
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Expires: 2001-12-28
Abstract
Abstract When a side of a hole formed in a layer of a semiconductor device is located on a slope of a step-like portion, the side of the hole is formed so that it has a wave shape. A conductor line traverses the wave side of the hole.
Inventors
- 👤 Toru Mano
- 👤 Takeshi Fukuda
- 👤 Toshitaka Fukushima
- 👤 Kouji Ueno
- 👤 Kazuo Tanaka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 09:45
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10P; H10P50/00
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
142 words
A semiconductor device comprising: a semiconductor substrate; an insulating layer covering a surface of said semiconductor substrate and having a a sloped portion and a contact hole; an additional layer formed on said insulating layer and having a hole therein corresponding to said contact hole in said substrate layer, a side of the perimeter of said hole in said additional layer winding on said sloped portion of said insulating layer and on a side of said sloped portion to define protruding and indented portions of said additional layer; and a wiring layer formed on said insulating layer and additional layer to contact said semiconductor substrate thru said contact hole in said insulating layer and said hole in said additional layer, said wiring layer covering said protruding and indented portions of said additional layer and the exposed portions of said insulating layer therebetween.
Claim 2
Dependent Claim
142 words
A semiconductor device comprising: a semiconductor substrate; an insulating layer covering a surface of said semiconductor substrate and having a a sloped portion and a contact hole; an additional layer formed on said insulating layer and having a hole therein corresponding to said contact hole in said substrate layer, a side of the perimeter of said hole in said additional layer winding on said sloped portion of said insulating layer and on a side of said sloped portion to define protruding and indented portions of said additional layer; and a wiring layer formed on said insulating layer and additional layer to contact said semiconductor substrate thru said contact hole in said insulating layer and said hole in said additional layer, said wiring layer covering said protruding and indented portions of said additional layer and the exposed portions of said insulating layer therebetween.
Claim 3
Dependent Claim
32 words
A semiconductor device as recited in claim 1, said protruding and indented portions having a geometric form in the shape of a wave extending along said sloped portion and said side thereof.
Claim 4
Dependent Claim
22 words
A semiconductor device as recited in claim 2, wherein said form in the shape of a wave is substantially a square wave.
Claim 5
Dependent Claim
28 words
A semiconductor device as recited in claim 1, wherein said insulating layer is a thermally oxidized silicon dioxide layer and said additional layer is a polycrystalline silicon layer.
Claim 6
Dependent Claim
46 words
A semiconductor device as recited in claim 1, wherein said insulating layer includes a thin portion and a thick portion and said sloped portion of said insulating layer is formed between said thin portion and said thick portion, and said contact hole in said thin portion.
Claim 7
Dependent Claim
38 words
A semiconductor device as recited in claim 1, wherein said semiconductor substrate has a step-like and said sloped portion of said insulating layer is formed by covering said step-like portion of said semiconductor substrate with said insulating layer.
Claim 8
Dependent Claim
114 words
A semiconductor device comprising: a semiconductor substrate having a step-like portion; an insulating layer on said semiconductor substrate, having a contact hole and covering said step-like portion of said semiconductor substrate, a side of the perimeter of said contact hole winding across said step-like portion of said semiconductor substrate to define protruding and indented portions of said insulating layer at adjacent portions of the periphery of said contact hole, over said step-like portion of said semiconductor substrate,; and a contact layer formed on said insulating layer and on the exposed portion of said semiconductor substrate in said contact hole, said contact layer crossing and covering said protruding and indented portions of said insulating layer.
Claim 9
Dependent Claim
114 words
A semiconductor device comprising: a semiconductor substrate having a step-like portion; an insulating layer on said semiconductor substrate, having a contact hole and covering said step-like portion of said semiconductor substrate, a side of the perimeter of said contact hole winding across said step-like portion of said semiconductor substrate to define protruding and indented portions of said insulating layer at adjacent portions of the periphery of said contact hole, over said step-like portion of said semiconductor substrate,; and a contact layer formed on said insulating layer and on the exposed portion of said semiconductor substrate in said contact hole, said contact layer crossing and covering said protruding and indented portions of said insulating layer.
Claim 10
Dependent Claim
27 words
A semiconductor device as recited in claim 7, said protruding and indented portions of said insulating layer having a geometric form in the shape of a wave.
Claim 11
Dependent Claim
22 words
A semiconductor device as recited in claim 8, wherein said form in the shape of a wave is substantially a square wave.
References Cited (Backward Citations)
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US4322736A
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US4196443A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-11-13 | 1988-05-14 | 1988-11-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-11-13 | 1992-05-14 | 1992-11-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-11-13 | 1996-05-14 | 1996-11-13 | $7700.00 | Window Closed / Lapsed |